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    • 115. 发明申请
    • VIBRATION GENERATOR, VIBRATION GENERATION DEVICE, AND ELECTRONIC EQUIPMENT AND COMMUNICATION DEVICE PROVIDED WITH VIBRATION GENERATION DEVICE
    • 振动发生器,振动发生装置以及提供有振动发生装置的电子设备和通信装置
    • US20130221799A1
    • 2013-08-29
    • US13881558
    • 2012-06-07
    • Hiroshi NakatsukaHiroki TakeuchiKeiji Onishi
    • Hiroshi NakatsukaHiroki TakeuchiKeiji Onishi
    • H02N1/00
    • H02N1/004
    • A vibration power generator including a first substrate; first electrodes disposed over one surface of the first substrate; a second substrate spaced from the first substrate and opposed to the one surface of the first substrate; and second electrodes disposed over one surface of the second substrate so as to be opposed to the first electrodes, wherein one of the first and second electrodes includes a film holding a charge; one of the first and second substrates is a vibratory substrate; and an overlapped area between the first and second electrodes becomes minimum and then maximum, or becomes maximum and minimum, and an electrostatic capacity Cp formed between the first and second electrodes when the overlapped area becomes maximum changes, and the change of Cp comprises an increase of Cp, while the vibratory substrate is displaced from the vibration center to the vibration end.
    • 一种振动发电机,包括:第一基板; 设置在第一基板的一个表面上的第一电极; 与所述第一基板间隔开并与所述第一基板的所述一个表面相对的第二基板; 以及第二电极,设置在所述第二基板的一个表面上以与所述第一电极相对,其中所述第一和第二电极中的一个包括保持电荷的膜; 第一和第二基板之一是振动基板; 并且第一和第二电极之间的重叠区域变得最小,然后最大,或变为最大和最小,并且当重叠区域变为最大时,在第一和第二电极之间形成的静电电容Cp改变,并且Cp的变化包括增加 的振动基板从振动中心移动到振动端。
    • 116. 发明申请
    • MEMS PRESSURE SENSOR
    • MEMS压力传感器
    • US20130047746A1
    • 2013-02-28
    • US13583379
    • 2012-04-02
    • Kunihiko NakamuraTomohiro IwasakiTakehiko YamakawaKeiji Onishi
    • Kunihiko NakamuraTomohiro IwasakiTakehiko YamakawaKeiji Onishi
    • G01L1/10
    • G01L9/0019H03H9/2463H03H2009/02488
    • A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
    • 包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108,其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构,用于根据外部施加的压力移动所述至少一个电极,以便改变所述间隙; 连接到检测电路,其检测从输入电极到输出电极的AC信号的传输特性,输入和输出电极是振动器102和至少一个电极108中的一个和另一个,并且检测到压力 基于由检测电路检测到的AC信号的传输特性。
    • 119. 发明授权
    • Frequency-variable acoustic thin film resonator, filter and communication apparatus using the same
    • 变频声波薄膜谐振器,滤波器及使用其的通信装置
    • US07986198B2
    • 2011-07-26
    • US12375313
    • 2007-08-01
    • Hiroshi NakatsukaTakehiko YamakawaKeiji Onishi
    • Hiroshi NakatsukaTakehiko YamakawaKeiji Onishi
    • H03H9/70H03H9/54H03H9/15
    • H03H9/564H03H9/132H03H9/542H03H9/585H03H9/587H03H9/605H03H2009/02204
    • An acoustic thin film resonator including: a first piezoelectric thin film 101; a pair of primary electrodes 103 and 104 for applying an electric signal, which are formed on the first piezoelectric thin film; a second piezoelectric thin film 102 that is disposed so that an oscillation generated in the first piezoelectric thin film propagates to the second piezoelectric thin film; a pair of secondary electrodes 104 and 105 for outputting an electric signal, which are formed on the second piezoelectric thin film; a load 108 that is connected between the secondary electrodes; and a control portion 109 that controls a value of the load. Thereby, an acoustic thin film resonator element is formed so that an electric signal inputted from the primary electrodes is outputted from the secondary electrodes by a piezoelectric effect, and a resonant frequency and an antiresonant frequency are made variable through the control of the value of the load. A resonant frequency and an antiresonant frequency are made variable at the same time without resonant characteristics being deteriorated.
    • 一种声学薄膜谐振器,包括:第一压电薄膜101; 形成在第一压电薄膜上的用于施加电信号的一对主电极103和104; 第二压电薄膜102被布置成使得在第一压电薄膜中产生的振荡传播到第二压电薄膜; 一对二次电极104和105,用于输出形成在第二压电薄膜上的电信号; 连接在次级电极之间的负载108; 以及控制负载值的控制部109。 由此,形成声学薄膜谐振器元件,使得从主电极输入的电信号通过压电效应从次级电极输出,并且通过控制第二电极的值,使谐振频率和反谐振频率变得可变 加载。 使共振频率和反谐振频率同时变化,而谐振特性不变。