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    • 17. 发明申请
    • Programmable anti-fuse structures, methods for fabricating programmable anti-fuse structures, and methods of programming anti-fuse structures
    • 可编程反熔丝结构,制造可编程反熔丝结构的方法以及编程反熔丝结构的方法
    • US20070205485A1
    • 2007-09-06
    • US11366879
    • 2006-03-02
    • Louis HsuJack MandelmanWilliam TontiChih-Chao Yang
    • Louis HsuJack MandelmanWilliam TontiChih-Chao Yang
    • H01L29/00
    • H01L27/1203H01L21/84H01L23/5252H01L27/101H01L2924/0002H01L2924/00
    • Programmable anti-fuse structures for semiconductor device constructions, fabrication methods for forming anti-fuse structures during semiconductor device fabrication, and programming methods for anti-fuse structures. The programmable anti-fuse structure comprises first and second terminals and an anti-fuse layer electrically coupled with the first and second terminals. An electrically-conductive diffusion layer is disposed between the first terminal and the anti-fuse layer. The diffusion layer inhibits diffusion of conductive material from the first terminal to the anti-fuse layer when the anti-fuse structure is unprogrammed, but permits diffusion of the conductive material when a programming voltage is applied between the first and second terminals during operation. Advantageously, the first terminal may be composed of metal and the anti-fuse layer may be composed of a semiconductor. The methods of fabricating the anti-fuse structure do not require an additional lithographic mask but instead rely on damascene process steps used to fabricate interconnection structures for neighboring active devices.
    • 用于半导体器件结构的可编程抗熔丝结构,在半导体器件制造期间形成抗熔丝结构的制造方法以及用于抗熔丝结构的编程方法。 可编程反熔丝结构包括第一和第二端子以及与第一和第二端子电耦合的抗熔丝层。 导电扩散层设置在第一端子和反熔丝层之间。 当反熔丝结构未编程时,扩散层抑制导电材料从第一端子到抗熔丝层的扩散,但是当在操作期间在第一和第二端子之间施加编程电压时允许导电材料的扩散。 有利地,第一端子可以由金属构成,并且抗熔丝层可以由半导体构成。 制造抗熔丝结构的方法不需要额外的光刻掩模,而是依赖用于制造相邻有源器件的互连结构的镶嵌工艺步骤。