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1. 发明授权

US10240723B2 Digital regulated gas dispensing apparatus with a MEMS mass flow meter 有权
公开(公告)号：US10240723B2
公开(公告)日：2019-03-26
申请号：US15609518
申请日：2017-05-31
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： F17C13/02 , F17C13/04 , G01F1/684 , G01F1/696 , A61M16/10 , A61M16/16 , A61M16/00
摘要： The design and structure of a regulated digital gas dispense apparatus is exhibited in this disclosure. The MEMS mass flow meter embedded with a Bluetooth communication device and powered by a battery pack is designed to replace the mechanical low pressure gauge in a conventional gas dispense regulator such that the dispensed gas flowrate as well as totalized dispensed gas volume in each session or in consequent sessions can be continuously and precisely registered. The measured data are further relayed to local users via the local display or physical data port as well as via a paired smart device running a customized APP that can further relay the data to a designated cloud for cloud data processing, and the data can be streamed reversely. This disclosure shall assist and realize the ultimate optimized management for the users, distributors and/or gas manufacturers in the gas dispensing industry.

2. 发明授权

US10209156B2 Micromachined pressure sensor and method of making the same 有权
公开(公告)号：US10209156B2
公开(公告)日：2019-02-19
申请号：US15380035
申请日：2016-12-15
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01L9/00
摘要： The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.

3. 发明授权

US10066976B2 Vortex flow meter with micromachined sensing elements 有权
公开(公告)号：US10066976B2
公开(公告)日：2018-09-04
申请号：US15177208
申请日：2016-06-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/32 , G01F1/684
摘要： The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.

4. 发明申请

US20170356772A1 VORTEX FLOW METER WITH MICROMACHINED SENSING ELEMENTS 审中-公开
公开(公告)号：US20170356772A1
公开(公告)日：2017-12-14
申请号：US15177208
申请日：2016-06-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/32 , G01F1/684
CPC分类号： G01F1/3218 , G01F1/6845
摘要： The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.

5. 发明申请

US20170097252A1 COMPOSITE MEMS FLOW SENSOR ON SILICON-ON-INSULATOR DEVICE AND METHOD OF MAKING THE SAME 审中-公开
公开(公告)号：US20170097252A1
公开(公告)日：2017-04-06
申请号：US14875534
申请日：2015-10-05
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/684 , G01F1/692
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/7084 , G01F7/00
摘要： The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric and anemometric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing elements on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.

6. 发明授权

US09360357B2 Micromachined mass flow sensor with condensation prevention and method of making the same 有权
标题翻译：微加速质量流量传感器，防止凝结，并制作相同的方法
公开(公告)号：US09360357B2
公开(公告)日：2016-06-07
申请号：US13847045
申请日：2013-03-19
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/699 , G01F1/684 , G01F1/692
CPC分类号： G01F1/699 , G01F1/6845 , G01F1/692
摘要： The design and manufacture method of a silicon mass flow sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of gas flow measurement with highly humidified or liquid vapors is disclosed in the present invention. The said silicon mass flow sensor operates with an embedded heater and an adjacent control temperature sensor beneath the integrated calorimetric and thermal dissipative sensing thermistors. When the condensation takes place at the surface of the said silicon mass flow sensor, the embedded heater shall be turned on to elevate the temperature of the supporting membrane or substrate for the sensing thermistors. The elevated temperature shall be adjusted to above the vaporization temperature with the feedback data of the adjacent temperature sensor such that the surface condensation due to the presence of the liquid vapors in a gas flow can be effectively eliminated.
摘要翻译：在本发明中公开了使用硅微加工（a.k.a.Microchip，Micro Electro Mechanical Systems）制造的硅质量流量传感器的设计和制造方法，其用于具有高度加湿或液体蒸气的气流测量的应用。所述硅质量流量传感器使用嵌入式加热器和在集成的量热和热耗散感测热敏电阻之下的相邻控制温度传感器来操作。当冷凝发生在所述硅质量流量传感器的表面时，嵌入式加热器应被打开以升高感测热敏电阻的支撑膜或基底的温度。应使用相邻温度传感器的反馈数据将升高的温度调节到高于蒸发温度，以便能够有效地消除气流中存在液体蒸汽的表面冷凝。

7. 发明授权

US08994552B2 MEMS utility meters with exchangeable metrology unit 有权
标题翻译：具有可更换计量单元的MEMS功率表
公开(公告)号：US08994552B2
公开(公告)日：2015-03-31
申请号：US13662520
申请日：2012-10-28
申请人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
发明人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
IPC分类号： G01F5/00 , G08C15/06 , H04Q9/00
CPC分类号： H04Q9/00 , H04Q2209/43 , H04Q2209/60
摘要： An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.
摘要翻译：在本发明中公开了一种使用微机械（即微机电MEMS机电系统）硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气体计量器。仪表有两个独立的计量单位。其中一个单元位于具有插入探测配置的主流道中，而另一个被配置为与主计量单元的旁路单元组件。旁路计量单元可以执行独立的计量任务，并可在维修，维护或维修期间进行现场交换，而无需将仪表从服务管道拆除。旁路计量单元还可用于比较不时测量的数据和性能自我诊断，这将有助于仪表现场服务期间的性能和数据认证。这两个单元可以由电池或外部来源供电。这些单元可以连接到网络，并提供用于数据传输和安全的内部多个存储。

8. 发明申请

US20140318960A1 MICROMACHINED OXYGEN SENSOR AND METHOD OF MAKING THE SAME 有权
标题翻译：微孔氧传感器及其制造方法
公开(公告)号：US20140318960A1
公开(公告)日：2014-10-30
申请号：US13870914
申请日：2013-04-25
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01N27/407
CPC分类号： G01N27/4073 , G01N27/4071 , G01N27/409
摘要： The design and manufacture method of an oxygen concentration sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of oxygen measurement with fast response time and low power consumption is disclosed in the present invention. The said silicon oxygen concentration sensor operates with an yttrium stabilized zirconia oxide amperometric cell supported on a membrane made of silicon nitride with a heat isolation cavity underneath or a silicon nitride membrane with silicon plug for mechanical strength enforcement.
摘要翻译：在本发明中公开了用硅微加工（a.k.a.MicroSystem，Micro Electro Mechanical Systems）制造的氧浓度传感器的设计和制造方法，该方法用于具有快速响应时间和低功耗的氧测量应用。所述硅氧浓度传感器用支撑在由氮化硅制成的膜上的钇稳定的氧化锆氧化物电流计单元进行操作，或者具有用于机械强度实施的硅插头的氮化硅膜。

9. 发明申请

US20140268440A1 Micromachined High Breakdown Voltage ESD Protection Device for Light Emitting Diode and Method of Making the Same 审中-公开
标题翻译：用于发光二极管的微加工高击穿电压ESD保护装置及其制造方法
公开(公告)号：US20140268440A1
公开(公告)日：2014-09-18
申请号：US13795489
申请日：2013-03-12
申请人： Chih-Chang Chen , Liji Huang
发明人： Chih-Chang Chen , Liji Huang
IPC分类号： H02H9/04
CPC分类号： H02H9/046 , H01L27/0248
摘要： This invention relates to a micromachined ESD protection device and its microfabrication method for light emitting diode (LEDs) chips. The LEDs is coupled to the ESD protection device in a shunt connection to absorb and eliminate the electrostatic charges induced by human contact or other voltage spike sources. The ESD protection circuit can prevent the LED from burning down and extend its lifespan. By using a thick polyimide layer as the dielectric film for capacitors in the micromachined ESD protection device at the current invention has the advantages with high breakdown voltage compared to other ESD protection circuits. And furthermore, the device in the current invention is easy for mass production with low manufacturing cost. Another embodiment of the present invention is that the multiple-array arrangement in current micromachined ESD protection device could greatly enhance the liability due to multiple-protection and thus to provide the possibility of multiple-times usage.
摘要翻译：本发明涉及一种用于发光二极管（LED）芯片的微加工ESD保护器件及其微细加工方法。 LED在分流连接中耦合到ESD保护装置，以吸收和消除由人接触或其它电压尖峰源引起的静电电荷。 ESD保护电路可以防止LED燃烧，延长使用寿命。通过使用厚聚酰亚胺层作为本发明的微加工ESD保护器件中的电容器用电介质膜，具有与其它ESD保护电路相比具有高击穿电压的优点。此外，本发明的装置容易进行批量生产，制造成本低。本发明的另一个实施例是当前微加工ESD保护装置中的多阵列布置可以大大增强由于多重保护引起的责任，从而提供多次使用的可能性。

10. 发明授权

US08132455B2 Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane 有权
标题翻译：具有双面钝化聚酰亚胺膜的坚固的微加工热质量流量传感器
公开(公告)号：US08132455B2
公开(公告)日：2012-03-13
申请号：US12538337
申请日：2009-08-10
申请人： Chih-Chang Chen , Gaofeng Wang , Liji Huang , Yahong Yao
发明人： Chih-Chang Chen , Gaofeng Wang , Liji Huang , Yahong Yao
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692
摘要： A micromachined thermal mass flow sensor comprises a high mechanical strength polyimide film as a supporting layer of suspending membrane. The polyimide film provides superior thermal insulating properties to reduce the power consumption of device. Due to the tendency of humidity absorption, the polyimide suspending membrane is double side passivated on both top and bottom surfaces to sustain its long term stability from rush and humid working environment. A thin layer of silicon dioxide deposited by plasma enhanced chemical vapor deposition is overlaid between the silicon nitride and polyimide film to enhance the adhesion property of passivation layers to polyimide surface. With such embodiments, a sturdy and robust micromachined thermal mass flow sensor with high measurement accuracy could be formed.
摘要翻译：微加工热质量流量传感器包括作为悬浮膜的支撑层的高机械强度聚酰亚胺膜。聚酰亚胺薄膜提供优异的隔热性能，以降低设备的功耗。由于吸湿的趋势，聚酰亚胺悬浮膜在顶面和底面都被双面钝化，以保持其在潮湿和潮湿的工作环境下的长期稳定性。通过等离子体增强化学气相沉积沉积的薄的二氧化硅层覆盖在氮化硅和聚酰亚胺膜之间，以增强钝化层与聚酰亚胺表面的粘合性能。通过这样的实施例，可以形成具有高测量精度的坚固且可靠的微加工热质量流量传感器。

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