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    • 4. 发明授权
    • High accuracy battery-operated MEMS mass flow meter
    • 高精度电池操作的MEMS质量流量计
    • US08342018B2
    • 2013-01-01
    • US12847881
    • 2010-07-30
    • Liji HuangKai PengChangming JiangWenhong DengChih-Chang Chen
    • Liji HuangKai PengChangming JiangWenhong DengChih-Chang Chen
    • G01F1/20
    • G01F1/6845
    • With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management.
    • 随着当前工业过程或气体测量应用中对数据通信和远程控制的需求不断增加,新技术的开发将是必要的。 本发明提出了一种MEMS质量流量计,其与传统的可变区域流量计成本兼容,同时提供所有数字数据处理,包括累积流量测量,用户可编程流量报警和流量数据存储。 这些直列式仪表提供管直径从4 mm到100 mm的包装。 它由电池供电,可用作独立的手持选项。 该仪表还配有工业标准RS485 Modbus通讯接口,便于网络和远程管理。
    • 5. 发明授权
    • Integrated micromachined wind and gas velocity profiler
    • 集成微加工风和气体速度分析仪
    • US08544320B2
    • 2013-10-01
    • US12782521
    • 2010-05-18
    • Liji HuangJialuo Jack XuanChih-Chang Chen
    • Liji HuangJialuo Jack XuanChih-Chang Chen
    • G01F1/68
    • G01F1/6845F41G1/40G01F1/692
    • A wind or gas velocity profiler integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensors in an open or enclosed space is disclosed in the present invention. There are three main embodiments disclosed in the present invention. Through the preambles of the independent claims, the advantages and merits of such measurement apparatus with MEMS flow sensor will be demonstrated as well. A silicon-based MEMS flow sensor can greatly reduce the sensor fabrication cost by a batch production. The integration with MEMS flow sensor makes the invented anemometer operate in the ways of better measurement accuracy, lower power consumption, higher reliability and a compact dimension compared to traditional anemometers such as cup anemometer, thermal anemometer and ultrasonic anemometer.
    • 在本发明中公开了与开放式或封闭空间中的微机械(微机电,微机电系统)硅传感器集成的风或气体速度分析仪。 在本发明中公开了三个主要实施例。 通过独立权利要求的前序,也将证明具有MEMS流量传感器的这种测量装置的优点和优点。 硅基MEMS流量传感器可以通过批量生产大大降低传感器制造成本。 与传统的风速计,比如杯式风速计,热风速计和超声波风速计相比,与MEMS流量传感器的集成使得本发明的风速计以更好的测量精度,更低的功耗,更高的可靠性和紧凑的尺寸运行。
    • 6. 发明申请
    • Integrated Micromachined Wind and Gas Velocity Profiler
    • 集成微加工风和风速剖面仪
    • US20110283811A1
    • 2011-11-24
    • US12782521
    • 2010-05-18
    • Liji HuangJialuo Jack XuanChih-Chang Chen
    • Liji HuangJialuo Jack XuanChih-Chang Chen
    • G01F1/44
    • G01F1/6845F41G1/40G01F1/692
    • A wind or gas velocity profiler integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensors in an open or enclosed space is disclosed in the present invention. There are three main embodiments disclosed in the present invention. Through the preambles of the independent claims, the advantages and merits of such measurement apparatus with MEMS flow sensor will be demonstrated as well. A silicon-based MEMS flow sensor can greatly reduce the sensor fabrication cost by a batch production. The integration with MEMS flow sensor makes the invented anemometer operate in the ways of better measurement accuracy, lower power consumption, higher reliability and a compact dimension compared to traditional anemometers such as cup anemometer, thermal anemometer and ultrasonic anemometer.
    • 在本发明中公开了与开放式或封闭空间中的微机械(微机电,微机电系统)硅传感器集成的风或气体速度分析仪。 在本发明中公开了三个主要实施例。 通过独立权利要求的前序,也将证明具有MEMS流量传感器的这种测量装置的优点和优点。 硅基MEMS流量传感器可以通过批量生产大大降低传感器制造成本。 与传统的风速计,比如杯式风速计,热风速计和超声波风速计相比,与MEMS流量传感器的集成使得本发明的风速计以更好的测量精度,更低的功耗,更高的可靠性和紧凑的尺寸运行。
    • 7. 发明授权
    • MEMS utility meters with exchangeable metrology unit
    • 具有可更换计量单元的MEMS功率表
    • US08994552B2
    • 2015-03-31
    • US13662520
    • 2012-10-28
    • Changming JiangYong FengSugang JiangChih-Chang ChenLiji Huang
    • Changming JiangYong FengSugang JiangChih-Chang ChenLiji Huang
    • G01F5/00G08C15/06H04Q9/00
    • H04Q9/00H04Q2209/43H04Q2209/60
    • An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.
    • 在本发明中公开了一种使用微机械(即微机电MEMS机电系统)硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气体计量器。 仪表有两个独立的计量单位。 其中一个单元位于具有插入探测配置的主流道中,而另一个被配置为与主计量单元的旁路单元组件。 旁路计量单元可以执行独立的计量任务,并可在维修,维护或维修期间进行现场交换,而无需将仪表从服务管道拆除。 旁路计量单元还可用于比较不时测量的数据和性能自我诊断,这将有助于仪表现场服务期间的性能和数据认证。 这两个单元可以由电池或外部来源供电。 这些单元可以连接到网络,并提供用于数据传输和安全的内部多个存储。
    • 8. 发明申请
    • MEMS UTILITY METERS WITH EXCHANGEABLE METROLOGY UNIT
    • 具有可交换计量单位的MEMS实用程序
    • US20140118161A1
    • 2014-05-01
    • US13662520
    • 2012-10-28
    • Changming JiangYong FengSugang JiangChih-Chang ChenLiji Huang
    • Changming JiangYong FengSugang JiangChih-Chang ChenLiji Huang
    • G01F5/00G08C15/06
    • H04Q9/00H04Q2209/43H04Q2209/60
    • An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.
    • 在本发明中公开了一种使用微机械(即微机电MEMS机电系统)硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气量计。 仪表有两个独立的计量单位。 其中一个单元位于具有插入探测配置的主流道中,而另一个被配置为与主计量单元的旁路单元组件。 旁路计量单元可以执行独立的计量任务,并可在维修,维护或维修期间进行现场交换,而无需将仪表从服务管道拆除。 旁路计量单元还可用于比较不时测量的数据和性能自我诊断,这将有助于仪表现场服务期间的性能和数据认证。 这两个单元可以由电池或外部来源供电。 这些单元可以连接到网络,并提供用于数据传输和安全的内部多个存储。
    • 9. 发明申请
    • Integrated Micromachining Proximity Switch Sensors in Air/Oil Lubricators
    • 集成微加工接近开关传感器在空气/油润滑剂
    • US20110301765A1
    • 2011-12-08
    • US12796565
    • 2010-06-08
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • G05D7/00G05D23/00G01N25/00
    • G01N33/2888G01N25/18
    • An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
    • 本发明公开了一种与微加工(即微机电MEMS机械系统)硅热传感器集成的装置,作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量,涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置,以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小,功耗低,可靠性高,精度高等优点。 除了上述优点之外,最重要和最关键的优点是其快速响应时间小于20毫秒,这使得接近开关控制变得可行,以防止油润滑剂不连续的设备损坏。
    • 10. 发明授权
    • Integrated micromachining proximity switch sensors in air/oil lubricators
    • 空气/油润滑器中的集成微加工接近开关传感器
    • US08644693B2
    • 2014-02-04
    • US12796565
    • 2010-06-08
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • F24H1/10
    • G01N33/2888G01N25/18
    • An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
    • 本发明公开了一种与微加工(即微机电MEMS机械系统)硅热传感器集成的装置,作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量,涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置,以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小,功耗低,可靠性高,精度高等优点。 除了上述优点之外,最重要和最关键的优点是其快速响应时间小于20毫秒,这使得接近开关控制变得可行,以防止油润滑剂不连续的设备损坏。