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    • 11. 发明授权
    • Ultra precision profile measuring method
    • 超精密轮廓测量方法
    • US07616324B2
    • 2009-11-10
    • US11992096
    • 2007-02-15
    • Kazuto YamauchiHidekazu Mimura
    • Kazuto YamauchiHidekazu Mimura
    • G01B11/02
    • G01B11/2441G01B9/02085G01B2290/60G01M11/005
    • To provide a method for measuring a plane mirror or a curved surface mirror close to plane mirror for condensing hard X-rays or soft X-rays used in a radiation light facility, especially an elliptical or tubular object having a steep profile exceeding 1×10−4 rad, ultra precisely with a precision on nano order or sub-nano order. Overall profile is measured by using overall profile data obtained from a Fizeau interferometer and stitching a plurality of micromeasurement data from a Michelson microinterferometer. A curved surface measured and a reference plane are measured simultaneously by the Fizeau interferometer, a plurality of pieces of partial profile data in a region narrower than the curved surface measured are acquired simultaneously by inclining the curved surface measured and the reference plane simultaneously and sequentially with respect to a reference plane, relative angle between the pieces of partial profile data is measured as the inclination angle of the reference plane, and adjoining pieces of partial profile data are stitched by utilizing coincidence between the inclination angle and an overlapped region thus obtaining overall profile data.
    • 提供一种用于测量靠近平面镜的平面镜或曲面镜的方法,用于冷凝在辐射光设备中使用的硬X射线或软X射线,特别是具有超过1×10 -4的陡峭轮廓的椭圆形或管状物体 rad,超精密,具有纳米级或亚纳米级的精度。 通过使用从Fizeau干涉仪获得的总体轮廓数据并拼接来自迈克尔逊微型干涉仪的多个测微数据来测量总体轮廓。 通过Fizeau干涉仪同时测量弯曲表面和参考平面,通过将测量的曲面和参考平面同时并顺序地倾斜并测量的曲面比通过测量的曲面更窄的区域中的多个部分轮廓数据被同时获取 测量部分轮廓数据之间的相对角度作为参考平面的倾斜角度,并且通过利用倾斜角度和重叠区域之间的一致来缝合相邻的部分轮廓数据片段,从而获得总体轮廓 数据。
    • 12. 发明申请
    • Ultra Precision Profile Measuring Method
    • 超精密轮廓测量方法
    • US20090135431A1
    • 2009-05-28
    • US11992096
    • 2007-02-15
    • Kazuto YamauchiHidekazu Mimura
    • Kazuto YamauchiHidekazu Mimura
    • G01B11/24
    • G01B11/2441G01B9/02085G01B2290/60G01M11/005
    • To provide a method for measuring a plane mirror or a curved surface mirror close to plane mirror for condensing hard X-rays or soft X-rays used in a radiation light facility, especially an elliptical or tubular object having a steep profile exceeding 1×10−4 rad, ultra precisely with a precision on nano order or sub-nano order. Overall profile is measured by using overall profile data obtained from a Fizeau interferometer and stitching a plurality of micromeasurement data from a Michelson microinterferometer. A curved surface measured and a reference plane are measured simultaneously by the Fizeau interferometer, a plurality of pieces of partial profile data in a region narrower than the curved surface measured are acquired simultaneously by inclining the curved surface measured and the reference plane simultaneously and sequentially with respect to a reference plane, relative angle between the pieces of partial profile data is measured as the inclination angle of the reference plane, and adjoining pieces of partial profile data are stitched by utilizing coincidence between the inclination angle and an overlapped region thus obtaining overall profile data.
    • 提供一种用于测量靠近平面镜的平面镜或曲面镜的方法,用于冷凝在辐射光设备中使用的硬X射线或软X射线,特别是具有超过1×10 -4的陡峭轮廓的椭圆形或管状物体 rad,超精密,具有纳米级或亚纳米级的精度。 通过使用从Fizeau干涉仪获得的总体轮廓数据并拼接来自迈克尔逊微型干涉仪的多个测微数据来测量总体轮廓。 通过Fizeau干涉仪同时测量弯曲表面和参考平面,通过将测量的曲面和参考平面同时并顺序地倾斜并测量的曲面比通过测量的曲面更窄的区域中的多个部分轮廓数据被同时获取 测量部分轮廓数据之间的相对角度作为参考平面的倾斜角度,并且通过利用倾斜角度和重叠区域之间的一致来缝合相邻的部分轮廓数据片段,从而获得总体轮廓 数据。
    • 13. 发明申请
    • EL LIGHT EMITTING TOUCH SWITCH
    • EL发光触摸开关
    • US20080265788A1
    • 2008-10-30
    • US12109143
    • 2008-04-24
    • Kazuto YAMAUCHIYasunori MURAYAMASadahiko TANAKAKeitaro TAKIZAWAKouichi YAMANOUE
    • Kazuto YAMAUCHIYasunori MURAYAMASadahiko TANAKAKeitaro TAKIZAWAKouichi YAMANOUE
    • G09G3/00
    • H03K17/962H03K2217/960795Y10S323/904
    • A touch switch is composed of an EL light emitting layer configured by stacking a fluorescent layer and an insulation layer between first electrodes and a second electrode, a judgment means for making a judgment on touch manipulation with the first electrode by an operator and an EL driving unit for driving the EL light emitting layer for light emitting, with each of a plurality of first electrodes, each of plurality of fluorescent layers and each of plurality of insulation layers being provided as a set and the second electrode being provided as a single electrode with respect to the plurality of first electrodes, wherein the judgment means makes a judgment on which of the plurality of first electrodes has been touched by an operator on the basis of a high-frequency component inputted from the second electrode through the first electrode each time the touch switch is touched by an operator.
    • 触摸开关由通过在第一电极和第二电极之间堆叠荧光层和绝缘层而构成的EL发光层构成,用于通过操作者判断与第一电极的触摸操作的判断装置和EL驱动 用于驱动用于发光的EL发光层的单元,其中多个第一电极中的每一个,多个荧光层中的每一个以及多个绝缘层中的每一个设置为一组,并且所述第二电极设置为单个电极, 相对于多个第一电极,其中判断装置基于从每个第一电极从第二电极输入的高频分量来判断操作者已经接触了多个第一电极中的哪一个, 触摸开关被操作者触摸。
    • 14. 发明申请
    • Catalyst-aided chemical processing method
    • 催化辅助化学处理方法
    • US20070238275A1
    • 2007-10-11
    • US11401315
    • 2006-04-11
    • Kazuto Yamauchi
    • Kazuto Yamauchi
    • H01L21/20
    • B81C1/00539Y10T428/31678Y10T442/20
    • A catalyst-aided chemical processing method is a novel processing method having a high processing efficiency and suited for processing in a space wavelength range of not less than several tens of μm. The catalyst-aided chemical processing method comprises: immersing a workpiece in a processing solution in which a halogen-containing molecule is dissolved, said workpiece normally being insoluble in said processing solution; and bringing a platinum, gold or ceramic solid catalyst close to or into contact with a processing surface of the workpiece, thereby processing the workpiece through dissolution in the processing solution of a halogenide produced by chemical reaction between a halogen radical generated at the surface of the catalyst and a surface atom of the workpiece.
    • 催化剂辅助化学处理方法是一种具有高处理效率并适于在不少于几十个微米的空间波长范围内加工的新型加工方法。 催化剂辅助化学处理方法包括:将工件浸入其中溶解有含卤素分子的处理溶液中,所述工件通常不溶于所述处理溶液; 并将铂,金或陶瓷固体催化剂与工件的加工表面接近或接触,从而通过溶解在通过在表面上产生的卤素自由基之间的化学反应产生的卤化物的处理溶液中来处理工件 催化剂和工件的表面原子。
    • 20. 发明授权
    • Polishing method, polishing apparatus and GaN wafer
    • 抛光方法,抛光装置和GaN晶圆
    • US09233449B2
    • 2016-01-12
    • US13138635
    • 2010-03-19
    • Yasuhisa SanoKazuto YamauchiJunji MurataShun SadakuniKeita Yagi
    • Yasuhisa SanoKazuto YamauchiJunji MurataShun SadakuniKeita Yagi
    • H01L21/461B24B37/005
    • B24B37/0056
    • A polishing method can process and flatten, in a practical processing time and with high surface accuracy, a surface of a substrate of a Ga element-containing compound semiconductor. The polishing method includes: bringing a Ga element-containing compound semiconductor substrate (16) into contact with a polishing tool (10) in the presence of a processing solution (14) comprising a neutral pH buffer solution containing Ga ions; irradiating a surface of the substrate with light or applying a bias potential to the substrate, or applying a bias potential to the substrate while irradiating the surface of the substrate with light, thereby forming Ga oxide (16a) on the surface of the substrate; and simultaneously moving the substrate and the polishing tool relative to each other to polish and remove the Ga oxide formed on the surface of the substrate.
    • 抛光方法可以在实际的处理时间和高表面精度处理和平坦化含Ga元素的化合物半导体的衬底的表面。 抛光方法包括:在包含含有Ga离子的中性pH缓冲溶液的处理溶液(14)的存在下,使含Ga元素的化合物半导体衬底(16)与抛光工具(10)接触; 用光照射衬底的表面或向衬底施加偏置电位,或者在用衬底照射衬底的表面的同时向衬底施加偏置电位,从而在衬底的表面上形成Ga氧化物(16a); 并且同时相对于彼此移动基板和抛光工具以抛光和去除形成在基板表面上的Ga氧化物。