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1. 发明授权

US06486478B1 Gas cluster ion beam smoother apparatus 有权
标题翻译：气体束离子束平滑器
公开(公告)号：US06486478B1
公开(公告)日：2002-11-26
申请号：US09731688
申请日：2000-12-06
申请人： Bruce K. Libby , Isao Yamada , James A. Greer , Lester G. Crawford , James G. Bachand , Matthew C. Gwinn , Richard P. Torti
发明人： Bruce K. Libby , Isao Yamada , James A. Greer , Lester G. Crawford , James G. Bachand , Matthew C. Gwinn , Richard P. Torti
IPC分类号： A61N500
CPC分类号： H01J37/3053 , H01J2237/0812
摘要： An apparatus for smoothing a surface of a substrate includes an ionizer to form gas cluster particles; a power supply to accelerate the gas cluster particles; a triode/Einzel lens combination assembly to focus the accelerated gas cluster particles; a permanent magnet beam filter; scan plates to irradiate the filtered accelerated gas cluster particles onto a surface of a workpiece situated in a reduced pressure atmosphere chamber; and a substrate loading/unloading mechanism to load and unload the workpiece. The ionizer includes an alignment device wherein the alignment device includes a X/Y translation element and an angular translation element. The substrate loading/unloading mechanism provides a workpiece from a plurality of workpieces onto a holder positioned at a first position within the reduced pressure atmosphere chamber, the first position being substantially parallel to a central axis of a flow of the filtered accelerated gas cluster particles. The substrate loading/unloading mechanism also moves the holder with a workpiece thereon to a second position, the second position being substantially perpendicular to the first position and the central axis of a flow of the filtered accelerated gas cluster particles.
摘要翻译：用于平滑基板的表面的设备包括：离子发生器，用于形成气体团簇颗粒; 用于加速气体团簇颗粒的电源; 三极管/ Einzel透镜组合组件，用于聚焦加速气体团簇颗粒; 永久磁铁过滤器; 扫描板将过滤的加速气体团簇颗粒照射到位于减压气氛室中的工件的表面上; 以及用于加载和卸载工件的基板装载/卸载机构。电离器包括对准装置，其中对准装置包括X / Y平移元件和角度平移元件。衬底装载/卸载机构将工件从多个工件提供到位于减压气氛室内的第一位置的保持器上，第一位置基本上平行于过滤的加速气体团簇颗粒的流动的中心轴线。衬底装载/卸载机构还将其上的工件的保持器移动到第二位置，第二位置基本上垂直于过滤的加速气体团簇颗粒的流动的第一位置和中心轴线。

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