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    • 13. 发明授权
    • MOSFET with super-steep retrograded island
    • 具超级陡峭退火岛的MOSFET
    • US07723750B2
    • 2010-05-25
    • US11774221
    • 2007-07-06
    • Huilong ZhuEffendi LeobandungAnda C. MocutaDan M. Mocuta
    • Huilong ZhuEffendi LeobandungAnda C. MocutaDan M. Mocuta
    • H01L29/737
    • H01L29/7842H01L21/26586H01L21/823807H01L21/823814H01L29/105H01L29/1608H01L29/6656H01L29/6659H01L29/66636H01L29/7833H01L29/7848
    • The present invention comprises a method for forming a semiconducting device including the steps of providing a layered structure including a substrate, a low diffusivity layer of a first-conductivity dopant; and a channel layer; forming a gate stack atop a protected surface of the channel layer; etching the layered structure selective to the gate stack to expose a surface of the substrate, where a remaining portion of the low diffusivity layer provides a retrograded island substantially aligned to the gate stack having a first dopant concentration to reduce short-channel effects without increasing leakage; growing a Si-containing material atop the recessed surface of the substrate; and doping the Si-containing material with a second-conductivity dopant at a second dopant concentration. The low diffusivity layer may be Si1-x-yGexZy, where Z can be carbon (C), xenon (Xe), germanium (Ge), krypton (Kr), argon (Ar), nitrogen (N), or combinations thereof.
    • 本发明包括一种形成半导体器件的方法,包括以下步骤:提供包括衬底,第一导电掺杂剂的低扩散层的分层结构; 和通道层; 在沟道层的受保护表面上方形成栅极堆叠; 蚀刻对栅极堆叠选择性的层状结构以暴露衬底的表面,其中低扩散层的剩余部分提供基本上与具有第一掺杂剂浓度的栅极堆叠对准的退化岛,以减少短沟道效应而不增加泄漏 ; 在衬底的凹陷表面的顶部生长含Si材料; 并且以第二掺杂剂浓度用第二导电掺杂剂掺杂含Si材料。 低扩散性层可以是Si1-x-yGexZy,其中Z可以是碳(C),氙(Xe),锗(Ge),氪(Kr),氩(Ar),氮(N)或它们的组合。
    • 19. 发明授权
    • Method of providing protection against charging damage in hybrid orientation transistors
    • 在混合取向晶体管中提供防止充电损坏的方法
    • US07879650B2
    • 2011-02-01
    • US12002807
    • 2007-12-19
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • H01L21/8238
    • H01L21/84H01L21/823807H01L21/823878H01L27/0251H01L27/0629H01L27/1203H01L27/1207
    • In a method of fabricating a CMOS structure, a bulk device can be formed in a first region in conductive communication with an underlying bulk region of the substrate. A first gate conductor may overlie the first region. An SOI device can be formed which has a source drain conduction path in a SOI layer, i.e., a semiconductor layer that is separated from the bulk region by a buried dielectric region. The crystal orientations of the SOI layer and the bulk region can be different. A first diode can be formed in a second region of the substrate in conductive communication with the bulk region. The first diode may be connected in a reverse-biased orientation to a first gate conductor above the SOI layer, such that a voltage on the gate conductor that exceeds the breakdown voltage can be discharged through the first diode to the bulk region of the substrate. A second diode may be formed in a third region of the substrate in conductive communication with the bulk region. The second diode may be connected in a reverse-biased orientation to a source region or a drain region of an NFET.
    • 在制造CMOS结构的方法中,本体器件可以形成在与衬底的下面的主体区域导电连通的第一区域中。 第一栅极导体可以覆盖在第一区域上。 可以形成在SOI层中具有源极漏极传导路径的SOI器件,即通过掩埋电介质区域与本体区域分离的半导体层。 SOI层和体区的晶体取向可以不同。 第一二极管可以形成在衬底的与体区导电连通的第二区域中。 第一二极管可以以反向偏置的方式连接到SOI层上方的第一栅极导体,使得超过击穿电压的栅极导体上的电压可以通过第一二极管放电到衬底的主体区域。 第二二极管可以形成在衬底的与体区导电连通的第三区域中。 第二二极管可以以反向偏置的方式连接到NFET的源极区域或漏极区域。