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    • 4. 发明授权
    • High accuracy battery-operated MEMS mass flow meter
    • 高精度电池操作的MEMS质量流量计
    • US08342018B2
    • 2013-01-01
    • US12847881
    • 2010-07-30
    • Liji HuangKai PengChangming JiangWenhong DengChih-Chang Chen
    • Liji HuangKai PengChangming JiangWenhong DengChih-Chang Chen
    • G01F1/20
    • G01F1/6845
    • With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management.
    • 随着当前工业过程或气体测量应用中对数据通信和远程控制的需求不断增加,新技术的开发将是必要的。 本发明提出了一种MEMS质量流量计,其与传统的可变区域流量计成本兼容,同时提供所有数字数据处理,包括累积流量测量,用户可编程流量报警和流量数据存储。 这些直列式仪表提供管直径从4 mm到100 mm的包装。 它由电池供电,可用作独立的手持选项。 该仪表还配有工业标准RS485 Modbus通讯接口,便于网络和远程管理。