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    • 12. 发明授权
    • Guide arrangement with at least on guide roller for the guidance of webs in webs treatment installations
    • 引导装置至少在导向辊上用于引导幅材处理装置中的幅材
    • US07882946B2
    • 2011-02-08
    • US11081879
    • 2005-03-17
    • Stefan HeinPeter SkukKarl-Heinz WenkReiner KuklaRainer Ludwig
    • Stefan HeinPeter SkukKarl-Heinz WenkReiner KuklaRainer Ludwig
    • B65H23/00
    • C23C14/568B65H23/038B65H2404/5521
    • A guide arrangement (1) for guiding webs in evacuatable web treatment installations comprises at least one guide roller (2) with an axis (5), whose spatial position is settable. To solve the problem of compensating in modular installations with several chambers either misalignments of the chambers relative to one another and/or to avoid completely adjustable roller frames, whose adjustment would require the repositioning of treatment and coating sources and of separating gaps on the circumference of coating rollers, the invention proposes that the guide roller (2) is supported between two pivot bearings (11, 12), of which at least one is adjustable relative to the other transversely to the axis (5). This is preferably carried out thereby that the adjustable pivot bearing (12) comprises a slide guide (15), fastened to a chamber wall (14), on which a slide (16) with the pivot bearing (12) is guided, and that the adjustable pivot bearing (12) comprises a remotely operated adjustment drive (21).
    • 用于在可抽空的纸幅处理装置中引导幅材的引导装置(1)包括至少一个具有轴(5)的引导辊(2),其空间位置是可设定的。 为了解决在具有多个室的模块化安装中补偿的问题,腔室相对于彼此的不对准和/或避免完全可调节的辊框架,其调整将需要重新定位处理和涂覆源以及在圆周上分离间隙 本发明提出,引导辊(2)支撑在两个枢转轴承(11,12)之间,其中至少一个可相对于另一个横向于轴线(5)可调节。 这优选地由此可调节的枢转轴承(12)包括紧固到室壁(14)的滑动引导件(15),其上带有枢转轴承(12)的滑动件(16)被引导到其上,并且 所述可调枢转轴承(12)包括远程操作的调节驱动器(21)。
    • 13. 发明授权
    • Process for coating a dielectric substrate with copper
    • 用铜包覆电介质基板的工艺
    • US5108571A
    • 1992-04-28
    • US770772
    • 1991-10-04
    • Rainer LudwigRolf AdamAnton DietrichReiner Kukla
    • Rainer LudwigRolf AdamAnton DietrichReiner Kukla
    • C23C14/14C23C14/02C23C14/08C23C14/18C23C14/34C23C14/35H05K3/16H05K3/38
    • H05K3/16C23C14/024C23C14/087C23C14/18C23C14/35H05K3/38
    • In a process for coating substrates 1, 35, for example aluminum ceramic plates 1 or polyimide films 35 with copper by means of a device including a direct current source 10 which is connected to a sputtering cathode 5, 30, 31 disposed in a process chamber 15, 15a, 32 which can be evacuated and this cathode electrically interacts with a copper target 3, 33, 34 which can be sputtered and the sputtered particles are deposited on the substrate 1, 35 whereby the argon gas can be introduced into the process chamber 15, 15a, 32 which can be evacuated, an oxygen inlet 20, 39 is provided in addition to the argon inlet 21, 40, whereby the supply of oxygen can be controlled via a valve 19, 43 inserted in the feed line 23, 39 and the amount of oxygen can be metered such that during a first process phase a copper oxide layer which functions as a bonding agent forms on the substrate 1, 35 and after adjusting the argon atmosphere in the process chamber 15, 15a, 32 pure copper is deposited as an electrically conductive layer.
    • 在通过包括连接到设置在处理室中的溅射阴极5,30,31的直流电源10的装置来涂覆基板1,35,例如铝陶瓷板1或具有铜的聚酰亚胺膜35的工艺中 15,15a,32,其可以被抽真空,并且该阴极与可以溅射的铜靶3,33,34电相互作用,并且溅射的颗粒沉积在衬底1,35上,由此氩气可以被引入到处理室 除了氩入口21,40之外,还可以提供可以抽真空的氧气入口20,39,从而可以通过插入进料管线23,39中的阀19,43来控制供氧。 并且可以计量氧气的量,使得在第一处理阶段期间,在基板1,35上形成用作粘合剂的氧化铜层,并且在调节处理室15,15a,32纯铜中的氩气氛之后, 作为选民保存 导电层。
    • 15. 发明申请
    • Guide arrangement with at least on guide roller for the guidance of webs in webs treatment installations
    • 引导装置至少在导向辊上用于引导幅材处理装置中的幅材
    • US20050224551A1
    • 2005-10-13
    • US11081879
    • 2005-03-17
    • Stefan HeinPeter SkukKarl-Heinz WenkReiner KulkaRainer Ludwig
    • Stefan HeinPeter SkukKarl-Heinz WenkReiner KulkaRainer Ludwig
    • B65H23/26B65H23/00B65H23/038B65H27/00C23C14/56F16C13/02H01B13/22
    • C23C14/568B65H23/038B65H2404/5521
    • A guide arrangement (1) for guiding webs in evacuatable web treatment installations comprises at least one guide roller (2) with an axis (5), whose spatial position is settable. To solve the problem of compensating in modular installations with several chambers either misalignments of the chambers relative to one another and/or to avoid completely adjustable roller frames, whose adjustment would require the repositioning of treatment and coating sources and of separating gaps on the circumference of coating rollers, the invention proposes that the guide roller (2) is supported between two pivot bearings (11, 12), of which at least one is adjustable relative to the other transversely to the axis (5). This is preferably carried out thereby that the adjustable pivot bearing (12) comprises a slide guide (15), fastened to a chamber wall (14), on which a slide (16) with the pivot bearing (12) is guided, and that the adjustable pivot bearing (12) comprises a remotely operated adjustment drive (21).
    • 用于在可抽空的纸幅处理装置中引导幅材的引导装置(1)包括至少一个具有轴(5)的引导辊(2),其空间位置是可设定的。 为了解决在具有多个室的模块化安装中补偿的问题,腔室相对于彼此的不对准和/或避免完全可调节的滚子框架,其调整将需要重新定位处理和涂覆源以及在圆周上分离间隙 本发明提出,引导辊(2)支撑在两个枢转轴承(11,12)之间,其中至少一个可相对于另一个横向于轴线(5)可调节。 这优选地由此可调节的枢转轴承(12)包括紧固到室壁(14)的滑动引导件(15),其上带有枢转轴承(12)的滑动件(16)被引导到其上,并且 所述可调枢转轴承(12)包括远程操作的调节驱动器(21)。
    • 16. 发明授权
    • Monitoring device
    • 监控设备
    • US06782769B2
    • 2004-08-31
    • US09758515
    • 2001-01-11
    • Rainer Ludwig
    • Rainer Ludwig
    • G01N1900
    • B25J9/1674G05B19/4061G05B2219/37002G05B2219/37004
    • In order to improve a monitoring device for checking for a predefined position of a body or for checking for the presence of a body, comprising a pivotal checking element, a motor for driving the checking element and a control device for controlling the pivotal movement of the checking element, in such a manner that it is universally employable and, in particular, the exertion of too high a force on a body is prevented, it is proposed that the checking element be adapted to be pivoted commencing from a starting position through a transition region into a monitoring region in which the predefined position of the body lies or in which the presence of a body should be monitored, and that the control device limit the torque of the checking element in such a manner that the maximum possible torque in the monitoring region is reduced relative to that in the transition region.
    • 为了改进用于检查身体的预定位置或用于检查身体的存在的监视装置,包括枢转检查元件,用于驱动检查元件的电动机和用于控制主体的枢转运动的控制装置 检查元件以其普遍可使用的方式被防止,特别是防止在身体上施加过高的力,因此建议检查元件适于从起始位置开始转换 区域进入监视区域,其中身体的预定位置位于或应该监测身体的存在,并且控制装置以这样的方式限制检查元件的扭矩,使得监视中的最大可能转矩 区域相对于过渡区域的面积减小。