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    • 6. 发明授权
    • Computer program products for determining stopping powers of design structures with respect to a traveling particle
    • 用于确定相对于旅行颗粒的设计结构的停止力的计算机程序产品
    • US07877716B2
    • 2011-01-25
    • US12111529
    • 2008-04-29
    • Giovanni FiorenzaConal E. MurrayKenneth P. RodbellHenry Tang
    • Giovanni FiorenzaConal E. MurrayKenneth P. RodbellHenry Tang
    • G06F17/50G06F19/00G06G7/62
    • G06F17/5009G06F2217/16
    • A computer program product, comprising a computer readable storage device having a computer readable program code stored therein, said program code including an algorithm adapted to be executed by a computer to implement a method. First, design information of a design structure is provided including a back-end-of-line layer of an integrated circuit which includes N interconnect layers, wherein N is a positive integer. Next, each interconnect layer is divided into multiple pixels. Next, a first path of a traveling particle in a first interconnect layer of the N interconnect layers is determined. Next, M path pixels of the multiple pixels of the first interconnect layer on the first path of the traveling particle are identified, wherein M is a positive integer. Next, a first loss energy lost by the traveling particle due to its completely passing through a first pixel of the M path pixels is determined.
    • 一种计算机程序产品,包括具有存储在其中的计算机可读程序代码的计算机可读存储设备,所述程序代码包括适于由计算机执行以实现方法的算法。 首先,提供一种设计结构的设计信息,其包括包括N个互连层的集成电路的后端行层,其中N是正整数。 接下来,每个互连层被分成多个像素。 接下来,确定N个互连层的第一互连层中的行进粒子的第一路径。 接下来,识别行进粒子的第一路径上的第一互连层的多个像素的M个路径像素,其中M是正整数。 接下来,确定由于行进粒子完全通过M路径像素的第一像素而损失的第一损失能量。