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    • 3. 发明申请
    • Method for fabricating high performance metal-insulator-metal capacitor (MIMCAP)
    • 制造高性能金属绝缘体金属电容器(MIMCAP)的方法
    • US20070173029A1
    • 2007-07-26
    • US11340340
    • 2006-01-26
    • Wagdi AbadeerJack MandelmanCarl RadensWilliam Tonti
    • Wagdi AbadeerJack MandelmanCarl RadensWilliam Tonti
    • H01L21/20
    • H01L28/60
    • A method of fabricating a high performance metal-insulator-metal capacitor (MIMCAP) includes providing a first inter-level dielectric (ILD) layer over an isolation region; forming a MIMCAP pattern in the first ILD layer over the isolation region; depositing a conformal conductive liner over the MIMCAP pattern and the first ILD layer; depositing an insulator over the conformal conductive liner; forming a contact pattern through the conformal conductive liner, the insulator and the first inter-level dielectric (ILD) layer; depositing a second conformal conductive liner over the MIMCAP pattern, the contact pattern and the first ILD layer; and depositing a conductive stud over the second conformal conductive liner in the MIMCAP pattern and the contact pattern. The method is applicable to both a conventional bulk semiconductor substrate and a silicon-on-insulator (SOI) substrate.
    • 一种制造高性能金属 - 绝缘体 - 金属电容器(MIMCAP)的方法包括在隔离区域上提供第一级间电介质层(ILD)层; 在隔离区域上的第一ILD层中形成MIMCAP图案; 在MIMCAP图案和第一ILD层上沉积共形导电衬垫; 在保形导电衬垫上沉积绝缘体; 通过所述共形导电衬垫,所述绝缘体和所述第一层间电介质层(ILD)层形成接触图案; 在MIMCAP图案,接触图案和第一ILD层上沉积第二共形导电衬垫; 以及在MIMCAP图案和接触图案中的第二共形导电衬垫上沉积导电柱。 该方法适用于常规体半导体衬底和绝缘体上硅(SOI)衬底。
    • 5. 发明申请
    • Electrically Programmable pi-Shaped Fuse Structures and Design Process Therefore
    • 电可编程的pi形保险丝结构和设计过程
    • US20080052659A1
    • 2008-02-28
    • US11923833
    • 2007-10-25
    • Roger BoothKangguo ChengJack MandelmanWilliam Tonti
    • Roger BoothKangguo ChengJack MandelmanWilliam Tonti
    • G06F17/50
    • H01L23/5256H01L2924/0002H01L2924/00
    • Electrically programmable fuses for an integrated circuit and design structures thereof are presented, wherein the electrically programmable fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The first terminal portion and the second terminal portion reside over a first support and a second support, respectively, with the first support and the second support being spaced apart, and the fuse element bridging the distance between the first terminal portion over the first support and the second terminal portion over the second support. The fuse, first support and second support define a π-shaped structure in elevational cross-section through the fuse element. The first terminal portion, second terminal portion and fuse element are coplanar, with the fuse element residing above a void. The design structure for the fuse is embodied in a machine-readable medium for designing, manufacturing or testing a design of the fuse.
    • 提出了用于集成电路的电可编程保险丝及其设计结构,其中电可编程熔丝具有由熔丝元件互连的第一端子部分和第二端子部分。 第一端子部分和第二端子部分分别驻留在第一支撑件和第二支撑件上,第一支撑件和第二支撑件间隔开,并且熔丝元件将第一端子部分之间的距离跨越第一支撑件和 在第二支撑件上方的第二端子部分。 保险丝,第一支撑件和第二支撑件通过保险丝元件在垂直截面中限定了一个pi形结构。 第一端子部分,第二端子部分和熔丝元件是共面的,其中熔丝元件位于空隙之上。 保险丝的设计结构体现在用于设计,制造或测试保险丝设计的机器可读介质中。
    • 7. 发明申请
    • Electronic fuse with conformal fuse element formed over a freestanding dielectric spacer
    • 具有保形熔丝元件的电子保险丝,形成在独立电介质垫片上
    • US20070210890A1
    • 2007-09-13
    • US11372387
    • 2006-03-09
    • Louis HsuJack MandelmanWilliam TontiChih-Chao Yang
    • Louis HsuJack MandelmanWilliam TontiChih-Chao Yang
    • H01H85/04
    • H01L23/5256H01L2924/0002Y10T29/49107H01L2924/00
    • An electronic fuse for an integrated circuit and a method of fabrication thereof are presented. The electronic fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The fuse element has a convex upper surface and a lower surface with a radius of curvature at a smallest surface area of curvature less than or equal to 100 nanometers. Fabricating the electronic fuse includes forming an at least partially freestanding dielectric spacer above a supporting structure, and then conformably forming the fuse element of the fuse over at least a portion of the freestanding dielectric spacer, with the fuse element characterized as noted above. The dielectric spacer may remain in place as a thermally insulating layer underneath the fuse element, or may be removed to form a void underneath the fuse element.
    • 本发明提供一种用于集成电路的电子熔断器及其制造方法。 电子熔断器具有由熔丝元件互连的第一端子部分和第二端子部分。 保险丝元件具有凸起的上表面和具有小于或等于100纳米的曲率的最小表面积的曲率半径的下表面。 制造电子熔断器包括在支撑结构之上形成至少部分独立的介电隔离物,然后在独立电介质隔离物的至少一部分上顺应地形成熔丝的熔丝元件,其中熔丝元件的特征如上所述。 电介质间隔物可以保留在熔丝元件下面的绝热层的适当位置,或者可以被去除以在熔丝元件下面形成空隙。