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11. 发明授权

US4600839A Small-dimension measurement system by scanning electron beam 失效
标题翻译：通过扫描电子束的小尺寸测量系统
公开(公告)号：US4600839A
公开(公告)日：1986-07-15
申请号：US576324
申请日：1984-02-02
申请人： Mikio Ichihashi , Satoru Fukuhara , Masahide Okumura , Hisaya Murakoshi
发明人： Mikio Ichihashi , Satoru Fukuhara , Masahide Okumura , Hisaya Murakoshi
IPC分类号： G01B15/00 , G01R31/305 , H01J37/28 , G01N23/00
CPC分类号： H01J37/28 , G01B15/00 , G01R31/305
摘要： A small-dimension measurement system by scanning electron beam comprises an electron optical column including an electron source for emitting an electron beam to scan a sample, at least one pair of detectors disposed symmetrically with respect to an optical axis of the electron optical column for detecting position information from the sample by scanning of the electron beam, and a signal selecting circuit for subjecting the outputs of the paired detectors to a predetermined signal selection. The signal selecting circuit selectively and alternately provides maximum or peak portions of the outputs of the paired detectors which portions correspond to opposite edge portions of the sample. The output of the signal selecting circuit is applied to a signal processing circuit for conversion into a dimension of a predetermined pattern on the sample.
摘要翻译：通过扫描电子束的小尺寸测量系统包括电子光学柱，其包括用于发射电子束以扫描样品的电子源，至少一对相对于电子光学柱的光轴对称设置的检测器，用于检测通过扫描电子束从样品的位置信息，以及信号选择电路，用于对成对的检测器的输出进行预定的信号选择。信号选择电路选择性地并且交替地提供成对检测器的输出的最大值或峰值部分，这些部分对应于样品的相对边缘部分。信号选择电路的输出被施加到信号处理电路，以转换成样本上的预定图案的尺寸。

12. 发明授权

US08604430B2 Method and an apparatus of an inspection system using an electron beam 有权
标题翻译：使用电子束的检查系统的方法和装置
公开(公告)号：US08604430B2
公开(公告)日：2013-12-10
申请号：US13366874
申请日：2012-02-06
申请人： Yuko Iwabuchi , Hideo Todokoro , Hiroyoshi Mori , Mitsugu Sato , Yasutsugu Usami , Mikio Ichihashi , Satoru Fukuhara , Hiroyuki Shinada , Yutaka Kaneko , Katsuya Sugiyama , Atsuko Takafuji , Hiroshi Toyama
发明人： Yuko Iwabuchi , Hideo Todokoro , Hiroyoshi Mori , Mitsugu Sato , Yasutsugu Usami , Mikio Ichihashi , Satoru Fukuhara , Hiroyuki Shinada , Yutaka Kaneko , Katsuya Sugiyama , Atsuko Takafuji , Hiroshi Toyama
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , G01N23/20 , G01N23/2251 , G03F7/7065 , G06T7/001 , G06T2207/10056 , G06T2207/30148 , H01J37/04 , H01J37/20 , H01J37/265 , H01J2237/04756 , H01J2237/20221 , H01J2237/2444 , H01J2237/24592 , H01J2237/2817 , H01J2237/31766
摘要： The inspection apparatus disclosed generates an electron beam, an acceleration electrode accelerates the electron beam, a convergence lens converges the electron beam, an electron beam deflector scans the beam over a sample, an objective lens converges the electron beam on the sample, a detector located between the sample and the objective lens detects charged particles emitted from the sample, a power supply applies a retarding voltage to the sample for decelerating the electron beam to the sample, an electrode is disposed between the objective lens and the sample, and a voltage is generated between the sample and the electrode by said electrode, the voltage being determined depending on the sample. The apparatus solves problems encountered in conventional inspection systems.
摘要翻译：所公开的检查装置产生电子束，加速电极加速电子束，会聚透镜会聚电子束，电子束偏转器扫描样品上的光束，物镜会将电子束会聚在样品上，检测器位于在样品和物镜之间检测从样品发射的带电粒子，电源向样品施加延迟电压以将电子束减速到样品，电极设置在物镜和样品之间，电压为通过所述电极在样品和电极之间产生，电压根据样品确定。该装置解决了常规检测系统遇到的问题。

13. 发明授权

US07012252B2 Method and an apparatus of an inspection system using an electron beam 失效
公开(公告)号：US07012252B2
公开(公告)日：2006-03-14
申请号：US11108877
申请日：2005-04-19
申请人： Yuko Iwabuchi , Hideo Todokoro , Hiroyoshi Mori , Mitsugu Sato , Yasutsugu Usami , Mikio Ichihashi , Satoru Fukuhara , Hiroyuki Shinada , Yutaka Kaneko , Katsuya Sugiyama , Atsuko Takafuji , Hiroshi Toyama
发明人： Yuko Iwabuchi , Hideo Todokoro , Hiroyoshi Mori , Mitsugu Sato , Yasutsugu Usami , Mikio Ichihashi , Satoru Fukuhara , Hiroyuki Shinada , Yutaka Kaneko , Katsuya Sugiyama , Atsuko Takafuji , Hiroshi Toyama
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , G01N23/20 , G01N23/2251 , G03F7/7065 , G06T7/001 , G06T2207/10056 , G06T2207/30148 , H01J37/04 , H01J37/20 , H01J37/265 , H01J2237/04756 , H01J2237/20221 , H01J2237/2444 , H01J2237/24592 , H01J2237/2817 , H01J2237/31766
摘要： Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer.The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.

14. 发明授权

US06822233B2 Method and apparatus for scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜的方法和装置
公开(公告)号：US06822233B2
公开(公告)日：2004-11-23
申请号：US10346138
申请日：2003-01-17
申请人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
发明人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
IPC分类号： H01J3704
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.
摘要翻译：扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

15. 发明授权

US6051834A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US6051834A
公开(公告)日：2000-04-18
申请号：US126432
申请日：1998-07-30
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.
摘要翻译：通过电子显微镜高速准确地进行薄膜样品中的原子排列和原子物质的三维观察，该电子显微镜测量从试样以高角度发射的电子。扫描透射电子显微镜具有电子检测装置，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 这些光子是电子 - 空穴对的1000倍。

16. 发明授权

US5229607A Combination apparatus having a scanning electron microscope therein 失效
标题翻译：其中具有扫描电子显微镜的组合装置
公开(公告)号：US5229607A
公开(公告)日：1993-07-20
申请号：US714018
申请日：1991-06-12
申请人： Hironobu Matsui , Mikio Ichihashi , Sumio Hosaka , Yoshinori Nakayama , Satoshi Haraichi , Fumikazu Itoh , Akira Shimase , Yoshimasa Kondo , Shigeyuki Hosoki , Masakazu Ichikawa , Yukio Honda , Tsuyoshi Hasegawa , Shiji Okazaki , Shunji Maeda , Hitoshi Kubota
发明人： Hironobu Matsui , Mikio Ichihashi , Sumio Hosaka , Yoshinori Nakayama , Satoshi Haraichi , Fumikazu Itoh , Akira Shimase , Yoshimasa Kondo , Shigeyuki Hosoki , Masakazu Ichikawa , Yukio Honda , Tsuyoshi Hasegawa , Shiji Okazaki , Shunji Maeda , Hitoshi Kubota
IPC分类号： G01Q10/04 , G01Q30/02 , G01Q30/12 , G01Q30/18 , G01Q60/00 , H01J37/252 , H01J37/28
CPC分类号： H01J37/28 , B82Y35/00 , G01Q30/02 , H01J37/252 , H01J37/3056
摘要： A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.
摘要翻译：具有扫描电子显微镜的组合装置包括用于对放置在样品室中的样品进行观察，测量和处理操作的任何设备。样品室包含聚焦电子束照射单元，与用于进行观察，测量和处理操作的部件分开。聚焦电子束照射单元以扫描方式将精细聚焦的电子束照射到用于电子显微镜观察的样品表面上。该设置允许观察，测量或处理设备与扫描电子显微镜组合，而不会明显地扩大组合装置的结构。

17. 发明授权

US5134289A Field emission electron device which produces a constant beam current 失效
标题翻译：产生恒流束电流的场发射电子器件
公开(公告)号：US5134289A
公开(公告)日：1992-07-28
申请号：US627976
申请日：1990-12-17
申请人： Hisaya Murakoshi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato
发明人： Hisaya Murakoshi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato
IPC分类号： H01J37/285 , H01J37/073 , H01J37/24
CPC分类号： H01J37/243 , H01J37/073
摘要： A field emission electron microscope in which a controller is provided to make an electron beam current fixed due to variations in an accelerating voltage or an extracting voltage to thereby make fixed the brightness of an electron beam with which a specimen is illuminated.

18. 发明授权

US4767926A Electron beam metrology system 失效
标题翻译：电子束计量系统
公开(公告)号：US4767926A
公开(公告)日：1988-08-30
申请号：US911791
申请日：1986-09-26
申请人： Hisaya Murakoshi , Mikio Ichihashi , Kenichi Yamamoto
发明人： Hisaya Murakoshi , Mikio Ichihashi , Kenichi Yamamoto
IPC分类号： G01B15/00 , H01J37/28 , H01J37/22
CPC分类号： H01J37/28 , G01B15/00
摘要： Disclosed is an electron beam metrology system for measuring the width of a pattern on a specimen by scanning the specimen with a deflected electron beam, detecting a pattern image signal provided by secondary electrons emitted from the specimen, and measuring the pattern width on the specimen on the basis of the pattern detection signal. The system comprises a signal detecting device including at least one set of two detectors disposed toward the scanning direction of the electron beam in a relation symmetrical with respect to the optical axis of the electron beam for detecting pattern image signals independently of each other, a device for recognizing surface topography of the pattern using an output signal of the signal detecting device, and a device for measuring the pattern width while discriminating as to whether the pattern is a raised-profile pattern or a hollow-profile pattern.
摘要翻译：公开了一种电子束测量系统，用于通过用偏转的电子束扫描样本来测量样本上的图案的宽度，检测由样本发射的二次电子提供的图案图像信号，并测量样本上的图案宽度模式检测信号的基础。该系统包括信号检测装置，该信号检测装置包括至少一组两个检测器，其以相对于电子束的光轴对称关系的电子束的扫描方向设置，用于彼此独立地检测图案图像信号;装置用于使用信号检测装置的输出信号来识别图案的表面形貌，以及用于测量图案宽度的装置，同时鉴别图案是凸起轮廓图案还是中空轮廓图案。

19. 发明授权

US4670652A Charged particle beam microprobe apparatus 失效
标题翻译：带电粒子束微探针装置
公开(公告)号：US4670652A
公开(公告)日：1987-06-02
申请号：US737478
申请日：1985-05-24
申请人： Mikio Ichihashi , Masahide Okumura , Satoru Fukuhara
发明人： Mikio Ichihashi , Masahide Okumura , Satoru Fukuhara
IPC分类号： H01J37/22 , G01B15/00 , G01B15/04 , G01B15/08 , G01N23/225 , H01J37/28
CPC分类号： H01J37/28
摘要： A charged particle beam microprobe apparatus capable of accurately determining the three-dimensional structure of a surface is disclosed in which a detection system including at least a pair of detectors disposed symmetrically with respect to the optical axis of an charged particle beam generating instrument is used for obtaining an image signal from a surface scanned with a charged particle beam, the image signal obtained by difference detection in the detection system is compared with a pair of variable reference levels opposite in polarity to each other, to be converted into positive and negative rectangular wave signals, and information on whether the scanned surface slopes upward or downward when viewed from the detection system and information on the gradient of the scanned surface are obtained from the polarity and pulse width of each of the positive and negative rectangular wave signals, respectively, to determine the three-dimensional structure of the scanned surface. That is, the charged particle beam apparatus does not utilize a phenomenon that the coefficient of backscattered electrons is proportional to the angle of slope of a primary beam impinging surface, and hence can use secondary electron suitable for forming a high resolution scanned image.
摘要翻译：公开了一种能够精确地确定表面的三维结构的带电粒子束微探针装置，其中使用包括至少一对相对于带电粒子束产生装置的光轴对称设置的检测器的检测系统从用带电粒子束扫描的表面获得图像信号，将通过检测系统中的差分检测获得的图像信号与彼此极性相反的一对可变参考电平进行比较，以被转换为正和负矩形波信号，以及关于从检测系统观察扫描表面是向上还是向下倾斜的信息以及关于扫描表面的梯度的信息的信息分别从正和负矩形波信号的极性和脉冲宽度获得到确定扫描表面的三维结构。也就是说，带电粒子束装置没有利用背散射电子的系数与主光束入射表面的倾斜角成比例的现象，因此可以使用适于形成高分辨率扫描图像的二次电子。

20. 发明申请

US20120132801A1 METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM 有权
标题翻译：使用电子束检测系统的方法和装置
公开(公告)号：US20120132801A1
公开(公告)日：2012-05-31
申请号：US13366874
申请日：2012-02-06
申请人： Yuko IWABUCHI , Hideo Todokoro , Hiroyoshi Mori , Mitsugu Sato , Yasutsugu Usami , Mikio Ichihashi , Satoru Fukuhara , Hiroyuki Shinada , Yutaka Kaneko , Katsuya Sugiyama , Atsuko Takafuji , Hiroshi Toyama
发明人： Yuko IWABUCHI , Hideo Todokoro , Hiroyoshi Mori , Mitsugu Sato , Yasutsugu Usami , Mikio Ichihashi , Satoru Fukuhara , Hiroyuki Shinada , Yutaka Kaneko , Katsuya Sugiyama , Atsuko Takafuji , Hiroshi Toyama
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , G01N23/20 , G01N23/2251 , G03F7/7065 , G06T7/001 , G06T2207/10056 , G06T2207/30148 , H01J37/04 , H01J37/20 , H01J37/265 , H01J2237/04756 , H01J2237/20221 , H01J2237/2444 , H01J2237/24592 , H01J2237/2817 , H01J2237/31766
摘要： Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer.The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.
摘要翻译：通过提供新颖的检查方法和采用这种新方法的检测装置，本发明通过使用电子束的本发明解决了常规检查方法中遇到的问题和采用该方法的传统装置，该方法能够提高扫描样本的速度作为半导体晶片。本发明提供的检验新颖方法包括以下步骤：产生电子束; 通过使用物镜将生成的电子束会聚在样品上; 使用会聚电子束扫描样品; 扫描期间连续移动样品; 检测在样本和物镜之间的位置处从样本发出的带电粒子，并将检测到的带电粒子转换成电信号; 存储由电信号传送的图像信息; 通过使用所存储的图像信息将图像与另一图像进行比较; 并检测样本的缺陷。

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