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11. 发明申请

US20110240602A1 HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM 审中-公开
标题翻译：高压气体离子束（GCIB）处理系统
公开(公告)号：US20110240602A1
公开(公告)日：2011-10-06
申请号：US12750052
申请日：2010-03-30
申请人： Robert K. Becker , Matthew C. Gwinn , Kenneth P. Regan
发明人： Robert K. Becker , Matthew C. Gwinn , Kenneth P. Regan
IPC分类号： C23F1/02 , C23C14/46
CPC分类号： H01J37/317 , H01J37/08 , H01J37/241 , H01J2237/038 , H01J2237/0812
摘要： The invention includes a high-voltage gas cluster ion beam (GCIB) processing system for treating a workpiece using a gas cluster ion beam. The high-voltage GCIB processing system includes a high-voltage (HV) source system that includes a high-voltage (HV) source chamber having a high-voltage (HV) nozzle subassembly, a nozzle element, and a high-voltage (HV) skimmer subassembly therein. The high-voltage gas cluster ion beam (GCIB) processing system includes a high-voltage (HV) power supply coupled to the HV nozzle subassembly and the HV skimmer subassembly. A high-voltage (HV) ionization chamber can be coupled to the HV source chamber and can include an ionizer coupled to the chamber wall by an isolation structure. In addition, a grounded GCIB processing chamber can be coupled to the HV ionization chamber by an isolation structure and can include a scanable workpiece holder.
摘要翻译：本发明包括使用气体团簇离子束处理工件的高压气体团簇离子束（GCIB）处理系统。高压GCIB处理系统包括高压（HV）源系统，其包括具有高压（HV）喷嘴子组件，喷嘴元件和高压（HV）的高压（HV）源室）撇渣器组件。高压气体簇离子束（GCIB）处理系统包括耦合到HV喷嘴子组件和HV分离器子组件的高压（HV）电源。高压（HV）电离室可以耦合到HV源室，并且可以包括通过隔离结构耦合到室壁的离子发生器。此外，接地的GCIB处理室可以通过隔离结构耦合到HV电离室，并且可以包括可扫描工件保持器。

12. 发明授权

US06486478B1 Gas cluster ion beam smoother apparatus 有权
标题翻译：气体束离子束平滑器
公开(公告)号：US06486478B1
公开(公告)日：2002-11-26
申请号：US09731688
申请日：2000-12-06
申请人： Bruce K. Libby , Isao Yamada , James A. Greer , Lester G. Crawford , James G. Bachand , Matthew C. Gwinn , Richard P. Torti
发明人： Bruce K. Libby , Isao Yamada , James A. Greer , Lester G. Crawford , James G. Bachand , Matthew C. Gwinn , Richard P. Torti
IPC分类号： A61N500
CPC分类号： H01J37/3053 , H01J2237/0812
摘要： An apparatus for smoothing a surface of a substrate includes an ionizer to form gas cluster particles; a power supply to accelerate the gas cluster particles; a triode/Einzel lens combination assembly to focus the accelerated gas cluster particles; a permanent magnet beam filter; scan plates to irradiate the filtered accelerated gas cluster particles onto a surface of a workpiece situated in a reduced pressure atmosphere chamber; and a substrate loading/unloading mechanism to load and unload the workpiece. The ionizer includes an alignment device wherein the alignment device includes a X/Y translation element and an angular translation element. The substrate loading/unloading mechanism provides a workpiece from a plurality of workpieces onto a holder positioned at a first position within the reduced pressure atmosphere chamber, the first position being substantially parallel to a central axis of a flow of the filtered accelerated gas cluster particles. The substrate loading/unloading mechanism also moves the holder with a workpiece thereon to a second position, the second position being substantially perpendicular to the first position and the central axis of a flow of the filtered accelerated gas cluster particles.
摘要翻译：用于平滑基板的表面的设备包括：离子发生器，用于形成气体团簇颗粒; 用于加速气体团簇颗粒的电源; 三极管/ Einzel透镜组合组件，用于聚焦加速气体团簇颗粒; 永久磁铁过滤器; 扫描板将过滤的加速气体团簇颗粒照射到位于减压气氛室中的工件的表面上; 以及用于加载和卸载工件的基板装载/卸载机构。电离器包括对准装置，其中对准装置包括X / Y平移元件和角度平移元件。衬底装载/卸载机构将工件从多个工件提供到位于减压气氛室内的第一位置的保持器上，第一位置基本上平行于过滤的加速气体团簇颗粒的流动的中心轴线。衬底装载/卸载机构还将其上的工件的保持器移动到第二位置，第二位置基本上垂直于过滤的加速气体团簇颗粒的流动的第一位置和中心轴线。

13. 发明授权

US07825389B2 Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture 有权
标题翻译：用于控制由气体混合物形成的气体团簇离子束的方法和装置
公开(公告)号：US07825389B2
公开(公告)日：2010-11-02
申请号：US11950128
申请日：2007-12-04
申请人： John J. Hautala , Matthew C. Gwinn , Jerald P. Dykstra
发明人： John J. Hautala , Matthew C. Gwinn , Jerald P. Dykstra
IPC分类号： G21G5/00
CPC分类号： H01J37/304 , H01J27/026 , H01J37/3053 , H01J2237/006 , H01J2237/0812 , H01J2237/24507 , H01J2237/30455 , H01L21/26566
摘要： Methods and apparatus for controlling a gas cluster ion beam formed from a plurality of process gases in a gas mixture. The methods and apparatus involve measuring gas analysis data relating to the composition of the gas mixture and modifying the irradiation of the workpiece in response to the detected parameter. The gas analysis data can be derived from samples of the composition of the gas mixture flowing from a gas source to the gas cluster ion beam apparatus or samples of the residual gases inside the vacuum vessel of the gas cluster ion beam apparatus.
摘要翻译：用于控制由气体混合物中的多种处理气体形成的气体簇离子束的方法和装置。所述方法和装置包括测量与气体混合物的组成相关的气体分析数据，并响应于检测到的参数来修改工件的照射。气体分析数据可以从气体源到气体簇离子束装置的气体混合物的组成的样本或气体团簇离子束装置的真空容器内的残留气体的样品的样品得到。

14. 发明授权

US07060988B2 Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system 有权
标题翻译：在大电流气体簇离子束处理系统中改善光束稳定性的方法和装置
公开(公告)号：US07060988B2
公开(公告)日：2006-06-13
申请号：US11082584
申请日：2005-03-17
申请人： Michael E. Mack , Robert K. Becker , Matthew C. Gwinn
发明人： Michael E. Mack , Robert K. Becker , Matthew C. Gwinn
IPC分类号： H01J27/00
CPC分类号： H01J27/026 , H01J27/02 , H01J37/08 , H01J37/3056 , H01J37/317 , H01J2237/0812 , H01J2237/188 , H01J2237/3151 , H01J2237/31701 , H01J2237/31732 , H01J2237/3174
摘要： Apparatus and methods for improving beam stability in high current gas-cluster ion beam systems by reducing the frequency of transients occurring in the vicinity of the ionizer through use of shielding conductors and distinct component electrical biasing to inhibit backward extraction of ions from the ionizer towards the gas-jet generator.
摘要翻译：通过使用屏蔽导体减少在离子发生器附近发生的瞬变的频率，以及不同的分量电偏压来抑制离子从离子发生器的向后提取向着向离子束的反向提取，从而改善高电流气体簇离子束系统中的束稳定性的装置和方法气喷发电机。

15. 发明授权

US5962858A Method of implanting low doses of ions into a substrate 失效
标题翻译：将低剂量离子注入底物的方法
公开(公告)号：US5962858A
公开(公告)日：1999-10-05
申请号：US891415
申请日：1997-07-10
申请人： Matthew C. Gwinn
发明人： Matthew C. Gwinn
IPC分类号： C23C14/48 , H01J37/317 , H01L21/265
CPC分类号： C23C14/48 , H01J37/3171 , H01J2237/08
摘要： The present invention provides for an ion implantation system that employs an ion source for ionizing and implanting into a substrate a noble diluent gas and a particular dopant gas. The noble diluent gas of the present invention preferably does not react with the dopant gas, or with dopant residue which coats the walls of the ionization chamber of the ion source, thus allowing the ion source to be used for accurate, stable low dose implants. Additionally, the noble diluent gas does not introduce conductivity altering ions, or impurities, into the substrate S. Consequently, the dosage of the dopant ions implanted into the substrate can be precisely controlled, especially in low dose applications.
摘要翻译：本发明提供了一种离子注入系统，其使用离子源将电离和注入衬底中的稀有稀释气体和特定掺杂气体。本发明的稀释稀释气体优选不与掺杂剂气体反应，或者与掺杂离子源的离子化室的壁的掺杂剂残留物反应，从而允许离子源用于精确，稳定的低剂量植入物。此外，惰性稀释气体不会将导电性改变离子或杂质引入衬底S.因此，可以精确地控制注入到衬底中的掺杂剂离子的剂量，特别是在低剂量应用中。

16. 发明授权

US08791430B2 Scanner for GCIB system 有权
标题翻译： GCIB系统扫描仪
公开(公告)号：US08791430B2
公开(公告)日：2014-07-29
申请号：US13411329
申请日：2012-03-02
申请人： Matthew C. Gwinn , Avrum Freytsis , Jay R. Wallace
发明人： Matthew C. Gwinn , Avrum Freytsis , Jay R. Wallace
IPC分类号： B01J19/12
CPC分类号： H01J37/20 , H01J37/317 , H01J2237/20228 , H01J2237/20235 , H01J2237/20278
摘要： Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus.
摘要翻译：公开了一种用于通过气体簇离子束（GCIB）或任何其它类型的离子束扫描衬底或其它工件的装置，系统和方法。工件扫描装置被配置为接收和保持用于GCIB照射的基板，并且通过两次运动通过GCIB在两个方向上进行扫描：往复式快速扫描运动和慢扫描运动。使用伺服电动机和皮带驱动系统来驱动缓慢扫描运动，所述皮带驱动系统被配置为降低工件扫描装置的故障率。

17. 发明授权

US07608843B2 Method and apparatus for scanning a workpiece through an ion beam 有权
标题翻译：用于通过离子束扫描工件的方法和装置
公开(公告)号：US07608843B2
公开(公告)日：2009-10-27
申请号：US11565267
申请日：2006-11-30
申请人： Avrum Freytsis , Matthew C. Gwinn , Eric R. Harrington
发明人： Avrum Freytsis , Matthew C. Gwinn , Eric R. Harrington
IPC分类号： H01J37/08
CPC分类号： H01L21/68764 , H01J2237/20228 , H01J2237/31701 , H01L21/67069
摘要： A method and apparatus 300 for better controlling scanning of a workpiece 330 through an ion beam path 306 provide for mounting a workpiece 330 on an elongated member, partially repetitively rotating the elongated member 500 around a point of rotation 368 to make repetitive scans of the workpiece 330 along and arcuate path 504 and bending the elongated member 500 at a joint 322 to move the one and out of the ion beam path 306 to facilitate attachment and removal of individual workpieces 330. A motor 315 used for the rotating may be suspended within a partial vacuum enclosure 304 against gravity for raising and lowering the elongated member and 500 a workpiece 306 for linear vertical scanning.
摘要翻译：用于更好地控制通过离子束路径306的工件330的扫描的方法和装置300提供将工件330安装在细长构件上，部分地重复地使细长构件500围绕旋转点368旋转以对工件进行重复扫描 330和弓形路径504，并且在接头322处将细长构件500弯曲以将离子束路径306中的一个移出并离开离子束路径306，以便于各个工件330的附接和移除。用于旋转的马达315可以悬挂在部分真空外壳304反对用于升高和降低细长构件的重力，以及500个用于线性垂直扫描的工件306。

18. 发明授权

US06737643B2 Detector and method for cluster ion beam diagnostics 有权
标题翻译：用于集群离子束诊断的检测器和方法
公开(公告)号：US06737643B2
公开(公告)日：2004-05-18
申请号：US09811904
申请日：2001-03-19
申请人： Richard P. Torti , Matthew C. Gwinn , Jerald P. Dykstra
发明人： Richard P. Torti , Matthew C. Gwinn , Jerald P. Dykstra
IPC分类号： H01J4926
CPC分类号： H01J49/10 , H01J27/026 , H01J49/0422 , H01J2237/0812 , H01J2237/24485
摘要： A detector apparatus and its use for cluster ion beam diagnostics are described. The detector has a Faraday cup with a conductance path to a gas pressure detector and a conductance to the detector exit. The detector acquires ion current, which is a measure of the ion beam flux, and also acquires mass flux, through a pressure measurement. The pressure measurement responds to the mass of dissociated gas clusters and is combined with information about instantaneous ion current to estimate mean gas cluster ion size ({overscore (N)}i).
摘要翻译：描述了一种检测器装置及其用于群集离子束诊断的用途。检测器具有法拉第杯，其具有通向气体压力检测器的电导路径和对检测器出口的电导。检测器获取离子电流，其是离子束通量的量度，并且还通过压力测量获得质量通量。压力测量响应于解离的气体团簇的质量，并结合关于瞬时离子电流的信息来估计平均气体团簇离子大小（{超核（Ni））。

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