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1. 发明授权

US06870865B2 Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method 失效
公开(公告)号：US06870865B2
公开(公告)日：2005-03-22
申请号：US09839139
申请日：2001-04-23
申请人： Yoshiyuki Nagai , Naoto Sano
发明人： Yoshiyuki Nagai , Naoto Sano
IPC分类号： G03F7/20 , H01L21/027 , H01S3/104 , H01S3/1055 , H01S3/106 , H01S3/136 , H01S3/225 , H01S5/022 , H01S5/06 , H01S5/062 , H01S5/40 , H01S3/13
CPC分类号： H01S3/225 , H01S3/104 , H01S3/1055 , H01S3/106
摘要： A laser oscillation apparatus includes a wavelength change unit for driving a wavelength selection element in a band-narrowing module and changing the oscillation wavelength of a laser beam to a target value, and an oscillation history memory for storing the oscillation state of the laser beam as an oscillation history. The wavelength change unit drives the wavelength selection element on the basis of the oscillation history and changes the oscillation wavelength of the laser beam to the target value.

2. 发明申请

US20050030987A1 Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method 有权
标题翻译：激光振荡装置，曝光装置，半导体装置的制造方法，半导体制造厂和曝光装置维护方法
公开(公告)号：US20050030987A1
公开(公告)日：2005-02-10
申请号：US10930745
申请日：2004-09-01
申请人： Yoshiyuki Nagai , Naoto Sano
发明人： Yoshiyuki Nagai , Naoto Sano
IPC分类号： G03F7/20 , H01L21/027 , H01S3/104 , H01S3/1055 , H01S3/106 , H01S3/136 , H01S3/225 , H01S5/022 , H01S5/06 , H01S5/062 , H01S5/40 , H01S3/13
CPC分类号： H01S3/225 , H01S3/104 , H01S3/1055 , H01S3/106
摘要： A laser oscillation apparatus includes a wavelength change unit for driving a wavelength selection element in a band-narrowing module and changing the oscillation wavelength of a laser beam to a target value, and an oscillation history memory for storing the oscillation state of the laser beam as an oscillation history. The wavelength change unit drives the wavelength selection element on the basis of the oscillation history and changes the oscillation wavelength of the laser beam to the target value.
摘要翻译：激光振荡装置包括用于驱动频带变窄模块中的波长选择元件并将激光束的振荡波长改变为目标值的波长改变单元和用于将激光束的振荡状态存储的振荡历史存储器，振荡历史。波长改变单元基于振荡历史驱动波长选择元件，并将激光束的振荡波长改变为目标值。

3. 发明授权

US07145925B2 Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method 有权
标题翻译：激光振荡装置，曝光装置，半导体装置的制造方法，半导体制造厂和曝光装置维护方法
公开(公告)号：US07145925B2
公开(公告)日：2006-12-05
申请号：US10930745
申请日：2004-09-01
申请人： Yoshiyuki Nagai , Naoto Sano
发明人： Yoshiyuki Nagai , Naoto Sano
IPC分类号： H01S3/13
CPC分类号： H01S3/225 , H01S3/104 , H01S3/1055 , H01S3/106
摘要： A laser oscillation apparatus includes a wavelength change unit for driving a wavelength selection element in a band-narrowing module and changing the oscillation wavelength of a laser beam to a target value, and an oscillation history memory for storing the oscillation state of the laser beam as an oscillation history. The wavelength change unit drives the wavelength selection element on the basis of the oscillation history and changes the oscillation wavelength of the laser beam to the target value.
摘要翻译：激光振荡装置包括用于驱动频带变窄模块中的波长选择元件并将激光束的振荡波长改变为目标值的波长改变单元和用于将激光束的振荡状态存储的振荡历史存储器，振荡历史。波长改变单元基于振荡历史驱动波长选择元件，并将激光束的振荡波长改变为目标值。

4. 发明授权

US07031364B2 Gas laser device and exposure apparatus using the same 失效
标题翻译：气体激光装置及使用其的曝光装置
公开(公告)号：US07031364B2
公开(公告)日：2006-04-18
申请号：US09163402
申请日：1998-09-30
申请人： Naoto Sano , Yoshiyuki Nagai
发明人： Naoto Sano , Yoshiyuki Nagai
IPC分类号： H01S3/22
CPC分类号： H01S3/036
摘要： In a gas laser device, a laser gas sealingly stored in a chamber is excited using a discharging electrode that is electrically discharged. Laser light produced by the electrical discharging is totally reflected by a total reflection mirror. An output window partially reflects the laser light and outputs a portion of the laser light reflected between the total reflection mirror and the output window. A blower circulates the laser gas within the chamber so that the laser gas passing an electrical discharging region of the discharging electrode is circulated in the chamber and is returned to the electrical discharging region of the discharging electrode. The blower is operated according to the state of electrical discharging from the discharging electrode. The blower operation includes operating rotation of the blower in a stand-by state in which no laser gas is excited by the electrical discharging from said discharging electrode so that no laser light is emitted but the gas laser device is in a condition to output the laser light, and operating rotation of the blower in an in-operation state in which the laser gas is excited by the electrical discharging from said discharge electrode and laser light is outputted.
摘要翻译：在气体激光装置中，利用电放电的放电电极激发密封地存储在腔室中的激光气体。由放电产生的激光完全由全反射镜反射。输出窗部分地反射激光并输出在全反射镜和输出窗之间反射的激光的一部分。鼓风机使激光气体在室内循环，使得通过放电电极的放电区域的激光气体在室内循环并返回到放电电极的放电区域。鼓风机根据从放电电极放电的状态进行操作。鼓风机操作包括在等待状态下操作鼓风机的旋转，其中没有激光气体通过从所述放电电极的放电而被激发，使得不会发射激光，但是气体激光装置处于输出激光的状态输出激光器通过从放电电极放电激光而激发激光的工作状态下的鼓风机的光和操作旋转。

5. 发明申请

US20060093009A1 Gas laser device and exposure apparatus using the same 审中-公开
标题翻译：气体激光装置及使用其的曝光装置
公开(公告)号：US20060093009A1
公开(公告)日：2006-05-04
申请号：US11292195
申请日：2005-12-02
申请人： Naoto Sano , Yoshiyuki Nagai
发明人： Naoto Sano , Yoshiyuki Nagai
IPC分类号： H01S3/223 , H01S3/22
CPC分类号： H01S3/036
摘要： A gas laser device includes a laser gas supplying device in a chamber for supplying a laser gas to an exciting region in the chamber, and an exciting device for exciting the laser gas supplied to the exciting region. The gas laser device controls the laser gas supplying device so that, when the laser gas is excited by the exciting device, the laser gas is circulated at a first circulating rate and so that, when the laser gas is not excited by the exciting device, the laser gas is circulated at a second circulating rate lower than the first circulating rate.
摘要翻译：一种气体激光装置，包括在室内向激光区域供给激光气体的激光气体供给装置，激励供给激励区域的激光气体的激励装置。气体激光装置控制激光气体供给装置，使得当激光气体被激励装置激发时，激光气体以第一循环速率循环，并且当激光气体不被激发装置激发时，激光气体以低于第一循环速率的第二循环速率循环。

6. 发明申请

US20140226381A1 POWER CONVERSION DEVICE AND POWER CONVERSION METHOD 审中-公开
标题翻译：电力转换装置和功率转换方法
公开(公告)号：US20140226381A1
公开(公告)日：2014-08-14
申请号：US14342470
申请日：2012-08-13
申请人： Kensuke Sasaki , Yukio Mizukoshi , Yoshiyuki Nagai
发明人： Kensuke Sasaki , Yukio Mizukoshi , Yoshiyuki Nagai
IPC分类号： H02M7/5395
CPC分类号： H02M7/5395 , H02M7/5387 , H02M7/53875 , H02P27/08
摘要： A power conversion device generates drive command signals for switch elements of multiple phases, the drive command signals designed to control connecting and disconnecting operations of the multiple phase switch elements in such a way that a direction of a current change attributed to a connecting or disconnecting operation of one switch element and a direction of a current change attributed to a connecting or disconnecting operation of another switch element are opposite to each other. Furthermore, the power conversion device corrects output timings of the drive command signals to be outputted to the switch elements so as to synchronize connecting and disconnecting timings of the switch elements with each other.
摘要翻译：电力转换装置产生用于多相开关元件的驱动指令信号，驱动指令信号被设计成控制多相开关元件的连接和断开操作，使得归因于连接或断开操作的电流变化的方向一个开关元件和归因于另一开关元件的连接或断开操作的电流变化的方向彼此相反。此外，功率转换装置校正要输出到开关元件的驱动指令信号的输出定时，以使开关元件的连接和断开定时彼此同步。

7. 发明授权

US07548717B2 Fixing apparatus 有权
标题翻译：固定装置
公开(公告)号：US07548717B2
公开(公告)日：2009-06-16
申请号：US11420052
申请日：2006-05-24
申请人： Yoshinobu Tateishi , Hiroaki Hori , Yoshiyuki Nagai , Toshiya Mikita
发明人： Yoshinobu Tateishi , Hiroaki Hori , Yoshiyuki Nagai , Toshiya Mikita
IPC分类号： G03G15/20
CPC分类号： G03G15/2025
摘要： A fixing apparatus that fuses and firmly adheres an unfixed developer onto a recording medium includes a heating roller and a pressure roller; a belt-shaped cleaning member that is disposed so as to abut on the heating roller and cleans the surface of the heating roller, the cleaning member being impregnated with oil in advance; a feed roller that sends out the cleaning member; a wind-up roller that winds up the cleaning member having cleaned the heating roller; a press-contact roller disposed so as to press the cleaning member against the heating roller on which the cleaning member abuts; and an oil absorbing layer that is disposed on an outer circumferential surface of the press-contact roller and absorbs oil exudation out of the cleaning member.
摘要翻译：将未固定的显影剂熔合并牢固地粘附到记录介质上的定影装置包括加热辊和加压辊; 一个带状清洁件，其设置成与加热辊相邻并且清洁加热辊的表面，该清洁件预先浸入油中; 送出辊子，送出清洁部件; 卷绕辊，其卷绕清洁了加热辊的清洁部件; 压接辊，其设置成将清洁构件压靠在清洁构件抵接的加热辊上; 以及吸油层，其设置在所述压接辊的外周面上并吸收从所述清洁部件排出的油。

8. 发明申请

US20090027647A1 EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD 审中-公开
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20090027647A1
公开(公告)日：2009-01-29
申请号：US12172298
申请日：2008-07-14
申请人： Yoshiyuki Nagai , Kazuhiro Takahashi , Akihiro Yamada
发明人： Yoshiyuki Nagai , Kazuhiro Takahashi , Akihiro Yamada
IPC分类号： G03B27/72
CPC分类号： G03F7/70983 , G03B27/72 , G03F7/70066 , G03F7/70083 , G03F7/70091 , G03F7/70558
摘要： The present invention provides an exposure apparatus comprising an illumination optical system configured to illuminate a reticle including a pellicle with light from a light source, a projection optical system configured to project a pattern of the reticle onto a substrate, an obtaining unit configured to obtain information on a thickness of the pellicle, an adjusting unit configured to adjust an illuminance on the substrate, and a control unit configured to control the adjusting unit based on the information on the thickness of the pellicle obtained by the obtaining unit.
摘要翻译：本发明提供一种曝光装置，包括：照明光学系统，被配置为利用来自光源的光照射包含防护薄膜的掩模版;投影光学系统，被配置为将掩模版的图案投影到基板上;获取单元，被配置为获得信息在所述防护薄膜组件的厚度上，调整单元，被配置为调节所述基板上的照度;以及控制单元，被配置为基于由所述获取单元获得的所述防护薄膜的厚度的信息来控制所述调节单元。

9. 发明申请

US20050077143A1 Board transferring apparatus and method, and component mounting apparatus 失效
标题翻译：板转移装置和方法以及部件安装装置
公开(公告)号：US20050077143A1
公开(公告)日：2005-04-14
申请号：US10960983
申请日：2004-10-12
申请人： Kurayasu Hamasaki , Makito Seno , Kunio Sakurai , Hiroshi Ota , Akiko Katsui , Yoshiyuki Nagai
发明人： Kurayasu Hamasaki , Makito Seno , Kunio Sakurai , Hiroshi Ota , Akiko Katsui , Yoshiyuki Nagai
IPC分类号： H05K13/00 , B65G15/64
CPC分类号： H05K13/0069 , Y10T29/4913 , Y10T29/53 , Y10T29/53174 , Y10T29/53178 , Y10T29/53187 , Y10T29/5337
摘要： The present invention has for its object to provide an apparatus and a method for transferring boards, and a component mounting apparatus whereby a production efficiency can be improved in accordance with types of boards to be produced. For accomplishing this object, there are arranged a shift device capable of moving a mounted board from a process-finished board transfer path to an unprocessed board transfer path, a controller for controlling this moving, and an identifying device. This arrangement enables switching of a method of transferring boards in accordance with types of boards to be produced, and controlling supply of boards to the component mounting apparatus, so that production efficiency is improved in accordance with types of boards.
摘要翻译：本发明的目的是提供一种用于传送板的装置和方法，以及一种部件安装装置，由此可以根据要生产的板的类型提高生产效率。为了实现该目的，布置了能够将安装的板从加工板传送路径移动到未处理的板传送路径的移位装置，用于控制该移动的控制器和识别装置。通过这种布置，能够根据要制造的板的种类切换传送板的方法，并且控制向部件安装装置的板的供给，从而根据板的种类提高生产效率。

10. 发明授权

US06705004B1 Method and apparatus for mounting electronic part 失效
标题翻译：安装电子部件的方法和装置
公开(公告)号：US06705004B1
公开(公告)日：2004-03-16
申请号：US09937915
申请日：2001-10-01
申请人： Koichi Yabuki , Yoshiyuki Nagai , Keiji Hanada
发明人： Koichi Yabuki , Yoshiyuki Nagai , Keiji Hanada
IPC分类号： H05K330
CPC分类号： H05K13/0452 , H05K13/0413 , H05K13/0815 , Y10T29/4913 , Y10T29/49133 , Y10T29/49144 , Y10T29/53087 , Y10T29/53178
摘要： During the process of transporting an electronic component (18) to a substrate (10) after a suction nozzle (7) has picked up the component (18), the component (18) being supplied from a component supply unit (1), the amount of offset of the component (18) with respect to the suction nozzle (7) is calculated. The feasibility of mounting the component (18) held by the suction nozzle (7) onto the substrate (10) without hindrance is determined from the amount of offset. If the result of the determination is positive, the component (18) is mounted onto the substrate (10).
摘要翻译：在吸嘴（7）拾起部件（18）之后将电子部件（18）运送到基板（10）的过程中，从部件供应单元（1）提供部件（18），计算组件（18）相对于吸嘴（7）的偏移量。根据偏移量确定将由吸嘴（7）保持的部件（18）无阻碍地安装到基板（10）上的可行性。如果确定结果为正，则将组件（18）安装到基板（10）上。

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