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21. 发明授权

US08342018B2 High accuracy battery-operated MEMS mass flow meter 有权
标题翻译：高精度电池操作的MEMS质量流量计
公开(公告)号：US08342018B2
公开(公告)日：2013-01-01
申请号：US12847881
申请日：2010-07-30
申请人： Liji Huang , Kai Peng , Changming Jiang , Wenhong Deng , Chih-Chang Chen
发明人： Liji Huang , Kai Peng , Changming Jiang , Wenhong Deng , Chih-Chang Chen
IPC分类号： G01F1/20
CPC分类号： G01F1/6845
摘要： With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management.
摘要翻译：随着当前工业过程或气体测量应用中对数据通信和远程控制的需求不断增加，新技术的开发将是必要的。本发明提出了一种MEMS质量流量计，其与传统的可变区域流量计成本兼容，同时提供所有数字数据处理，包括累积流量测量，用户可编程流量报警和流量数据存储。这些直列式仪表提供管直径从4 mm到100 mm的包装。它由电池供电，可用作独立的手持选项。该仪表还配有工业标准RS485 Modbus通讯接口，便于网络和远程管理。

22. 发明申请

US20120011940A1 Integrated Micromachining Air Flow Path Clog Sensor 有权
标题翻译：集成微加工空气流路堵塞传感器
公开(公告)号：US20120011940A1
公开(公告)日：2012-01-19
申请号：US12787268
申请日：2010-05-25
申请人： Liji Huang , Jian Luo , Changming Jiang , Yenan Liu , Wenhong Deng , Jialuo Jack Xuan , Chih-Chang Chen
发明人： Liji Huang , Jian Luo , Changming Jiang , Yenan Liu , Wenhong Deng , Jialuo Jack Xuan , Chih-Chang Chen
IPC分类号： G01F1/56
CPC分类号： G01F1/6845
摘要： Nowadays many electronic devices, such as LCD projector, computer servers, and air fresher etc. require reliable air cooling system to reduce the risk of electronics damage caused by overheating. The present invention disclosed an apparatus integrated with air flow sensor as an alarm apparatus for air flow clog detection. The major prior approach for air flow circulation failure detection is based on an indirect measurement method of temperature monitoring on surrounding environments, which method is suffering from the slow response and poor identification of real-time situation. The present invention will demonstrate the advantages by directly monitoring air flow over by indirectly monitoring the surrounding temperature as for the purpose of preventing air flow path clog.
摘要翻译：如今，诸如液晶投影仪，电脑服务器和空气清新器等电子设备需要可靠的空气冷却系统，以减少过热引起的电子设备损坏的风险。本发明公开了一种与空气流量传感器集成的装置，作为气流堵塞检测的报警装置。气流循环故障检测的主要方法是基于对周围环境进行温度监测的间接测量方法，该方法受到响应缓慢和实时状况识别不良。本发明将通过间接地监测周围温度来直接监测气流的优点，以防止气流通道堵塞。

23. 发明申请

US20110301765A1 Integrated Micromachining Proximity Switch Sensors in Air/Oil Lubricators 有权
标题翻译：集成微加工接近开关传感器在空气/油润滑剂
公开(公告)号：US20110301765A1
公开(公告)日：2011-12-08
申请号：US12796565
申请日：2010-06-08
申请人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
发明人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
IPC分类号： G05D7/00 , G05D23/00 , G01N25/00
CPC分类号： G01N33/2888 , G01N25/18
摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
摘要翻译：本发明公开了一种与微加工（即微机电MEMS机械系统）硅热传感器集成的装置，作为空气/油中的接近开关传感器。本发明涉及气相和液相的质量流量感测和测量，涉及多点润滑机的空气/油润滑过程。本发明的装置用作报警装置，以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小，功耗低，可靠性高，精度高等优点。除了上述优点之外，最重要和最关键的优点是其快速响应时间小于20毫秒，这使得接近开关控制变得可行，以防止油润滑剂不连续的设备损坏。

24. 发明申请

US20110283811A1 Integrated Micromachined Wind and Gas Velocity Profiler 有权
标题翻译：集成微加工风和风速剖面仪
公开(公告)号：US20110283811A1
公开(公告)日：2011-11-24
申请号：US12782521
申请日：2010-05-18
申请人： Liji Huang , Jialuo Jack Xuan , Chih-Chang Chen
发明人： Liji Huang , Jialuo Jack Xuan , Chih-Chang Chen
IPC分类号： G01F1/44
CPC分类号： G01F1/6845 , F41G1/40 , G01F1/692
摘要： A wind or gas velocity profiler integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensors in an open or enclosed space is disclosed in the present invention. There are three main embodiments disclosed in the present invention. Through the preambles of the independent claims, the advantages and merits of such measurement apparatus with MEMS flow sensor will be demonstrated as well. A silicon-based MEMS flow sensor can greatly reduce the sensor fabrication cost by a batch production. The integration with MEMS flow sensor makes the invented anemometer operate in the ways of better measurement accuracy, lower power consumption, higher reliability and a compact dimension compared to traditional anemometers such as cup anemometer, thermal anemometer and ultrasonic anemometer.
摘要翻译：在本发明中公开了与开放式或封闭空间中的微机械（微机电，微机电系统）硅传感器集成的风或气体速度分析仪。在本发明中公开了三个主要实施例。通过独立权利要求的前序，也将证明具有MEMS流量传感器的这种测量装置的优点和优点。硅基MEMS流量传感器可以通过批量生产大大降低传感器制造成本。与传统的风速计，比如杯式风速计，热风速计和超声波风速计相比，与MEMS流量传感器的集成使得本发明的风速计以更好的测量精度，更低的功耗，更高的可靠性和紧凑的尺寸运行。

25. 发明授权

US07908096B2 Integrated micromachined thermal mass flow sensor and methods of making the same 有权
标题翻译：集成微加工热质量流量传感器及其制造方法
公开(公告)号：US07908096B2
公开(公告)日：2011-03-15
申请号：US11864804
申请日：2007-09-28
申请人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
发明人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
IPC分类号： G01F1/00
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/6965 , G01F1/698
摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises an upstream thin-film heater, an downstream thin-film heater, and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heaters and the sensors out of contact with the substrate base. This mass flow sensor is operated with three sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates, a second circuit for measuring a flow rate in a second range of flow rates, and a third circuit in a differential configuration for measuring a flow rate in said first range of flow rates or said second range of flow rates, to significantly increase range of flow rate measurements and provide an optional for concentration measurement, while maintains a high degree of measurement accuracy.
摘要翻译：通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。该质量流量传感器包括上游薄膜加热器，下游薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器和传感器的热隔离膜与基底不接触。该质量流量传感器用三组电路操作，第一电路用于测量第一流量范围内的流量，第二电路用于测量在第二流量范围内的流量，以及第三电路用于测量所述第一流量范围或所述第二流量范围内的流量的差分配置，以显着增加流量测量的范围，并提供可选的浓度测量，同时保持高度的测量精度。

26. 发明授权

US07878056B2 Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same 有权
标题翻译：具有自清洁能力的微加工热质量流量传感器及其制造方法
公开(公告)号：US07878056B2
公开(公告)日：2011-02-01
申请号：US11960261
申请日：2007-12-19
申请人： Liji Huang , Chih-Chang Chen , Yahong Yao , Gaofeng Wang
发明人： Liji Huang , Chih-Chang Chen , Yahong Yao , Gaofeng Wang
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6888 , G01F15/006
摘要： The current invention generally relates to Micro Electro Mechanical Systems (MEMS) thermal mass flow sensors for measuring the flow rate of a flowing fluid (gas/liquid) and the methods of manufacturing on single crystal silicon wafers. The said mass flow sensors have self-cleaning capability that is achieved via the modulation of the cavity of which the sensing elements locate on the top of the cavity that is made of a silicon nitride film; alternatively the sensing elements are fabricated on top of a binary silicon nitride/conductive polycrystalline silicon film under which is a porous silicon layer selective formed in a silicon substrate. Using polycrystalline silicon or the sensing elements as electrodes, an acoustic wave can be generated across the porous silicon layer which is also used for the thermal isolation of the sensing elements. The vibration or acoustic energy is effective to remove foreign materials deposited on top surface of the sensing elements that ensure the accuracy and enhance repeatability of the thermal mass flow sensing.
摘要翻译：本发明通常涉及用于测量流动流体（气体/液体）的流量的微机电系统（MEMS）热质量流量传感器以及在单晶硅晶片上的制造方法。所述质量流量传感器具有自清洁能力，其通过其感测元件位于由氮化硅膜制成的空腔顶部上的空腔的调制而实现; 或者，感测元件制造在二元氮化硅/导电多晶硅膜的顶部，在二元氮化硅/导电多晶硅膜的下方是选择性地形成在硅衬底中的多孔硅层。使用多晶硅或感测元件作为电极，可以跨多孔硅层产生声波，其也用于感测元件的热隔离。振动或声能有效地去除沉积在感测元件的顶表面上的异物，以确保精确度并增强热质量流量感测的重复性。

27. 发明授权

US07765679B2 Method of manufacturing a flow rate sensor 有权
标题翻译：制造流量传感器的方法
公开(公告)号：US07765679B2
公开(公告)日：2010-08-03
申请号：US11523436
申请日：2006-09-19
申请人： Yahong Yao , Chih-Chang Chen , Gafeng Wang , Liji Huang
发明人： Yahong Yao , Chih-Chang Chen , Gafeng Wang , Liji Huang
IPC分类号： H05B3/00
CPC分类号： G01F1/6845 , Y10T29/49082 , Y10T29/49083 , Y10T29/49117 , Y10T29/49124 , Y10T29/49155
摘要： A mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or lightly doped P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane.
摘要翻译：通过在取向<100>的N或轻掺杂P型硅衬底上进行微加工工艺的方法制造质量流量传感器。该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成直到底部介电薄膜层暴露。在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。

28. 发明申请

US20090164163A1 INTEGRATED MICROMACHINED THERMAL MASS FLOW SENSOR AND METHODS OF MAKING THE SAME 有权
标题翻译：一体化微孔热流量传感器及其制造方法
公开(公告)号：US20090164163A1
公开(公告)日：2009-06-25
申请号：US11864804
申请日：2007-09-28
申请人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
发明人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
IPC分类号： G01F25/00 , G01F1/69
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/6965 , G01F1/698
摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises an upstream thin-film heater, an downstream thin-film heater, and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heaters and the sensors out of contact with the substrate base. This mass flow sensor is operated with three sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates, a second circuit for measuring a flow rate in a second range of flow rates, and a third circuit in a differential configuration for measuring a flow rate in said first range of flow rates or said second range of flow rates, to significantly increase range of flow rate measurements and provide an optional for concentration measurement, while maintains a high degree of measurement accuracy.
摘要翻译：通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。该质量流量传感器包括上游薄膜加热器，下游薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器和传感器的热隔离膜与基底不接触。该质量流量传感器用三组电路操作，第一电路用于测量第一流量范围内的流量，第二电路用于测量在第二流量范围内的流量，以及第三电路用于测量所述第一流量范围或所述第二流量范围内的流量的差分配置，以显着增加流量测量的范围，并提供可选的浓度测量，同时保持高度的测量精度。

29. 发明申请

US20090016403A1 MICROMACHINED GAS AND LIQUID CONCENTRATION SENSOR AND METHOD OF MAKING THE SAME 有权
标题翻译：微孔气体和液体浓度传感器及其制造方法
公开(公告)号：US20090016403A1
公开(公告)日：2009-01-15
申请号：US11774771
申请日：2007-07-09
申请人： Chih-Chang Chen , Yahong Yao , Gaofeng Wang , Liji Huang
发明人： Chih-Chang Chen , Yahong Yao , Gaofeng Wang , Liji Huang
IPC分类号： G01N25/00 , G01F1/68
CPC分类号： G01N25/20 , G01F1/6845 , G01F1/692
摘要： A device with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensor to measure gas or liquid concentration in a binary mixture formality is disclosed in the present invention. A process for fabricating the said MEMS silicon concentration sensor, which thereby can greatly reduce the sensor fabrication cost by a batch production, is revealed as well. This MEMS process can mass-produce the sensors on silicon substrate in the ways of small size, low power, and high reliability. In addition to the gas or liquid concentration measurement, the present invention further discloses that the said sensor can also readily measure gas or liquid mass flow rate while record the concentration data, which is not viable by other related working principle.
摘要翻译：在本发明中公开了一种具有微加工（a.k.a. MEMS，Micro Electro Mechanical Systems）硅传感器的装置，用于测量二元混合物形式中的气体或液体浓度。也可以揭示制造所述MEMS硅浓度传感器的方法，从而能够通过批量生产大大降低传感器制造成本。该MEMS工艺可以以小尺寸，低功率和高可靠性的方式批量生产硅衬底上的传感器。除了气体或液体浓度测量之外，本发明还公开了所述传感器还可以容易地测量气体或液体质量流量，同时记录其他相关工作原理不可行的浓度数据。

30. 发明授权

US06724516B2 Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices 失效
标题翻译：用于微机电系统（MEMS）光子器件的稳健的多层薄膜膜
公开(公告)号：US06724516B2
公开(公告)日：2004-04-20
申请号：US10062774
申请日：2002-02-01
申请人： Gaofeng Wang , Naiqian Han , Liji Huang
发明人： Gaofeng Wang , Naiqian Han , Liji Huang
IPC分类号： G02B2600
CPC分类号： G02B26/0833 , G02B6/122 , G02B26/001 , G02B2006/12104
摘要： This invention discloses a configuration of thin-film membrane. This thin-film membrane is freestanding, movable, and made of multiple layers of different materials such as silicon nitride, polycrystalline silicon or the combination of these two. This thin-film membrane can be actuated by external controlling forces such as electrostatic force. This thin-film membrane consists of odd number of layers, e.g., 1 layer, 3 layers, 5 layers, . . . , etc. Moreover, the layer profile of this membrane is symmetric, e.g., the bottommost layer is made to be identical to the topmost layer, the next bottommost layer is made to be identical to the next topmost layer, so on and so forth.
摘要翻译：本发明公开了薄膜的结构。该薄膜是独立的，可移动的，并且由多层不同的材料制成，例如氮化硅，多晶硅或这两者的组合。该薄膜可以通过诸如静电力的外部控制力来致动。该薄膜膜由奇数层组成，例如1层，3层，5层。。。此外，该膜的层轮廓是对称的，例如，最底层与最顶层相同，下一个最下层被制成与下一个最上层相同，等等。

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