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11. 发明授权

US06710311B2 Process for manufacturing integrated chemical microreactors of semiconductor material 有权
公开(公告)号：US06710311B2
公开(公告)日：2004-03-23
申请号：US09874382
申请日：2001-06-04
申请人： Flavio Villa , Ubaldo Mastromatteo , Gabriele Barlocchi , Mauro Cattaneo
发明人： Flavio Villa , Ubaldo Mastromatteo , Gabriele Barlocchi , Mauro Cattaneo
IPC分类号： C12M134
CPC分类号： B81C1/00119 , B01J19/0093 , B01L3/5027 , B01L3/502707 , B01L7/52 , B01L7/525 , B01L2200/12 , B01L2300/0645 , B01L2300/1827 , B01L2300/185 , B01L2300/1883 , B81B2201/0214 , B81B2201/051 , B81B2203/0315 , B81B2203/0338 , B81C2201/053
摘要： The microreactor is completely integrated and is formed by a semiconductor body having a surface and housing at least one buried channel accessible from the surface of the semiconductor body through two trenches. A heating element extends above the surface over the channel and a resist region extends above the heating element and defines an inlet reservoir and an outlet reservoir. The reservoirs are connected to the trenches and have, in cross-section, a larger area than the trenches. The outlet reservoir has a larger area than the inlet reservoir. A sensing electrode extends above the surface and inside the outlet reservoir.

12. 发明授权

US06350657B1 Inexpensive method of manufacturing an SOI wafer 有权
标题翻译：制造SOI晶片的廉价方法
公开(公告)号：US06350657B1
公开(公告)日：2002-02-26
申请号：US09359870
申请日：1999-07-26
申请人： Ubaldo Mastromatteo , Flavio Villa , Gabriele Barlocchi
发明人： Ubaldo Mastromatteo , Flavio Villa , Gabriele Barlocchi
IPC分类号： H01L21311
CPC分类号： H01L21/3065 , H01L21/7624 , H01L21/76262
摘要： A method of manufacturing an SOI (silicon on insulator) wafer includes the step of selective anisotropic etching to form, in the substrate, trenches which extend to a predetermined depth from a major surface of the substrate and between which pillar portions of the substrate are defined. The method further includes the step of selective isotropic etching to enlarge the trenches, starting at a predetermined distance from the major surface, thus reducing the thicknesses of the pillar portions of the substrate between adjacent trenches. Also, the method includes the steps of selective oxidation to convert the pillar portions of reduced thickness of the substrate into silicon dioxide and to fill the trenches with silicon dioxide, starting substantially from the predetermined distance, and epitaxial growth of a silicon layer on the major surface of the substrate. The method permits more freedom in the selection of the dimensional ratios between the trenches and the pillars and thus enables the necessary crystallographic quality of the epitaxial layer to be achieved, ensuring a continuous buried oxide layer.
摘要翻译：制造SOI（绝缘体上硅）晶片的方法包括选择性各向异性蚀刻的步骤，以在衬底中形成从衬底的主表面延伸到预定深度并且在衬底的哪个柱部分被限定的沟槽之间。该方法还包括选择性各向同性蚀刻步骤，以从主表面预定距离开始扩大沟槽，从而减小相邻沟槽之间的衬底的柱部分的厚度。此外，该方法包括以下步骤：选择性氧化以将衬底的厚度的柱部分转换为二氧化硅，并且以基本上从预定距离开始的二氧化硅填充沟槽，以及主层上的硅层的外延生长基板的表面。该方法允许在选择沟槽和柱之间的尺寸比例时更多的自由度，并且因此能够实现外延层的必要的晶体学质量，确保连续的掩埋氧化物层。

13. 发明授权

US5855693A Wafer of semiconductor material for fabricating integrated devices, and process for its fabrication 失效
标题翻译：用于制造集成器件的半导体材料的晶片及其制造工艺
公开(公告)号：US5855693A
公开(公告)日：1999-01-05
申请号：US571806
申请日：1995-12-13
申请人： Bruno Murari , Flavio Villa , Ubaldo Mastromatteo
发明人： Bruno Murari , Flavio Villa , Ubaldo Mastromatteo
IPC分类号： H01L21/02 , H01L21/20 , H01L27/00 , H01L27/12 , H01L21/265
CPC分类号： H01L21/2007 , H01L2924/01006 , H01L2924/01019 , H01L2924/01074 , H01L2924/14
摘要： A wafer of semiconductor material for fabricating integrated devices, including a stack of superimposed layers including first and second monocrystalline silicon layers separated by an intermediate insulating layer made of a material selected from the group comprising silicon carbide, silicon nitride and ceramic materials. An oxide bond layer is provided between the intermediate layer and the second silicon layer. The wafer is fabricated by forming the intermediate insulating layer on the first silicon layer in a heated vacuum chamber; depositing the oxide layer; and superimposing the second silicon layer. When the stack of silicon, insulating material, oxide and silicon layers is heat treated, the oxide reacts so as to bond the insulating layer to the second silicon layer. As a ceramic material beryllium oxide, aluminium nitride, boron nitride and alumina may be used.
摘要翻译：一种用于制造集成器件的半导体材料晶片，包括由包括由碳化硅，氮化硅和陶瓷材料组成的材料制成的中间绝缘层分隔的第一和第二单晶硅层的叠加层。在中间层和第二硅层之间设置氧化物接合层。通过在加热的真空室中在第一硅层上形成中间绝缘层来制造晶片; 沉积氧化层; 并叠加第二硅层。当硅，绝缘材料，氧化物和硅层的堆叠被热处理时，氧化物反应以将绝缘层粘合到第二硅层。作为陶瓷材料氧化铍，可以使用氮化铝，氮化硼和氧化铝。

14. 发明授权

US08586351B2 Electronic detection of biological materials 有权
标题翻译：电子检测生物材料
公开(公告)号：US08586351B2
公开(公告)日：2013-11-19
申请号：US12649019
申请日：2009-12-29
申请人： Flavio Francesco Villa , Ubaldo Mastromatteo , Gabriele Barlocchi
发明人： Flavio Francesco Villa , Ubaldo Mastromatteo , Gabriele Barlocchi
IPC分类号： C12M1/34
CPC分类号： G01N29/022 , C12Q1/6825 , G01N2291/02466 , G01N2291/0426 , C12Q2565/629 , C12Q2563/131
摘要： A hybridization detecting device, wherein a probe cell has a body of semiconductor material forming a diaphragm, a first electrode on the diaphragm, a piezoelectric region on the first electrode, a second electrode on the piezoelectric region and a detection layer on the second electrode. The body accommodates a buried cavity downwardly delimiting the diaphragm.
摘要翻译：一种杂交检测装置，其中探针单元具有形成隔膜的半导体材料体，隔膜上的第一电极，第一电极上的压电区域，压电区域上的第二电极和第二电极上的检测层。主体容纳向下限定隔膜的掩埋腔。

15. 发明申请

US20110318840A1 FLUIDIC CARTRIDGE FOR DETECTING CHEMICALS IN SAMPLES, IN PARTICULAR FOR PERFORMING BIOCHEMICAL ANALYSES 有权
标题翻译：用于检测样品中化学品的流体盒，特别是用于生物化学分析
公开(公告)号：US20110318840A1
公开(公告)日：2011-12-29
申请号：US13170058
申请日：2011-06-27
申请人： Federico Giovanni Ziglioli , Amedeo Maierna , Ubaldo Mastromatteo , Gabriele Barlocchi , Flavio Francesco Villa
发明人： Federico Giovanni Ziglioli , Amedeo Maierna , Ubaldo Mastromatteo , Gabriele Barlocchi , Flavio Francesco Villa
IPC分类号： G01N30/00
CPC分类号： B01L3/502715 , B01L2200/027 , B01L2300/044 , B01L2300/0636 , B01L2300/0645 , B01L2300/0672 , B01L2300/0816 , B01L2300/0867 , B01L2300/1827 , B01L2400/0439 , Y10T436/11
摘要： A fluidic cartridge for detecting chemicals, formed by a casing, hermetically housing an integrated device having a plurality of detecting regions to bind with target chemicals; part of a supporting element, bearing the integrated device; a reaction chamber, facing the detecting regions; a sample feeding hole and a washing feeding hole, self-sealingly closed; fluidic paths, which connect the sample feeding and washing feeding holes to the reaction chamber; and a waste reservoir, which may be fluidically connected to the reaction chamber by valve elements that may be controlled from outside. The integrated device is moreover connected to an interface unit carried by the supporting element, electrically connected to the integrated device and including at least one signal processing stage and external contact regions.
摘要翻译：一种用于检测由壳体形成的化学品的流体盒，其气密地容纳具有多个检测区域以与目标化学品结合的集成装置; 支撑元件的一部分，承载集成装置; 反应室，面对检测区域; 样品供给孔和洗涤进料孔，自密封; 流体路径，其将样品进料和洗涤进料孔连接到反应室; 以及可以通过可从外部控制的阀元件流体地连接到反应室的废物储存器。此外，集成装置还连接到由支撑元件承载的接口单元，电连接到集成装置并且包括至少一个信号处理级和外部接触区域。

16. 发明授权

US07888589B2 Photovoltaic device with concentration and spectral splitting of collected light beam 有权
标题翻译：具有聚光光束的光谱分离的光伏器件
公开(公告)号：US07888589B2
公开(公告)日：2011-02-15
申请号：US12494838
申请日：2009-06-30
申请人： Ubaldo Mastromatteo
发明人： Ubaldo Mastromatteo
IPC分类号： H01L31/042
CPC分类号： H01L31/0232 , H01L31/0547 , Y02E10/52
摘要： A photovoltaic device may include a housing having a transparent pupil receiving a collimated beam of radiation, and photovoltaic cell arrays being positioned on respective inner surfaces of the housing, each photovoltaic cell array sensing a respective spectral range of the radiation different from the other photovoltaic cell arrays. The photovoltaic device may further include dichroic filters being positioned along an optical axis of the transparent pupil and splitting the collimated beam into a corresponding divided beams of different spectrums, and mirrors corresponding to the divided beams. Each mirror may have reflecting surfaces, receive a respective divided beam, subdivide the received divided beam into reflected beams from the reflecting surfaces, and illuminate an active area of a photovoltaic cell of the respective array.
摘要翻译：光伏器件可以包括具有接收准直的辐射束的透明光瞳的壳体，以及位于壳体的相应内表面上的光伏电池阵列，每个光伏电池阵列感测到与其他光伏电池不同的辐射的相应光谱范围阵列光电器件还可以包括沿着透明光瞳的光轴定位的分色滤光器，并将准直光束分成对应于不同光谱的对应分割光束，以及对应于分割光束的反射镜。每个反射镜可以具有反射表面，接收相应的分割光束，将接收到的划分光束细分成来自反射表面的反射光束，并照亮相应阵列的光伏电池的有效区域。

17. 发明申请

US20100170324A1 INTEGRATED ELECTRONIC MICROBALANCE PLUS CHEMICAL SENSOR 有权
标题翻译：集成电子微型化学传感器
公开(公告)号：US20100170324A1
公开(公告)日：2010-07-08
申请号：US12648996
申请日：2009-12-29
申请人： Ubaldo Mastromatteo , Flavio Francesco Villa , Gabriele Barlocchi
发明人： Ubaldo Mastromatteo , Flavio Francesco Villa , Gabriele Barlocchi
IPC分类号： G01N29/02 , H04R17/00
CPC分类号： G01G3/13 , G01G3/16 , G01N29/036 , G01N2291/0256 , Y10T29/42
摘要： An electronic microbalance made in a semiconductor body accommodating an oscillating circuit adjacent to a diaphragm. A stack formed by a first electrode, a second electrode, and a piezoelectric region arranged between the first and the second electrode extends above the diaphragm. Any substance that deposits on the stack causes a change in the mass of the microbalance and thus in the resonance frequency of a resonator formed by the microbalance and by the oscillating circuit and can thus be detected electronically. A chemical sensor is obtained by forming a sensitive layer of a material suitable for binding to target chemicals on the stack. The sensitivity of the microbalance can be increased by making the first electrode of molybdenum so as to increase the piezoelectric characteristics of the piezoelectric region.
摘要翻译：一种电子微量天平，其制造在容纳与隔膜相邻的振荡电路的半导体主体中。由第一电极，第二电极和布置在第一和第二电极之间的压电区形成的堆叠在隔膜的上方延伸。沉积在堆叠上的任何物质都会导致微量天平的质量的变化，从而导致由微量天平形成的谐振器和振荡电路的共振频率的变化，并且因此可以被电子地检测。通过形成适合于与堆叠上的目标化学物质结合的材料的敏感层来获得化学传感器。可以通过使钼的第一电极增加压电区域的压电特性来增加微量天平的灵敏度。

18. 发明申请

US20100000593A1 PHOTOVOLTAIC DEVICE WITH CONCENTRATION AND SPECTRAL SPLITTING OF COLLECTED LIGHT BEAM 有权
标题翻译：收集光束的浓度和光谱分离的光电器件
公开(公告)号：US20100000593A1
公开(公告)日：2010-01-07
申请号：US12494838
申请日：2009-06-30
申请人： Ubaldo MASTROMATTEO
发明人： Ubaldo MASTROMATTEO
IPC分类号： H01L31/052 , H01L31/18
CPC分类号： H01L31/0232 , H01L31/0547 , Y02E10/52
摘要： A photovoltaic device may include a housing having a transparent pupil receiving a collimated beam of radiation, and photovoltaic cell arrays being positioned on respective inner surfaces of the housing, each photovoltaic cell array sensing a respective spectral range of the radiation different from the other photovoltaic cell arrays. The photovoltaic device may further include dichroic filters being positioned along an optical axis of the transparent pupil and splitting the collimated beam into a corresponding divided beams of different spectrums, and mirrors corresponding to the divided beams. Each mirror may have reflecting surfaces, receive a respective divided beam, subdivide the received divided beam into reflected beams from the reflecting surfaces, and illuminate an active area of a photovoltaic cell of the respective array.
摘要翻译：光伏器件可以包括具有接收准直的辐射束的透明光瞳的壳体，以及位于壳体的相应内表面上的光伏电池阵列，每个光伏电池阵列感测到与其他光伏电池不同的辐射的相应光谱范围阵列光电器件还可以包括沿着透明光瞳的光轴定位的分色滤光器，并将准直光束分成对应于不同光谱的对应分割光束，以及对应于分割光束的反射镜。每个反射镜可以具有反射表面，接收相应的分割光束，将接收到的划分光束细分成来自反射表面的反射光束，并照亮相应阵列的光伏电池的有效区域。

19. 发明授权

US07635454B2 Integrated chemical microreactor with separated channels 有权
标题翻译：具有分离通道的集成化学微反应器
公开(公告)号：US07635454B2
公开(公告)日：2009-12-22
申请号：US10997235
申请日：2004-11-24
申请人： Ubaldo Mastromatteo , Flavio Francesco Villa , Gabriele Barlocchi
发明人： Ubaldo Mastromatteo , Flavio Francesco Villa , Gabriele Barlocchi
IPC分类号： B01J19/00
CPC分类号： B01L3/502715 , B01L3/5025 , B01L3/502707 , B01L7/52 , B01L2200/027 , B01L2200/12 , B01L2300/044 , B01L2300/0816 , B01L2300/1827
摘要： The microreactor is formed by a sandwich including a first body, an intermediate sealing layer and a second body. A buried channel extends in the first body and communicates with the surface of the first body through a first and a second apertures. A first and a second reservoirs are formed in the second body and are at least partially aligned with the first and second apertures. The sealing layer separates the first aperture from the first reservoir and the second aperture from the second reservoir, thereby avoiding contamination of liquids contained in the buried channel from the outside and from any adjacent buried channels. The sealing layer is perforated during use of the device, but a resilient plug can be used to reseal the device.
摘要翻译：微反应器由包括第一主体，中间密封层和第二主体的夹层形成。掩埋通道在第一主体中延伸并且通过第一和第二孔与第一主体的表面连通。第一和第二储存器形成在第二主体中并且至少部分地与第一和第二孔对准。密封层将第一孔与第一储存器和第二孔分隔开来自第二储存器，从而避免了从外部和任何相邻的埋入通道污染包含在掩埋通道中的液体。在使用该装置期间密封层是穿孔的，但是可以使用弹性塞来重新密封装置。

20. 发明授权

US07463454B2 Micro-actuator for hard drive utilizing insulating portions to separate biasing regions from adjacent regions of the micro-actuator and simplified manufacture process therefore 有权
标题翻译：用于硬盘驱动器的微致动器利用绝缘部分从而将偏压区域与微致动器的相邻区域分开并因此简化了制造过程
公开(公告)号：US07463454B2
公开(公告)日：2008-12-09
申请号：US11818659
申请日：2007-06-14
申请人： Ubaldo Mastromatteo , Bruno Murari , Paolo Ferrari , Simone Sassolini
发明人： Ubaldo Mastromatteo , Bruno Murari , Paolo Ferrari , Simone Sassolini
IPC分类号： G11B5/56
CPC分类号： B81B3/0021 , H02N1/006
摘要： A micro-electro-mechanical device formed by a body of semiconductor material having a thickness and defining a mobile part and a fixed part. The mobile part is formed by a mobile platform, supporting arms extending from the mobile platform to the fixed part, and by mobile electrodes fixed to the mobile platform. The fixed part has fixed electrodes facing the mobile electrodes, a first biasing region fixed to the fixed electrodes, a second biasing region fixed to the supporting arms, and an insulation region of insulating material extending through the entire thickness of the body. The insulation region insulates electrically at least one between the first and the second biasing regions from the rest of the fixed part.
摘要翻译：由具有厚度并限定可移动部分和固定部分的半导体材料体形成的微电子机械装置。可移动部分由移动平台，从移动平台延伸到固定部分的支撑臂，以及固定到移动平台的移动电极形成。固定部分具有面向移动电极的固定电极，固定到固定电极的第一偏置区域，固定到支撑臂的第二偏压区域以及延伸穿过主体整个厚度的绝缘材料的绝缘区域。绝缘区域在第一和第二偏压区域之间至少一个与固定部件的其余部分绝缘。

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