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    • 4. 发明授权
    • Micromechanical assembly having a displaceable component
    • 具有可移位部件的微机械组件
    • US08384975B2
    • 2013-02-26
    • US12893778
    • 2010-09-29
    • Tjalf PirkStefan PinterJoachim FritzChristoph Friese
    • Tjalf PirkStefan PinterJoachim FritzChristoph Friese
    • G02B26/08
    • G02B26/0841B81B3/0059B81B2201/033B81B2201/042B81B2203/0136B81B2203/053H02N1/008
    • A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.
    • 具有固定地放置在所述安装件上的至少一个定子电极梳的安装的至少一个定子电极梳的微机械组件具有至少两个定子电极指,其中心纵向轴线位于所述定子电极梳的中心平面上,至少一个致动器电极 梳具具有至少两个致动器电极指,以及可移位部件,其连接到所述至少一个致动器电极梳,使得所述可移位部件可使用非零工作电压至少在一个第一位移方向上相对于所述安装而移位, 其施加在所述至少两个定子电极指和所述至少两个致动器电极指之间,所述第一位移方向具有垂直于所述中心平面的一个第一非零方向分量。