专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US5122660A Distance measuring system utilizing an object with at least one inclined surface 失效
标题翻译：距离测量系统使用至少一个内置表面的对象
公开(公告)号：US5122660A
公开(公告)日：1992-06-16
申请号：US671657
申请日：1991-03-19
申请人： Minoru Yoshii , Noriyuki Nose , Yukichi Niwa , Ryo Kuroda
发明人： Minoru Yoshii , Noriyuki Nose , Yukichi Niwa , Ryo Kuroda
IPC分类号： G01D5/38 , G02B7/32 , G11B7/085
CPC分类号： G11B7/085 , G01D5/38 , G02B7/32
摘要： A device for measuring a relatively moving distance of two relatively moving objects is disclosed. The device includes a plurality of inclined surfaces formed on one of the objects and arrayed with a predetermined pitch along the relatively moving direction, with each of the inclined surfaces being inclined with respect to the relatively moving direction. A measuring portion is provided on the other object for measuring the distance to at least one of the inclined surfaces in a direction having an angle with respect to the relatively moving direction, and a detecting portion detects the relatively moving distance of the two objects on the basis of the measurement by the measuring portion.
摘要翻译：公开了一种用于测量两个相对移动的物体的相对移动距离的装置。该装置包括形成在一个物体上的多个倾斜表面，并且沿相对移动的方向以预定间距排列，每个倾斜表面相对于相对移动的方向倾斜。测量部分设置在另一物体上，用于测量在相对于相对运动方向具有角度的方向上至少一个倾斜表面的距离，并且检测部分检测两个物体在相对移动方向上的相对移动的距离由测量部分测量的基础。

12. 发明授权

US5834767A Surface position detecting system and projection exposure apparatus using the same 失效
标题翻译：表面位置检测系统和使用其的投影曝光装置
公开(公告)号：US5834767A
公开(公告)日：1998-11-10
申请号：US790798
申请日：1997-01-30
申请人： Masanobu Hasegawa , Minoru Yoshii , Kyoichi Miyazaki
发明人： Masanobu Hasegawa , Minoru Yoshii , Kyoichi Miyazaki
IPC分类号： G01B11/00 , G01B11/26 , G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F9/7026
摘要： A detecting system for detecting a surface position of an object, includes a light source, a first grating having a light collecting function, wherein the first grating is illuminated with light from the light source, a second grating having a light collecting function, a first optical system for imaging the first grating onto the object in a direction oblique to the surface of the object, a second optical system for re-imaging the image of the first grating, on the surface of the object, onto the second grating, wherein a moire fringe is produced by the second grating and the re-imaged image of the first grating, and a photodetector for detecting a position of a converged point of convergent light as produced by the moire fringe, wherein the surface position information of the object is determined on the basis of information related to the converged point position as detected by the photodetector.
摘要翻译：一种用于检测物体的表面位置的检测系统，包括光源，具有聚光功能的第一光栅，其中第一光栅被来自光源的光照射，具有光收集功能的第二光栅，第一光栅光学系统，用于将物体上的第一光栅成像到物体表面上的方向上;第二光学系统，用于将物体表面上的第一光栅的图像重新成像到第二光栅上，其中，莫尔条纹由第二光栅和第一光栅的再成像图像产生，以及光电检测器，用于检测由莫尔条纹产生的会聚光的会聚点的位置，其中确定物体的表面位置信息基于与由光检测器检测到的会聚点位置有关的信息。

13. 发明授权

US5343291A Method and apparatus for measuring an interval between two objects 失效
标题翻译：用于测量两个物体间隔的方法和装置
公开(公告)号：US5343291A
公开(公告)日：1994-08-30
申请号：US851109
申请日：1992-03-16
申请人： Mitsutoshi Ohwada , Masakazu Matsugu , Shigeyuki Suda , Minoru Yoshii , Yukichi Niwa , Noriyuki Nose , Kenji Saitoh , Masanobu Hasegawa
发明人： Mitsutoshi Ohwada , Masakazu Matsugu , Shigeyuki Suda , Minoru Yoshii , Yukichi Niwa , Noriyuki Nose , Kenji Saitoh , Masanobu Hasegawa
IPC分类号： G03F9/00 , G01B11/02
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for measuring an interval between two plate-like objects includes a light source for projecting a light toward the objects, a detector for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.
摘要翻译：用于测量两个板状物体之间的间隔的装置包括：用于向物体投射光的光源;检测器，用于检测由光源投射并被光源偏转的预定表面上的入射位置; 两个物体和用于根据检测器的检测来测量两个物体的间隔的计算部分。

14. 发明授权

US5319444A Position detecting method and apparatus 失效
标题翻译：位置检测方法和装置
公开(公告)号：US5319444A
公开(公告)日：1994-06-07
申请号：US20464
申请日：1993-02-22
申请人： Kenji Saitoh , Masakazu Matsugu , Yukichi Niwa , Noriyuki Nose , Minoru Yoshii , Shigeyuki Suda
发明人： Kenji Saitoh , Masakazu Matsugu , Yukichi Niwa , Noriyuki Nose , Minoru Yoshii , Shigeyuki Suda
IPC分类号： G03F9/00 , G01B11/14 , G01N21/86
CPC分类号： G03F9/7049
摘要： A method of detecting relative positional deviation between first and second objects. The method includes the steps of providing the first object with a first mark which functions as a lens, providing the second object with a second mark which functions as a lens, providing an optical system between the first and second objects, directing a radiation beam through the first mark and the optical system to the second mark, and detecting any shift of the radiation beam from the second mark irradiated with the radiation beam from the optical system, to detect the relative positional deviation of the first and second objects.
摘要翻译：一种检测第一和第二物体之间的相对位置偏差的方法。该方法包括以下步骤：向第一物体提供用作透镜的第一标记，为第二物体提供用作透镜的第二标记，在第一和第二物体之间提供光学系统，引导辐射束通过第一标记和第二标记的光学系统，并且检测来自用来自光学系统的辐射束照射的第二标记的辐射束的任何偏移，以检测第一和第二物体的相对位置偏差。

15. 发明授权

US4842408A Phase shift measuring apparatus utilizing optical meterodyne techniques 失效
标题翻译：使用光学测距技术的相移测量装置
公开(公告)号：US4842408A
公开(公告)日：1989-06-27
申请号：US47258
申请日：1987-05-08
申请人： Minoru Yoshii , Noriyuki Nose , Yukichi Niwa , Yoshimichi Okada
发明人： Minoru Yoshii , Noriyuki Nose , Yukichi Niwa , Yoshimichi Okada
IPC分类号： G01J9/04 , G01N21/45
CPC分类号： G01J9/04 , G01N21/45
摘要： A phase shift measuring apparatus for detecting a phase shift of a light wave passing through an object to be measured, including:supplying device for supplying first and second light waves having different frequencies;optical device for directing the first light wave toward the object and combining the first light wave passing through the object and the second light wave to obtain a composite light wave;detecting device for receiving the composite light wave and detecting a measured beat signal; andmeasuring device for comprising the measured beat signal with a predetermined reference beat signal to measure a phase shift of the first light wave.A gradient index, a thickness distribution, and the like of an object can be obtained from the measured phase shift.
摘要翻译：一种用于检测通过被测量物体的光波的相移的相移测量装置，包括：用于提供具有不同频率的第一和第二光波的供应装置; 光学装置，用于将第一光波引导到物体并组合通过物体的第一光波和第二光波，以获得复合光波; 用于接收所述复合光波并检测测量的拍频信号的检测装置; 以及测量装置，用于包括具有预定参考节拍信号的所测量的节拍信号，以测量第一光波的相移。可以从所测量的相移中获得物体的梯度指数，厚度分布等。

16. 发明授权

US5610718A Apparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizes 失效
$Apparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizes$
标题翻译：用于检测彼此靠近布置的第一和第二衍射光栅之间的相对位移的装置和方法，其中所述光栅具有不同的间距尺寸
公开(公告)号：US5610718A
公开(公告)日：1997-03-11
申请号：US297511
申请日：1994-08-29
申请人： Koichi Sentoku , Takahiro Matsumoto , Noriyuki Nose , Minoru Yoshii , Kenji Saitoh
发明人： Koichi Sentoku , Takahiro Matsumoto , Noriyuki Nose , Minoru Yoshii , Kenji Saitoh
IPC分类号： G03F7/20 , G03F9/00 , G01B9/02
CPC分类号： G03F7/70633 , G03F9/7049
摘要： A method and device for measuring the relative displacement between first and second diffraction gratings includes an interference optical system forming first and second interference rays of light from light diffracted from the first and second diffraction gratings and separating the first and second interference rays of light on the basis of the difference in their direction of polarization, a first detector for detecting the first interference ray of light to generate a first detection signal, a second detector for detecting the second interference ray of light to generate a second detection signal, and signal processing section for detecting the phase difference between the first and second detection signals and for determining the relative displacement between the first and second diffraction gratings on the basis of the phase difference.
摘要翻译：用于测量第一和第二衍射光栅之间的相对位移的方法和装置包括干涉光学系统，其形成从第一和第二衍射光栅衍射的光的第一和第二干涉光线，并且将第一和第二干涉光线分离在其偏振方向的差异的基础，用于检测第一干涉光线以产生第一检测信号的第一检测器，用于检测第二干涉光线以产生第二检测信号的第二检测器，以及信号处理部分用于检测第一和第二检测信号之间的相位差，并且用于基于相位差确定第一和第二衍射光栅之间的相对位移。

17. 发明授权

US5369486A Position detector for detecting the position of an object using a diffraction grating positioned at an angle 失效
$Position detector for detecting the position of an object using a diffraction grating positioned at an angle$
标题翻译：位置检测器，用于使用位于一定角度的衍射光栅来检测物体的位置
公开(公告)号：US5369486A
公开(公告)日：1994-11-29
申请号：US947383
申请日：1992-09-21
申请人： Takahiro Matsumoto , Noriyuki Nose , Minoru Yoshii , Kenji Saitoh , Masanobu Hasegawa , Koichi Sentoku
发明人： Takahiro Matsumoto , Noriyuki Nose , Minoru Yoshii , Kenji Saitoh , Masanobu Hasegawa , Koichi Sentoku
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30 , G01B9/02
CPC分类号： G03F7/70633 , G03F9/7049
摘要： A position detector includes a diffraction grating provided on the surface of an object, an illumination system for illuminating the diffraction grating, a detection system for detecting diffracted light diffracted from the diffraction grating, and a processing system for detecting positional information relating to the object. The illumination system emits a first pair of beams which are diffracted by the diffraction grating and interfere with each other, and emits a second pair of beams which are diffracted by the diffraction grating and also interfere with each other. The first pair of beams are incident upon the diffraction grating along a plane extending in a first direction in which the diffraction grating extends. The second pair of beams are incident upon the diffraction grating along a plane extending in a second direction in which the diffraction grating extends. The first and second directions are different from a grating line direction. The detection system detects the interfering light and generates first and second beat signals therefrom. The processing system detects positional information with respect to the first direction from the phase state of the first beat signal and with respect to the second direction from the phase state of the second beat signal.
摘要翻译：位置检测器包括设置在物体表面上的衍射光栅，用于照射衍射光栅的照明系统，用于检测衍射光栅衍射的衍射光的检测系统，以及用于检测与物体有关的位置信息的处理系统。照明系统发射由衍射光栅衍射并彼此干涉的第一对光束，并且发射由衍射光栅衍射并且彼此干涉的第二对光束。第一对光束沿着沿衍射光栅延伸的第一方向延伸的平面入射在衍射光栅上。第二对光束沿着沿衍射光栅延伸的第二方向延伸的平面入射在衍射光栅上。第一和第二方向与光栅线方向不同。检测系统检测干扰光并从其产生第一和第二拍拍信号。处理系统从第一拍子信号的相位状态和相对于第二拍摄信号的相位状态相对于第二方向检测关于第一方向的位置信息。

18. 发明授权

US5000572A Distance measuring system 失效
标题翻译：距离测量系统
公开(公告)号：US5000572A
公开(公告)日：1991-03-19
申请号：US542656
申请日：1990-06-25
申请人： Noriyuki Nose , Minoru Yoshii , Yukichi Niwa , Ryo Kuroda
发明人： Noriyuki Nose , Minoru Yoshii , Yukichi Niwa , Ryo Kuroda
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A device for measuring a moving distance of two relatively moving objects includes a first diffraction grating provided on one of the two objects and disposed along the relatively moving direction of the two objects, and a measuring portion provided on the other object. The measuring portion includes a second diffraction grating, a light source and a photodetecting system, wherein the light source provides lights which are projected upon two points on the second diffraction grating so that they emanate from the two points in the form of diffraction lights having different diffraction orders. The diffraction lights are directed to the same point on the first diffraction grating and are diffracted again by the first diffraction grating so that they are emitted in the same direction, and the photodetecting system is operable to detect a change in the light intensity caused due to the interference of the two lights emanating from the first diffraction grating. The device further includes a detecting system for detecting the relative moving distance of the two objects on the basis of the detection by the photodetecting.
摘要翻译：用于测量两个相对移动物体的移动距离的装置包括设置在两个物体中的一个物体上并沿两个物体的相对移动方向设置的第一衍射光栅以及设置在另一物体上的测量部分。测量部分包括第二衍射光栅，光源和光电检测系统，其中光源提供投射在第二衍射光栅上的两个点上的光，使得它们以具有不同的衍射光的形式的两个点发射衍射指令。衍射光被引导到第一衍射光栅上的同一点，并被第一衍射光栅再次衍射，使得它们沿相同的方向发射，并且光电检测系统可操作以检测由于从第一衍射光栅发出的两个光的干涉。该装置还包括检测系统，用于根据受光检测的检测来检测两个物体的相对移动距离。

19. 发明授权

US5333050A Measuring method and apparatus for meausring the positional relationship of first and second gratings 失效
标题翻译：测量第一和第二光栅的位置关系的方法和装置
公开(公告)号：US5333050A
公开(公告)日：1994-07-26
申请号：US675277
申请日：1991-03-26
申请人： Noriyuki Nose , Kenji Saitoh , Koichi Sentoku , Minoru Yoshii
发明人： Noriyuki Nose , Kenji Saitoh , Koichi Sentoku , Minoru Yoshii
IPC分类号： G03F7/20 , G03F9/00 , G01B11/02
CPC分类号： G03F7/70633 , G03F9/7049
摘要： Disclosed is a method and apparatus for measuring a relative positional deviation between a first pattern and a second pattern, printed on an article such as a semiconductor wafer at different moments, the measurement being based on detection of interference of diffraction lights from at least one of the first and second printed patterns.
摘要翻译：公开了一种用于测量在不同时刻印刷在诸如半导体晶片的物品上的第一图案和第二图案之间的相对位置偏差的方法和装置，该测量是基于检测衍射光从至少一个第一和第二印刷图案。

20. 发明授权

US5327221A Device for detecting positional relationship between two objects 失效
标题翻译：用于检测两个物体之间的位置关系的装置
公开(公告)号：US5327221A
公开(公告)日：1994-07-05
申请号：US919380
申请日：1992-07-29
申请人： Kenji Saitoh , Masakazu Matsugu , Shigeyuki Suda , Yukichi Niwa , Ryo Kuroda , Noriyuki Nose , Minoru Yoshii , Naoto Abe , Mitsutoshi Ohwada
发明人： Kenji Saitoh , Masakazu Matsugu , Shigeyuki Suda , Yukichi Niwa , Ryo Kuroda , Noriyuki Nose , Minoru Yoshii , Naoto Abe , Mitsutoshi Ohwada
IPC分类号： G03F9/00 , G01B9/02
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for detecting the positional relationship between first and second objects in a predetermined direction includes a light source for emitting light in a direction to the first or second object, and a first detecting portion for detecting the position of incidence of a first light deflected by the first and second objects, wherein the position of incidence of the first light upon the first detecting portion is changeable with a change in the positional relationship between the first and second objects in the predetermined direction. A second detecting portion detects the position of incidence of a second light deflected by at least one of the first and second objects, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in the predetermined direction differs from that of the first light. On the basis of the detection by the first and second detecting portions, the positional relationship between the first and second objects is detected without being affected by an inclination thereof.
摘要翻译：一种用于检测在预定方向上的第一和第二物体之间的位置关系的装置包括：用于沿与第一或第二物体的方向发射光的光源;以及第一检测部分，用于检测第一和第二物体偏转的第一光的入射位置第一和第二物体，其中在第一检测部分上的第一光的入射位置随预定方向上第一和第二物体之间的位置关系的改变而改变。第二检测部分检测由第一和第二物体中的至少一个偏转的第二光的入射位置，其中由第一和第二物体之间的位置关系的变化引起的第二光的入射位置的状态在预定方向上的物体与第一光不同。基于第一和第二检测部分的检测，检测第一和第二物体之间的位置关系，而不受其倾斜的影响。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式