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1. 发明申请

US20110240602A1 HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM 审中-公开
标题翻译：高压气体离子束（GCIB）处理系统
公开(公告)号：US20110240602A1
公开(公告)日：2011-10-06
申请号：US12750052
申请日：2010-03-30
申请人： Robert K. Becker , Matthew C. Gwinn , Kenneth P. Regan
发明人： Robert K. Becker , Matthew C. Gwinn , Kenneth P. Regan
IPC分类号： C23F1/02 , C23C14/46
CPC分类号： H01J37/317 , H01J37/08 , H01J37/241 , H01J2237/038 , H01J2237/0812
摘要： The invention includes a high-voltage gas cluster ion beam (GCIB) processing system for treating a workpiece using a gas cluster ion beam. The high-voltage GCIB processing system includes a high-voltage (HV) source system that includes a high-voltage (HV) source chamber having a high-voltage (HV) nozzle subassembly, a nozzle element, and a high-voltage (HV) skimmer subassembly therein. The high-voltage gas cluster ion beam (GCIB) processing system includes a high-voltage (HV) power supply coupled to the HV nozzle subassembly and the HV skimmer subassembly. A high-voltage (HV) ionization chamber can be coupled to the HV source chamber and can include an ionizer coupled to the chamber wall by an isolation structure. In addition, a grounded GCIB processing chamber can be coupled to the HV ionization chamber by an isolation structure and can include a scanable workpiece holder.
摘要翻译：本发明包括使用气体团簇离子束处理工件的高压气体团簇离子束（GCIB）处理系统。高压GCIB处理系统包括高压（HV）源系统，其包括具有高压（HV）喷嘴子组件，喷嘴元件和高压（HV）的高压（HV）源室）撇渣器组件。高压气体簇离子束（GCIB）处理系统包括耦合到HV喷嘴子组件和HV分离器子组件的高压（HV）电源。高压（HV）电离室可以耦合到HV源室，并且可以包括通过隔离结构耦合到室壁的离子发生器。此外，接地的GCIB处理室可以通过隔离结构耦合到HV电离室，并且可以包括可扫描工件保持器。

2. 发明申请

US20100182036A1 ELECTROSTATIC CHUCK POWER SUPPLY 有权
标题翻译：静电卡盘电源
公开(公告)号：US20100182036A1
公开(公告)日：2010-07-22
申请号：US12749999
申请日：2010-03-30
申请人： Kenneth P. Regan
发明人： Kenneth P. Regan
IPC分类号： G01R31/36 , G01R19/00
CPC分类号： H01L21/6831 , G01R31/2865 , H01L21/67265 , Y10T279/23 , Y10T279/27
摘要： A detection circuit is provided for a power supply for an electrostatic chuck generating a trapezoidal waveform with approximately flat tops and minimal dead-time between phase reversals. The detection circuit includes an amplifying circuit which receives inputs from a secondary winding of a transformer of the power supply and produces an amplified buffered signal. A chucking detect circuit receives the signal from the amplifying circuit and is configured to produce a first signal indicative of a substrate on the electrostatic chuck and a second signal indicative of an electrostatic chuck without a substrate. A chucking quality circuit receives the signal from the amplifying circuit and produces a signal indicative of a quality of the chucking of the substrate. A movement detection circuit receives the signal from the amplifying circuit and produces a signal indicative of movement of the substrate on the electrostatic chuck.
摘要翻译：为静电卡盘的电源提供检测电路，该静电卡盘产生具有大致平坦的顶部的梯形波形和相位反转之间的最小死区时间。检测电路包括放大电路，其接收来自电源的变压器的次级绕组的输入，并产生放大的缓冲信号。卡盘检测电路接收来自放大电路的信号，并且被配置为产生指示静电卡盘上的基板的第一信号和指示静电卡盘而没有基板的第二信号。夹持质量电路接收来自放大电路的信号，并产生指示衬底夹持质量的信号。移动检测电路接收来自放大电路的信号，产生指示基板在静电卡盘上的运动的信号。

3. 发明授权

US07948734B2 Electrostatic chuck power supply 有权
标题翻译：静电卡盘电源
公开(公告)号：US07948734B2
公开(公告)日：2011-05-24
申请号：US12208404
申请日：2008-09-11
申请人： Kenneth P. Regan
发明人： Kenneth P. Regan
IPC分类号： H01L21/683 , H01T23/00 , G03G15/02 , H05F3/00
CPC分类号： H01L21/6831 , Y10T279/23 , Y10T279/27
摘要： A power supply is provided for an electrostatic chuck. A signal generating circuit of the power supply is configured to generate a square wave signal. An amplifying circuit is electrically connected to the square wave circuit and configured to amplify the square wave signal. A transformer has a primary and a secondary winding. The primary winding is electrically connected to the amplifying circuit and the secondary winding is configured to be electrically connected to the electrostatic chuck. The secondary winding produces a signal for the electrostatic chuck. A voltage divider circuit is electrically connected to the secondary winding and to the amplifying circuit. The voltage divider circuit is configured to reduce the voltage of the signal for the electrostatic chuck and feed back the reduced voltage signal to the amplifying circuit. The signal from the secondary winding is a trapezoidal waveform with approximately flat tops and minimal dead-time between phase reversals.
摘要翻译：为静电卡盘提供电源。电源的信号发生电路被配置为产生方波信号。放大电路电连接到方波电路并且被配置为放大方波信号。变压器具有初级和次级绕组。初级绕组电连接到放大电路，次级绕组构造成电连接到静电卡盘。次级绕组产生静电卡盘的信号。分压器电路电连接到次级绕组和放大电路。分压器电路被配置为降低用于静电卡盘的信号的电压并将降低的电压信号反馈到放大电路。来自次级绕组的信号是具有大致平坦的顶部的梯形波形和相位反转之间的最小死区时间。

4. 发明授权

US07834327B2 Self-biasing active load circuit and related power supply for use in a charged particle beam processing system 有权
标题翻译：自偏置有源负载电路和相关电源，用于带电粒子束处理系统
公开(公告)号：US07834327B2
公开(公告)日：2010-11-16
申请号：US12235874
申请日：2008-09-23
申请人： Kenneth P. Regan
发明人： Kenneth P. Regan
IPC分类号： H01J37/30 , H01J27/00 , H01J7/30 , H02M3/156
CPC分类号： H01J27/022 , H01J2237/0812 , Y10T307/406
摘要： A load circuit device having a self-biasing active load circuit, and a related high voltage power supply configured to bias an optical element in a charged particle beam processing system, such as a gas cluster ion beam (GCIB) processing system. The high voltage power supply comprises a variable voltage supply having a load terminal at a load potential and a reference terminal at a reference potential, and a self-biasing active load circuit connected between the load terminal and the reference terminal, and configured to sustain a variable voltage drop between the load potential and the reference potential while maintaining a substantially constant current.
摘要翻译：一种具有自偏置有源负载电路的负载电路装置和被配置为偏置诸如气体簇离子束（GCIB）处理系统的带电粒子束处理系统中的光学元件的相关高压电源。高电压电源包括具有负载电位的负载端子和参考电位的参考端子的可变电压电源，以及连接在负载端子和参考端子之间的自偏置有源负载电路，并且被配置为维持在保持基本上恒定的电流的同时，负载电位和参考电位之间的可变电压降。

5. 发明申请

US20100061033A1 ELECTROSTATIC CHUCK POWER SUPPLY 有权
标题翻译：静电卡盘电源
公开(公告)号：US20100061033A1
公开(公告)日：2010-03-11
申请号：US12208404
申请日：2008-09-11
申请人： Kenneth P. Regan
发明人： Kenneth P. Regan
IPC分类号： H01L21/683
CPC分类号： H01L21/6831 , Y10T279/23 , Y10T279/27
摘要： A power supply is provided for an electrostatic chuck. A signal generating circuit of the power supply is configured to generate a square wave signal. An amplifying circuit is electrically connected to the square wave circuit and configured to amplify the square wave signal. A transformer has a primary and a secondary winding. The primary winding is electrically connected to the amplifying circuit and the secondary winding is configured to be electrically connected to the electrostatic chuck. The secondary winding produces a signal for the electrostatic chuck. A voltage divider circuit is electrically connected to the secondary winding and to the amplifying circuit. The voltage divider circuit is configured to reduce the voltage of the signal for the electrostatic chuck and feed back the reduced voltage signal to the amplifying circuit. The signal from the secondary winding is a trapezoidal waveform with approximately flat tops and minimal dead-time between phase reversals.
摘要翻译：为静电卡盘提供电源。电源的信号发生电路被配置为产生方波信号。放大电路电连接到方波电路并且被配置为放大方波信号。变压器具有初级和次级绕组。初级绕组电连接到放大电路，次级绕组构造成电连接到静电卡盘。次级绕组产生静电卡盘的信号。分压器电路电连接到次级绕组和放大电路。分压器电路被配置为降低用于静电卡盘的信号的电压并将降低的电压信号反馈到放大电路。来自次级绕组的信号是具有大致平坦的顶部的梯形波形和相位反转之间的最小死区时间。

6. 发明授权

US08169769B2 Electrostatic chuck power supply 有权
标题翻译：静电卡盘电源
公开(公告)号：US08169769B2
公开(公告)日：2012-05-01
申请号：US12749999
申请日：2010-03-30
申请人： Kenneth P. Regan
发明人： Kenneth P. Regan
IPC分类号： H01L21/683 , H01T23/00
CPC分类号： H01L21/6831 , G01R31/2865 , H01L21/67265 , Y10T279/23 , Y10T279/27
摘要： A detection circuit is provided for a power supply for an electrostatic chuck generating a trapezoidal waveform with approximately flat tops and minimal dead-time between phase reversals. The detection circuit includes an amplifying circuit which receives inputs from a secondary winding of a transformer of the power supply and produces an amplified buffered signal. A chucking detect circuit receives the signal from the amplifying circuit and is configured to produce a first signal indicative of a substrate on the electrostatic chuck and a second signal indicative of an electrostatic chuck without a substrate. A chucking quality circuit receives the signal from the amplifying circuit and produces a signal indicative of a quality of the chucking of the substrate. A movement detection circuit receives the signal from the amplifying circuit and produces a signal indicative of movement of the substrate on the electrostatic chuck.
摘要翻译：为静电卡盘的电源提供检测电路，该静电卡盘产生具有大致平坦的顶部的梯形波形和相位反转之间的最小死区时间。检测电路包括放大电路，其接收来自电源的变压器的次级绕组的输入，并产生放大的缓冲信号。卡盘检测电路接收来自放大电路的信号，并且被配置为产生指示静电卡盘上的基板的第一信号和指示静电卡盘而没有基板的第二信号。夹持质量电路接收来自放大电路的信号，并产生指示衬底夹持质量的信号。移动检测电路接收来自放大电路的信号，产生指示基板在静电卡盘上的运动的信号。

7. 发明申请

US20100072393A1 SELF-BIASING ACTIVE LOAD CIRCUIT AND RELATED POWER SUPPLY FOR USE IN A CHARGED PARTICLE BEAM PROCESSING SYSTEM 有权
标题翻译：自偏置有源负载电路和相关电源供充电颗粒光束处理系统
公开(公告)号：US20100072393A1
公开(公告)日：2010-03-25
申请号：US12235874
申请日：2008-09-23
申请人： Kenneth P. Regan
发明人： Kenneth P. Regan
IPC分类号： H01J27/00 , H02M3/156
CPC分类号： H01J27/022 , H01J2237/0812 , Y10T307/406
摘要： A load circuit device having a self-biasing active load circuit, and a related high voltage power supply configured to bias an optical element in a charged particle beam processing system, such as a gas cluster ion beam (GCIB) processing system. The high voltage power supply comprises a variable voltage supply having a load terminal at a load potential and a reference terminal at a reference potential, and a self-biasing active load circuit connected between the load terminal and the reference terminal, and configured to sustain a variable voltage drop between the load potential and the reference potential while maintaining a substantially constant current.
摘要翻译：一种具有自偏置有源负载电路的负载电路装置和被配置为偏置诸如气体簇离子束（GCIB）处理系统的带电粒子束处理系统中的光学元件的相关高压电源。高电压电源包括具有负载电位的负载端子和参考电位的参考端子的可变电压电源，以及连接在负载端子和参考端子之间的自偏置有源负载电路，并且被配置为维持在保持基本上恒定的电流的同时，负载电位和参考电位之间的可变电压降。

8. 发明授权

US07345856B2 Method and apparatus for arc suppression in scanned ion beam processing equipment 有权
标题翻译：扫描离子束处理设备中电弧抑制的方法和装置
公开(公告)号：US07345856B2
公开(公告)日：2008-03-18
申请号：US11259549
申请日：2005-10-25
申请人： Kenneth P. Regan
发明人： Kenneth P. Regan
IPC分类号： H02H3/00 , H02H7/00
CPC分类号： H01J37/3171 , H01J27/026 , H01J37/08 , H01J37/241 , H01J37/302 , H01J37/3056 , H01J2237/0206 , H01J2237/0812 , H02H7/003
摘要： In an ion bean acceleration system, transient electrical arc suppression and ion beam accelerator biasing circuitry. Two-terminal circuitry, connectable in series, for suppressing arcs by automatically sensing arc conditions and switch from at least a first operating state providing a relatively low resistance electrical pathway for current between source and load terminals to at least a second, relatively high resistance electrical pathway. Selection of circuit component characteristics permits controlling the delay in returning from the second state to the first state after the arc has been suppressed.
摘要翻译：在离子豆加速系统中，瞬态电弧抑制和离子束加速器偏置电路。两端子电路，可串联连接，用于通过自动感测电弧条件并从至少第一工作状态切换来抑制电弧，从而提供用于源极和负载端子之间的电流的相对较低电阻的电路，至少第二相对高电阻的电途径。选择电路元件特性允许控制在电弧被抑制之后从第二状态返回到第一状态的延迟。

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