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11. 发明申请

WO2006099759A3 VACUUM PLASMA GENERATOR 审中-公开
标题翻译：真空等离子发生器
公开(公告)号：WO2006099759A3
公开(公告)日：2008-04-10
申请号：PCT/CH2006000124
申请日：2006-03-01
申请人： OERLIKON TRADING AG , TUYMER GERHARD , RAMM JUERGEN , LENDI DANIEL
发明人： TUYMER GERHARD , RAMM JUERGEN , LENDI DANIEL
IPC分类号： H01J37/32 , H01J37/34
CPC分类号： H01J37/32174 , H01J37/32091 , H02M7/10
摘要： The invention relates to a vacuum plasma generator for providing a plasma discharge (10) for treating work pieces (5) by way of a pulsed plasma process in a vacuum chamber (2). Said vacuum plasma generator comprises a generator output (9, 9') having an AC mains supply (6a), an AC/DC mains rectifier system (6) for rectifying the AC mains voltage to a DC voltage, a filter capacitor (6b), a first stage as clocked DC/DC voltage converter (7) with means for adjusting the DC output voltage which produces an intermediate circuit voltage (Uz), comprising a controlled power switch (7a) which feeds the primary winding of a transformer (14) and the secondary winding of which is connected to a rectifier (15) and a downstream intermediate capacitor (12) and configures a floating transformer secondary circuit (23). Said secondary circuit is connected to a downstream second stage which is a pulse output stage (8) and is connected to the generator output (9, 9'). The DC/DC voltage converter (7) has at least two floating transformer secondary circuits (23) and comprises a switch-over device (20) with a switch controller (22) for optionally switching the floating transformer secondary circuits (23) in parallel or in series.
摘要翻译：用于工件（5）用的脉冲等离子体工艺在真空室（2），用于供应等离子放电（10）的真空等离子体发生器被实现，其包括加工：发电机输出（9,9“）与AC电源（6a）中，功率整流器装置（6），用于其中，中间电路电压（UZ） - 是输出电压，其特征在于所述的受控电源开关（7A） - 执行AC线路电压的成细的直流电压，平滑电容器（图6b），第一级主频DC / DC - 电压转换器（7），用于调节DC 一个变压器（14）的初级绕组馈送，而次级绕组连接到其被连接到下游的第二级，包括一个脉冲的整流器（15）和下游DC链路电容器（12）和浮置互感器二次回路（23） - 在输出级（8）的形式和这些到发生器输出（9,9“）连接，其中，所述DC - DC电压转换器（7）包括至少两个浮动互感器二次回路（23），并且包括用于任选地平行或浮动变压器次级电路的串联连接的开关控制器（22）的开关装置（20），（23 ）。

12. 发明申请

WO2008009619A1 METHOD FOR DEPOSITING ELECTRICALLY INSULATING LAYERS 审中-公开
标题翻译：方法分离电气绝缘层
公开(公告)号：WO2008009619A1
公开(公告)日：2008-01-24
申请号：PCT/EP2007057179
申请日：2007-07-12
申请人： OERLIKON TRADING AG , RAMM JUERGEN , WIDRIG BENO , WOHLRAB CHRISTIAN
发明人： RAMM JUERGEN , WIDRIG BENO , WOHLRAB CHRISTIAN
IPC分类号： C23C14/32 , C23C14/08
CPC分类号： C23C14/325 , C23C14/081 , H01J37/32055 , H01J37/3405 , H01J37/3417 , H01J37/3447 , H01J37/345 , H01J37/3467
摘要： Method for producing layers of low conductivity, especially insulating layers, on at least one workpiece by vacuum coating, wherein an electrical arc discharge is operated between at least one anode and one cathode of an arc source in an atmosphere containing reactive gas, and only a small external magnetic field or none at all is produced at the surface of a target electrically connected to the cathode essentially perpendicular to the target surface to assist the vaporization process, the degree of recoating of the surface by other coating sources being less than 10%, and the magnetic field is generated by a magnet system that comprises at least one axially polarized coil with a geometry similar in size to the target.
摘要翻译：一种用于制备不良导通，通过真空沉积，其中，至少一个阳极和一个电弧源的阴极之间的电弧放电，在reaktivgashaltiger气氛和的与阴极电关联的表面上操作的装置尤其绝缘层上的至少一个工件处理对象没有或只有一小，基本上与靶表面产生垂直，外部磁场以辅助蒸发工艺，其中所述表面的重新涂覆由其它涂料源，或用磁铁系统的磁场是小于10％，所述至少一个轴向极化线圈具有类似目标外周几何形状包括，被生成。

13. 发明申请

WO2006099758A2 METHOD FOR OPERATING A PULSED ARC SOURCE 审中-公开
标题翻译：一种用于操作脉冲电弧源
公开(公告)号：WO2006099758A2
公开(公告)日：2006-09-28
申请号：PCT/CH2006000123
申请日：2006-03-01
申请人： UNAXIS BALZERS AG , RAMM JUERGEN , GSTOEHL OLIVER , WIDRIG BENO , LENDI DANIEL
发明人： RAMM JUERGEN , GSTOEHL OLIVER , WIDRIG BENO , LENDI DANIEL
CPC分类号： H01J37/3444 , C23C14/024 , C23C14/0641 , C23C14/08 , C23C14/081 , C23C14/083 , C23C14/325 , F01D5/288 , F05D2230/313 , H01J37/32055 , H01J37/34
摘要： The invention relates to an arc method for depositing insulating layers and to an arc method for low-temperature coating. To this end, an electrical spark discharge, which is ignited or operated on a surface of target of an arc source, is simultaneously supplied with a direct current as well as with pulsed or alternating current. The invention also relates to an arc source in which the target is connected to a power supply unit that is either at least one first pulsed high-current supply (18, 18') and another power supply (13', 18'') or a power supply (21, 21', 22) designed with combinational circuit technology.
摘要翻译：本发明涉及一种Arcverfahren用于绝缘层的沉积和低温涂层的Arcverfahren，其中被点燃电弧源的目标的表面上或操作的电火花放电同时与直流和脉冲或交流电流供给。此外，本发明涉及其中所述目标被连接到或者至少第一脉冲高电源18，18“和另一电源13”，18“”，或在开关电源技术电源21，21执行”的电源单元的电弧源，是连接22

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