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11. 发明授权

US08503054B2 Device for deflecting light beams 有权
标题翻译：用于偏转光束的装置
公开(公告)号：US08503054B2
公开(公告)日：2013-08-06
申请号：US12701717
申请日：2010-02-08
申请人： Christoph Friese
发明人： Christoph Friese
IPC分类号： G02B26/08
CPC分类号： G02B26/103 , H04N9/3129
摘要： A device for deflecting light beams is provided, which includes a swing-mounted light exit segment of an optical waveguide and a swing-mounted mirror. The device features a first rotation device that is set up to rotate the light exit segment of the optical waveguide, from which light is able to strike the mirror, in a rotational plane, and a second rotation device that is set up to rotate the mirror around a rotational axis situated in the mirror plane, which deviates from the vertical to the rotational plane.
摘要翻译：提供了用于偏转光束的装置，其包括光波导的摆动安装的光出射部分和摆动反射镜。该装置具有第一旋转装置，该第一旋转装置设置成旋转光学波导的光出射部分，光可以从该光出射部分在旋转平面内撞击反射镜;以及第二旋转装置，其设置成使反射镜旋转围绕位于镜面中的旋转轴线，其偏离垂直于旋转平面。

12. 发明授权

US09045331B2 Micromechanical component and method for producing a micromechanical component 有权
标题翻译：微机械部件及其制造方法
公开(公告)号：US09045331B2
公开(公告)日：2015-06-02
申请号：US13864623
申请日：2013-04-17
申请人： Heiko Nitsche , Stefan Pinter , Wolfram Schock , Joerg Muchow , Christoph Friese
发明人： Heiko Nitsche , Stefan Pinter , Wolfram Schock , Joerg Muchow , Christoph Friese
IPC分类号： B81B7/02 , B81C3/00 , G02B26/08 , B81B7/00
CPC分类号： B81B7/02 , B81B7/0006 , B81B2203/0163 , B81C3/008 , G02B26/085 , Y10T29/49826
摘要： A micromechanical component having a control element is described, which is connected via at least one supply line spring having a supply line spring constant to a mounting support in an adjustable manner, and a drive device having at least one actuator component situated on the control element. Via at least one line component guided over the at least one supply line spring an electric potential or a current signal is able to be provided to the actuator component in such a way that the control element is able to be set by the drive device into a motion with respect to the mounting support. The control element is additionally connected to the mounting support, and the supply line spring constant is less than vibratory spring constant. Also described is a method for producing a micromechanical component.
摘要翻译：描述了具有控制元件的微机械部件，其通过具有供应线弹簧常数的至少一个供应线弹簧以可调整的方式连接到驱动装置，驱动装置具有位于控制元件上的至少一个致动器部件。通过在至少一个供应线弹簧上引导的至少一个线路部件能够以这样的方式将电位或电流信号提供给致动器部件，使得控制元件能够被驱动装置设置成相对于安装支架的运动。控制元件另外连接到安装支撑件，并且供应线弹簧常数小于振动弹簧常数。还描述了一种用于制造微机械部件的方法。

13. 发明授权

US08687255B2 Method for manufacturing a micromechanical component, and micromechanical component 有权
标题翻译：微机械部件的制造方法以及微机电部件
公开(公告)号：US08687255B2
公开(公告)日：2014-04-01
申请号：US13057411
申请日：2009-07-06
申请人： Stefan Finkbeiner , Tjalf Pirk , Christoph Friese
发明人： Stefan Finkbeiner , Tjalf Pirk , Christoph Friese
IPC分类号： G02B26/08
CPC分类号： B81C1/00166 , B81B2201/033 , B81C2201/014
摘要： A method for manufacturing a micromechanical component is described, including the steps of: forming a first etch stop layer on a base substrate, the first etch stop layer being formed in such a way that it has a first pattern of through-cutouts; forming a first electrode-material layer on the first etch stop layer; forming a second etch stop layer on the first electrode-material layer, the second etch stop layer being formed in such a way that it has a second pattern of through-cutouts differing from the first pattern; forming a second electrode-material layer on the second etch stop layer; forming a patterned mask on the second electrode-material layer; and carrying out a first etching step in a first direction and a second etching step in a second direction counter to the first direction in order to etch at least one first electrode unit out of the first electrode-material layer and to etch at least one second electrode unit out of the second electrode-material layer. Also described are micromechanical components.
摘要翻译：描述了一种用于制造微机械部件的方法，包括以下步骤：在基底基板上形成第一蚀刻停止层，第一蚀刻停止层以这样的方式形成：其具有第一图形的通孔; 在所述第一蚀刻停止层上形成第一电极材料层; 在所述第一电极材料层上形成第二蚀刻停止层，所述第二蚀刻停止层以这样的方式形成：其具有不同于所述第一图案的通孔的第二图案; 在所述第二蚀刻停止层上形成第二电极材料层; 在所述第二电极材料层上形成图案化掩模; 并且在与第一方向相反的第二方向上沿第一方向和第二蚀刻步骤进行第一蚀刻步骤，以便从第一电极材料层中蚀刻至少一个第一电极单元并蚀刻至少一个第二电极单元排出第二电极材料层。还描述了微机械部件。

14. 发明授权

US08384975B2 Micromechanical assembly having a displaceable component 有权
标题翻译：具有可移位部件的微机械组件
公开(公告)号：US08384975B2
公开(公告)日：2013-02-26
申请号：US12893778
申请日：2010-09-29
申请人： Tjalf Pirk , Stefan Pinter , Joachim Fritz , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Joachim Fritz , Christoph Friese
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B3/0059 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/053 , H02N1/008
摘要： A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.
摘要翻译：具有固定地放置在所述安装件上的至少一个定子电极梳的安装的至少一个定子电极梳的微机械组件具有至少两个定子电极指，其中心纵向轴线位于所述定子电极梳的中心平面上，至少一个致动器电极梳具具有至少两个致动器电极指，以及可移位部件，其连接到所述至少一个致动器电极梳，使得所述可移位部件可使用非零工作电压至少在一个第一位移方向上相对于所述安装而移位，其施加在所述至少两个定子电极指和所述至少两个致动器电极指之间，所述第一位移方向具有垂直于所述中心平面的一个第一非零方向分量。

15. 发明申请

US20110254404A1 ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：静电驱动器，微机电部件和静电驱动器和微机电部件的制造方法
公开(公告)号：US20110254404A1
公开(公告)日：2011-10-20
申请号：US13124625
申请日：2009-08-24
申请人： Tjalf Pirk , Stefan Pinter , Michael Krueger , Joerg Muchow , Joachim Fritz , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Michael Krueger , Joerg Muchow , Joachim Fritz , Christoph Friese
IPC分类号： H02N1/00 , H05K13/04
CPC分类号： H02N1/006 , Y10T29/49002
摘要： An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described.
摘要翻译：描述了一种静电驱动器，其具有内框架，封闭内框架的至少一个中间框架和封闭内框架和至少一个中间框架的外框架，内框架和内框架的每个两个相邻框架，并且外框架通过至少一个弹簧元件彼此连接，弹簧元件，内框架，中间框架和外框架的每个两个相邻的框架彼此连接，以这样的方式设置：纵向方向弹簧元件位于公共纵向弹簧轴线上，并且电极指位于内框架，至少一个中间框架和外框架上的平行于纵向弹簧轴线的框架杆上。还描述了用于静电驱动的制造方法，微机械部件和用于微机械部件的制造方法。

16. 发明申请

US20110147862A1 MICROMECHANICAL COMPONENT HAVING AN INCLINED STRUCTURE AND CORRESPONDING MANUFACTURING METHOD 有权
标题翻译：具有一体化结构和对应制造方法的微型组件
公开(公告)号：US20110147862A1
公开(公告)日：2011-06-23
申请号：US12937093
申请日：2008-11-28
申请人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Herbert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Herbert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
IPC分类号： H01L29/84 , B23K11/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.
摘要翻译：在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。

17. 发明申请

US20100202032A1 Device for deflecting light beams 有权
标题翻译：用于偏转光束的装置
公开(公告)号：US20100202032A1
公开(公告)日：2010-08-12
申请号：US12701717
申请日：2010-02-08
申请人： Christoph FRIESE
发明人： Christoph FRIESE
IPC分类号： G02B26/08
CPC分类号： G02B26/103 , H04N9/3129
摘要： A device for deflecting light beams is provided, which includes a swing-mounted light exit segment of an optical waveguide and a swing-mounted mirror. The device features a first rotation device that is set up to rotate the light exit segment of the optical waveguide, from which light is able to strike the mirror, in a rotational plane, and a second rotation device that is set up to rotate the mirror around a rotational axis situated in the mirror plane, which deviates from the vertical to the rotational plane.
摘要翻译：提供了用于偏转光束的装置，其包括光波导的摆动安装的光出射部分和摆动反射镜。该装置具有第一旋转装置，该第一旋转装置设置成旋转光学波导的光出射部分，光可以从该光出射部分在旋转平面内撞击反射镜;以及第二旋转装置，其设置成使反射镜旋转围绕位于镜面中的旋转轴线，其偏离垂直于旋转平面。

18. 发明授权

US09791663B2 Magnetically drivable micromirror 有权
公开(公告)号：US09791663B2
公开(公告)日：2017-10-17
申请号：US13976301
申请日：2011-11-09
申请人： Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
发明人： Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
IPC分类号： G02B26/08 , G02B26/10 , G02B26/12 , G02B7/182
CPC分类号： G02B7/1821 , G02B26/085 , G02B26/101 , G02B26/105 , G02B26/12
摘要： A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.

19. 发明授权

US08896897B2 Micromechanical component and a method for operating a micromechanical component 有权
标题翻译：微机械部件和微机械部件的操作方法
公开(公告)号：US08896897B2
公开(公告)日：2014-11-25
申请号：US12998538
申请日：2009-09-16
申请人： Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
发明人： Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
IPC分类号： G02B26/08 , G02B27/01
CPC分类号： G02B26/0833 , G02B27/01 , Y10S359/90
摘要： A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.
摘要翻译：微机械部件具有光窗口; 相对于所述光窗可从第一位置调节到关于至少一个旋转轴线的至少一个第二位置的反射镜元件;光学传感器，具有被设计成确定所述检测表面上的光强度的检测表面，并且提供对应的传感器信号。光窗，第一位置的反射镜元件和检测表面彼此相对设置，使得在光窗上反射的光束的一部分至少部分地撞击检测表面; 以及评估单元，其被设计为基于传感器信号来定义关于镜元件的瞬时位置和/或偏转光束的瞬时强度的信息。

20. 发明授权

US08847336B2 Micromechanical component having an inclined structure and corresponding manufacturing method 有权
标题翻译：具有倾斜结构的微机械部件和相应的制造方法
公开(公告)号：US08847336B2
公开(公告)日：2014-09-30
申请号：US12937093
申请日：2008-11-28
申请人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
IPC分类号： H01L29/788 , B81C1/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.
摘要翻译：在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。

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