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11. 发明申请

US20130046644A1 COMMODITY ACCOMMODATION APPARATUS, COMMODITY REGISTRATION APPARATUS AND COMMODITY REGISTRATION METHOD 审中-公开
标题翻译：商品住宿设备，商品注册设备和商品注册方法
公开(公告)号：US20130046644A1
公开(公告)日：2013-02-21
申请号：US13584103
申请日：2012-08-13
申请人： Naoto Sano
发明人： Naoto Sano
IPC分类号： G06Q20/20 , G06Q20/40
CPC分类号： G06Q20/20 , G06Q20/208 , G07G1/14
摘要： A commodity accommodation apparatus comprises an accommodation unit configured to accommodate commodities, a shooting unit configured to shoot an image of the interior of the accommodation unit and a sending section configured to send an identification information for specifying one's own identity and the shot image to a commodity registration apparatus.
摘要翻译：商品住宿设备包括：被配置为容纳商品的收纳单元，被配置为拍摄住宿单元的内部的图像的拍摄单元;以及发送部，被配置为向商品发送用于指定自己的身份和拍摄图像的识别信息登记装置

12. 发明申请

US20060093009A1 Gas laser device and exposure apparatus using the same 审中-公开
标题翻译：气体激光装置及使用其的曝光装置
公开(公告)号：US20060093009A1
公开(公告)日：2006-05-04
申请号：US11292195
申请日：2005-12-02
申请人： Naoto Sano , Yoshiyuki Nagai
发明人： Naoto Sano , Yoshiyuki Nagai
IPC分类号： H01S3/223 , H01S3/22
CPC分类号： H01S3/036
摘要： A gas laser device includes a laser gas supplying device in a chamber for supplying a laser gas to an exciting region in the chamber, and an exciting device for exciting the laser gas supplied to the exciting region. The gas laser device controls the laser gas supplying device so that, when the laser gas is excited by the exciting device, the laser gas is circulated at a first circulating rate and so that, when the laser gas is not excited by the exciting device, the laser gas is circulated at a second circulating rate lower than the first circulating rate.
摘要翻译：一种气体激光装置，包括在室内向激光区域供给激光气体的激光气体供给装置，激励供给激励区域的激光气体的激励装置。气体激光装置控制激光气体供给装置，使得当激光气体被激励装置激发时，激光气体以第一循环速率循环，并且当激光气体不被激发装置激发时，激光气体以低于第一循环速率的第二循环速率循环。

13. 发明授权

US06646717B2 Projection exposure apparatus and device manufacturing method using the same 失效
标题翻译：投影曝光装置及其制造方法
公开(公告)号：US06646717B2
公开(公告)日：2003-11-11
申请号：US09986322
申请日：2001-11-08
申请人： Masakatsu Ota , Naoto Sano
发明人： Masakatsu Ota , Naoto Sano
IPC分类号： G03B2754
CPC分类号： G03F7/70025 , G03F7/70575
摘要： A projection exposure apparatus includes an illumination optical system for illuminating a pattern of a reticle with laser light from a continuous emission excimer laser, a projection optical system for projecting the illuminated pattern onto a substrate, wherein the projection optical system includes a lens system being made of a substantially single glass material, a wavelength detecting device for detecting a wavelength of the laser light from the excimer laser and for producing an output, and a displacing device for shifting a mirror for resonance of the excimer laser, in an optical axis direction of the excimer laser, on the basis of the output of the wavelength detecting device.
摘要翻译：一种投影曝光装置，包括用于利用来自连续发射准分子激光器的激光照射标线图案的照明光学系统，用于将照射图案投影到基板上的投影光学系统，其中投影光学系统包括制造的透镜系统基本上单个玻璃材料的波长检测装置，用于检测来自准分子激光器的激光的波长并用于产生输出的波长检测装置，以及用于使准分子激光器的共振用的反射镜移位的移位装置，沿光轴方向准分子激光器，基于波长检测装置的输出。

14. 发明授权

US06625031B2 Module part and electronic device 失效
公开(公告)号：US06625031B2
公开(公告)日：2003-09-23
申请号：US09984679
申请日：2001-10-16
申请人： Naoto Sano , Yasuyuki Morishima
发明人： Naoto Sano , Yasuyuki Morishima
IPC分类号： H05K114
CPC分类号： H05K1/142 , H05K1/141 , H05K1/182 , H05K3/368 , H05K2201/09072 , H05K2201/1034 , H05K2201/10477
摘要： A part having a large height contained in a module part is placed in a first cut-off portion formed in a part-mounting substrate to be mounted. Moreover, the module part itself is placed in a second cut-off portion formed in a mother board to be mounted.

15. 发明授权

US06538492B2 Power supply, electronic device using the same, and output 失效
标题翻译：电源，电子设备使用相同，并输出
公开(公告)号：US06538492B2
公开(公告)日：2003-03-25
申请号：US09873053
申请日：2001-06-01
申请人： Naoto Sano , Shingo Kunii
发明人： Naoto Sano , Shingo Kunii
IPC分类号： H02J338
CPC分类号： G05F1/565
摘要： A power supply converts a first direct-current voltage into a second direct-current voltage and outputs the second direct-current voltage. The power supply includes a reference voltage generating circuit for generating a reference voltage, a control circuit for controlling an output voltage in accordance with the reference voltage, and a short-circuit detecting circuit for performing an output short-circuit protection operation, when short circuiting occurs at the output, by detecting the occurrence of short circuiting and by decreasing the reference voltage so that the output voltage is decreased.
摘要翻译：电源将第一直流电压转换成第二直流电压并输出第二直流电压。电源包括用于产生参考电压的参考电压产生电路，用于根据参考电压控制输出电压的控制电路，以及用于在短路时执行输出短路保护操作的短路检测电路发生在输出端，通过检测短路的发生和通过降低参考电压使得输出电压降低。

16. 发明授权

US06322220B1 Exposure apparatus and device manufacturing method using the same 失效
标题翻译：曝光装置及其制造方法
公开(公告)号：US06322220B1
公开(公告)日：2001-11-27
申请号：US08991442
申请日：1997-12-16
申请人： Naoto Sano , Chidane Ouchi
发明人： Naoto Sano , Chidane Ouchi
IPC分类号： G02B504
CPC分类号： G03F7/70091 , H01S3/1305 , H01S3/134 , H01S3/225
摘要： An exposure apparatus includes a first dispersing element for dispersing substantially parallel laser light, from a laser, with respect to the wavelength to provide light beams of wavelength units, a first optical system for collecting each light beam of a wavelength unit from the first dispersing element, a wavelength selecting device for passing a predetermined wavelength region of light, of the light beams of wavelength units each being collected by the first optical system, a second optical system for receiving the light from the wavelength selecting device and providing parallel light beams of wavelength units, and a second dispersing element for combining the parallel light beams of wavelength units from the second optical system, the second dispersing element having substantially the same angular dispersion as that of the first dispersing element and a direction of dispersion opposite to that of the first dispersing element.
摘要翻译：曝光装置包括：第一分散元件，用于从激光器分散相对于波长的大致平行的激光，以提供波长单元的光束;第一光学系统，用于从第一分散元件收集波长单元的每个光束; 用于使每个由第一光学系统收集的波长单位的光束的预定波长区域通过的波长选择装置，用于接收来自波长选择装置的光并提供波长的平行光束的第二光学系统单元和用于组合来自第二光学系统的波长单元的平行光束的第二分散元件，第二分散元件具有与第一分散元件基本相同的角度分散，并且与第一分散元件的分散方向相反的方向分散元件。

17. 发明授权

US06215806B1 Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface 失效
标题翻译：准分子激光发生器具有激光室，具有氟化物钝化的内表面
公开(公告)号：US06215806B1
公开(公告)日：2001-04-10
申请号：US08812288
申请日：1997-03-06
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Naoto Sano
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Naoto Sano
IPC分类号： H01S322
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/225
摘要： An excimer laser generating system includes a laser chamber whose inner surface is covered with a fluorine-passivated surface. Preferably, the surfaces of a blower and heat exchanger disposed in the laser chamber are also covered with a fluorine-passivated surface. The fluorine-passivated surface may be formed of a wide variety of materials including an aluminum oxide film, a fluoride film containing aluminum fluoride and magnesium fluoride, iron fluoride, and nickel fluoride. Preferably, the excimer laser generation system includes a gas supply system having an inert gas purging system so that gas sources can be replaced without exposing the inside of gas supply pipes to atmosphere. With the above arrangement, the excimer laser generating system can generate a laser beam pulse whose energy and shape are maintained constant for a long period of operation time without encountering serious degradation. The invention also provides a high-reliability step-and-repeat exposure apparatus using the above excimer laser generating system, capable of exposing a very fine pattern.
摘要翻译：准分子激光发生系统包括其内表面被氟钝化表面覆盖的激光室。优选地，设置在激光室中的鼓风机和热交换器的表面也被氟钝化表面覆盖。氟钝化表面可以由各种各样的材料形成，包括氧化铝膜，含氟化铝和氟化镁的氟化物膜，氟化铁和氟化镍。优选地，准分子激光发生系统包括具有惰性气体吹扫系统的气体供应系统，使得可以更换气体源而不将气体供应管的内部暴露于大气。通过上述布置，准分子激光发生系统可以产生激光束脉冲，其能量和形状在长时间的操作时间内保持恒定，而不会严重恶化。本发明还提供了使用上述准分子激光发生系统的能够曝光非常精细图案的高可靠性分步重复曝光装置。

18. 发明授权

US5250797A Exposure method and apparatus for controlling light pulse emission using determined exposure quantities and control parameters 失效
标题翻译：使用确定的曝光量和控制参数来控制光脉冲发射的曝光方法和装置
公开(公告)号：US5250797A
公开(公告)日：1993-10-05
申请号：US771221
申请日：1991-10-04
申请人： Naoto Sano , Tsutomu Asahina
发明人： Naoto Sano , Tsutomu Asahina
IPC分类号： G03F7/20 , G01J1/32
CPC分类号： G03F7/70058 , G03F7/70558
摘要： A semiconductor device manufacturing exposure method usable with a pulsed light source is disclosed. The light source is caused to produce pulses of light in accordance with successively changed control parameters, while a sensor detects each pulse of light from the light source. Outputs of the sensor corresponding to the pulses of light are integrated to determine a quantity of exposure of a predetermined zone of a substrate corresponding to each light pulse. By using the determined exposure quantities corresponding to the pulses of light, a relational equation representing the relationship between each control parameter and a corresponding exposure quantity is determined. Then, a control parameter for subsequent light pulse emission of the light source is determined in accordance with the determined relational equation.
摘要翻译：公开了可用于脉冲光源的半导体器件制造曝光方法。光源根据连续变化的控制参数产生脉冲光，而传感器检测来自光源的每个脉冲。对应于光脉冲的传感器的输出被积分以确定对应于每个光脉冲的衬底的预定区域的曝光量。通过使用与光脉冲对应的确定的曝光量，确定表示每个控制参数与对应的曝光量之间的关系的关系式。然后，根据确定的关系式来确定光源的后续光脉冲发射的控制参数。

19. 发明授权

US07031364B2 Gas laser device and exposure apparatus using the same 失效
标题翻译：气体激光装置及使用其的曝光装置
公开(公告)号：US07031364B2
公开(公告)日：2006-04-18
申请号：US09163402
申请日：1998-09-30
申请人： Naoto Sano , Yoshiyuki Nagai
发明人： Naoto Sano , Yoshiyuki Nagai
IPC分类号： H01S3/22
CPC分类号： H01S3/036
摘要： In a gas laser device, a laser gas sealingly stored in a chamber is excited using a discharging electrode that is electrically discharged. Laser light produced by the electrical discharging is totally reflected by a total reflection mirror. An output window partially reflects the laser light and outputs a portion of the laser light reflected between the total reflection mirror and the output window. A blower circulates the laser gas within the chamber so that the laser gas passing an electrical discharging region of the discharging electrode is circulated in the chamber and is returned to the electrical discharging region of the discharging electrode. The blower is operated according to the state of electrical discharging from the discharging electrode. The blower operation includes operating rotation of the blower in a stand-by state in which no laser gas is excited by the electrical discharging from said discharging electrode so that no laser light is emitted but the gas laser device is in a condition to output the laser light, and operating rotation of the blower in an in-operation state in which the laser gas is excited by the electrical discharging from said discharge electrode and laser light is outputted.
摘要翻译：在气体激光装置中，利用电放电的放电电极激发密封地存储在腔室中的激光气体。由放电产生的激光完全由全反射镜反射。输出窗部分地反射激光并输出在全反射镜和输出窗之间反射的激光的一部分。鼓风机使激光气体在室内循环，使得通过放电电极的放电区域的激光气体在室内循环并返回到放电电极的放电区域。鼓风机根据从放电电极放电的状态进行操作。鼓风机操作包括在等待状态下操作鼓风机的旋转，其中没有激光气体通过从所述放电电极的放电而被激发，使得不会发射激光，但是气体激光装置处于输出激光的状态输出激光器通过从放电电极放电激光而激发激光的工作状态下的鼓风机的光和操作旋转。

20. 发明申请

US20050189566A1 Switching power-supply module 有权
标题翻译：开关电源模块
公开(公告)号：US20050189566A1
公开(公告)日：2005-09-01
申请号：US10746660
申请日：2003-12-26
申请人： Tadahiko Matsumoto , Syuichi Honda , Yasuo Ohashi , Naoto Sano
发明人： Tadahiko Matsumoto , Syuichi Honda , Yasuo Ohashi , Naoto Sano
IPC分类号： H02M3/28 , H01L31/109 , H02M3/335 , H02M7/00 , H05K1/14 , H05K3/34 , H05K3/36
CPC分类号： H02M7/003 , H02M3/33538 , H02M2001/0074 , H05K1/144 , H05K3/3405 , H05K3/3421 , H05K3/368 , H05K2201/10386
摘要： A switching power-supply module includes circuit boards, power conversion circuit sections provided on the respective circuit boards, conductor land patterns provided with spacing therebetween along edges of the circuit boards, conductor terminals for interconnecting the conductor land patterns. The circuit boards are stacked with spacing therebetween with the corresponding conductor land patterns being aligned, and the aligned conductor land patterns are interconnected by the corresponding conductor terminals. At least one of the conductor terminals includes an interboard-connection portion for interconnecting the conductor land patterns of the circuit boards and a leg portion that extends from the interboard-connection portion in the stacking direction of the circuit boards and that defines an external-connection portion, and the other conductor terminals each function as an interboard-connection dedicated terminal for providing connection between the circuit boards.
摘要翻译：开关电源模块包括电路板，设置在各个电路板上的功率转换电路部分，沿着电路板的边缘设置有间隔的导体焊盘图案，用于互连导体焊盘图案的导体端子。电路板之间具有间隔地堆叠，相应的导体焊盘图案对准，并且对准的导体焊盘图案通过相应的导体端子互连。至少一个导体端子包括用于互连电路板的导体焊盘图案的板间连接部分和从电路板的层叠方向上从板间连接部分延伸的脚部分，并且限定外部连接部分，其他导体端子各自用作板间连接专用端子，用于提供电路板之间的连接。

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