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    • 11. 发明申请
    • SOI SiGe-BASE LATERAL BIPOLAR JUNCTION TRANSISTOR
    • SOI SiGe-BASE横向双极晶体管晶体管
    • US20120289018A1
    • 2012-11-15
    • US13556372
    • 2012-07-24
    • Tak H. NingKevin K. ChanMarwan H. Khater
    • Tak H. NingKevin K. ChanMarwan H. Khater
    • H01L21/331
    • H01L29/7317H01L27/0821H01L27/1203H01L29/0808H01L29/165H01L29/66265
    • A lateral heterojunction bipolar transistor (HBT) is formed on a semiconductor-on-insulator substrate. The HBT includes a base including a doped silicon-germanium alloy base region, an emitter including doped silicon and laterally contacting the base, and a collector including doped silicon and laterally contacting the base. Because the collector current is channeled through the doped silicon-germanium base region, the HBT can accommodate a greater current density than a comparable bipolar transistor employing a silicon channel. The base may also include an upper silicon base region and/or a lower silicon base region. In this case, the collector current is concentrated in the doped silicon-germanium base region, thereby minimizing noise introduced to carrier scattering at the periphery of the base. Further, parasitic capacitance is minimized because the emitter-base junction area is the same as the collector-base junction area.
    • 在绝缘体上半导体衬底上形成横向异质结双极晶体管(HBT)。 HBT包括基底,其包括掺杂的硅 - 锗合金基底区域,包括掺杂硅并且横向接触基底的发射体,以及包括掺杂硅并且横向接触基底的收集器。 因为集电极电流被引导通过掺杂的硅 - 锗基区,所以与使用硅沟道的可比较的双极晶体管相比,HBT可以容纳更大的电流密度。 基底还可以包括上硅基区和/或下硅基区。 在这种情况下,集电极电流集中在掺杂的硅 - 锗基区域中,从而最小化引入到基极周边的载流子散射的噪声。 此外,寄生电容被最小化,因为发射极 - 基极结面积与集电极 - 基极结面积相同。