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1. 发明申请

US20130047746A1 MEMS PRESSURE SENSOR 有权
标题翻译： MEMS压力传感器
公开(公告)号：US20130047746A1
公开(公告)日：2013-02-28
申请号：US13583379
申请日：2012-04-02
申请人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
发明人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
IPC分类号： G01L1/10
CPC分类号： G01L9/0019 , H03H9/2463 , H03H2009/02488
摘要： A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
摘要翻译：包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108，其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构，用于根据外部施加的压力移动所述至少一个电极，以便改变所述间隙; 连接到检测电路，其检测从输入电极到输出电极的AC信号的传输特性，输入和输出电极是振动器102和至少一个电极108中的一个和另一个，并且检测到压力基于由检测电路检测到的AC信号的传输特性。

2. 发明申请

US20130147567A1 OSCILLATOR 有权
标题翻译：振荡器
公开(公告)号：US20130147567A1
公开(公告)日：2013-06-13
申请号：US13702396
申请日：2012-06-08
申请人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
发明人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03L1/02 , H03L1/027 , H03L5/00 , H03L7/183
摘要： A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.
摘要翻译：具有包括MEMS谐振器和放大器的反馈型振荡电路的MEMS振荡器，可操作以控制施加到MEMS谐振器的振荡部件的偏置电压的电压控制单元和接收来自所述MEMS谐振器的输出的自动增益控制单元放大器，并且基于输出的电平，输出用于控制放大器对放大器的增益的幅度控制信号，使得放大器的输出电平达到预定电平，其中电压控制单元控制基于MEMS谐振器的工作温度施加到振荡构件的偏置电压，使得MEMS谐振器的峰值增益与工作温度无关地具有预定值，并且电压控制单元导出MEMS的工作温度谐振器通过监控振幅控制信号。

3. 发明授权

US08570112B2 Oscillator with MEMS resonator 有权
标题翻译：具有MEMS谐振器的振荡器
公开(公告)号：US08570112B2
公开(公告)日：2013-10-29
申请号：US13702396
申请日：2012-06-08
申请人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
发明人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03L1/02 , H03L1/027 , H03L5/00 , H03L7/183
摘要： A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.
摘要翻译：具有包括MEMS谐振器和放大器的反馈型振荡电路的MEMS振荡器，可操作以控制施加到MEMS谐振器的振荡部件的偏置电压的电压控制单元和接收来自所述MEMS谐振器的输出的自动增益控制单元放大器，并且基于输出的电平，输出用于控制放大器对放大器的增益的幅度控制信号，使得放大器的输出电平达到预定电平，其中电压控制单元控制基于MEMS谐振器的工作温度施加到振荡构件的偏置电压，使得MEMS谐振器的峰值增益与工作温度无关地具有预定值，并且电压控制单元导出MEMS的工作温度谐振器通过监控振幅控制信号。

4. 发明授权

US08698257B2 Resonator and production method thereof 有权
标题翻译：谐振器及其制作方法
公开(公告)号：US08698257B2
公开(公告)日：2014-04-15
申请号：US13377898
申请日：2010-06-30
申请人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H01L29/84
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译：提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

5. 发明授权

US08516905B2 MEMS pressure sensor 有权
标题翻译： MEMS压力传感器
公开(公告)号：US08516905B2
公开(公告)日：2013-08-27
申请号：US13583379
申请日：2012-04-02
申请人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
发明人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
IPC分类号： G01L1/10 , G01B7/16
CPC分类号： G01L9/0019 , H03H9/2463 , H03H2009/02488
摘要： A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
摘要翻译：包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108，其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构，用于根据外部施加的压力移动所述至少一个电极，以便改变所述间隙; 连接到检测电路，其检测从输入电极到输出电极的AC信号的传输特性，输入和输出电极是振动器102和至少一个电极108中的一个和另一个，并且检测到压力基于由检测电路检测到的AC信号的传输特性。

6. 发明申请

US20120091547A1 RESONATOR AND PRODUCTION METHOD THEREOF 有权
标题翻译：谐振器及其生产方法
公开(公告)号：US20120091547A1
公开(公告)日：2012-04-19
申请号：US13377898
申请日：2010-06-30
申请人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译：提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

7. 发明授权

US08525605B2 Oscillator 有权
标题翻译：振荡器
公开(公告)号：US08525605B2
公开(公告)日：2013-09-03
申请号：US13322263
申请日：2011-03-03
申请人： Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H03B5/30
CPC分类号： H03L5/00 , H03B19/00 , H03L1/026 , H03L1/027 , H03L7/18
摘要： A MEMS oscillator including: an oscillator unit being capable of outputting an output from an amplifier as an original oscillator signal that includes a feedback type oscillator circuit including a MEMS resonator and an amplifier, and an automatic gain controller receiving the output from the amplifier and controlling a gain of the amplifier based on a level of the output to maintain a level of the output from the amplifier constant; and a corrector unit that receives the original oscillator signal, that generates from the original oscillator signal a signal of a predetermined set frequency, and that outputs the generated signal of the predetermined set frequency as an output signal. The corrector unit receives, separately from the original oscillator signal, an information signal that includes a signal having a correspondence relationship between a gain at a resonance frequency of the MEMS resonator from the oscillator unit, corrects a frequency of the original oscillator signal based on the information signal to generate the signal of the predetermined set frequency, and outputs the generated signal of the predetermined set frequency as the output signal.
摘要翻译：一种MEMS振荡器，包括：振荡器单元，其能够输出来自放大器的输出作为原始振荡器信号，其包括包括MEMS谐振器和放大器的反馈型振荡器电路，以及接收来自放大器的输出的自动增益控制器基于输出电平的放大器的增益来保持放大器的输出电平恒定; 以及校正单元，其接收原始振荡器信号，其从原始振荡器信号产生预定设定频率的信号，并将预定设定频率的所生成的信号作为输出信号输出。校正单元与原始振荡器信号分离地接收包括具有来自振荡器单元的MEMS谐振器的谐振频率处的增益之间的对应关系的信号的信息信号，基于该振荡器信号校正原始振荡器信号的频率信号信号以产生预定设定频率的信号，并输出预定设定频率的产生信号作为输出信号。

8. 发明申请

US20120182077A1 OSCILLATOR 有权
标题翻译：振荡器
公开(公告)号：US20120182077A1
公开(公告)日：2012-07-19
申请号：US13322263
申请日：2011-03-03
申请人： Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H03L7/00
CPC分类号： H03L5/00 , H03B19/00 , H03L1/026 , H03L1/027 , H03L7/18
摘要： A MEMS oscillator including: an oscillator unit being capable of outputting an output from an amplifier as an original oscillator signal that includes a feedback type oscillator circuit including a MEMS resonator and an amplifier, and an automatic gain controller receiving the output from the amplifier and controlling a gain of the amplifier based on a level of the output to maintain a level of the output from the amplifier constant; and a corrector unit that receives the original oscillator signal, that generates from the original oscillator signal a signal of a predetermined set frequency, and that outputs the generated signal of the predetermined set frequency as an output signal. The corrector unit receives, separately from the original oscillator signal, an information signal that includes a signal having a correspondence relationship between a gain at a resonance frequency of the MEMS resonator from the oscillator unit, corrects a frequency of the original oscillator signal based on the information signal to generate the signal of the predetermined set frequency, and outputs the generated signal of the predetermined set frequency as the output signal.
摘要翻译：一种MEMS振荡器，包括：振荡器单元，其能够输出来自放大器的输出作为原始振荡器信号，其包括包括MEMS谐振器和放大器的反馈型振荡器电路，以及接收来自放大器的输出的自动增益控制器基于输出电平的放大器的增益来保持放大器的输出电平恒定; 以及校正单元，其接收原始振荡器信号，其从原始振荡器信号产生预定设定频率的信号，并将预定设定频率的所生成的信号作为输出信号输出。校正单元与原始振荡器信号分离地接收包括具有来自振荡器单元的MEMS谐振器的谐振频率处的增益之间的对应关系的信号的信息信号，基于该振荡器信号校正原始振荡器信号的频率信号信号以产生预定设定频率的信号，并输出预定设定频率的产生信号作为输出信号。

9. 发明申请

US20120075030A1 MEMS ELEMENT, AND MANUFACTURING METHOD OF MEMS ELEMENT 有权
标题翻译： MEMS元件和MEMS元件的制造方法
公开(公告)号：US20120075030A1
公开(公告)日：2012-03-29
申请号：US13322990
申请日：2011-02-24
申请人： Tomohiro Iwasaki , Keiji Onishi , Kunihiko Nakamura
发明人： Tomohiro Iwasaki , Keiji Onishi , Kunihiko Nakamura
IPC分类号： H03B5/30 , H01L21/306 , H02N1/00
CPC分类号： H03H9/1057 , B81B3/00 , B81B7/0077 , B81C1/00333 , B81C1/00476 , H03H3/0072 , H03H9/2405 , H03H9/2447
摘要： In a MEMS device having a substrate 1, a sealing membrane 7, and a movable portion 3 of beam and an electrode 5 which have a region wherein they overlap with a gap in perpendicular to a substrate 1 surface, a first cavity 9 is on the side of the movable portion 3 in the direction perpendicular to the surface of the substrate, and a second cavity is the other cavity, and an inner surface a of a side wall A in contact with the electrode 5, of the first cavity 9, is positioned more inside than an inner surface b of a side wall B in contact with the electrode 5, of the second cavity 10, in the direction parallel to the substrate surface, such that the movable portion 3 does not collide with the electrode 5 when mechanical stress is applied from outside to the sealing membrane 7.
摘要翻译：在具有基板1，密封膜7和梁的可动部分3以及具有与垂直于基板1表面的间隙重叠的区域的电极5的MEMS装置中，第一空腔9位于可动部3的与该基板的表面垂直的方向的一侧，第二空腔为另一个空腔，与第一空腔9的电极5接触的侧壁A的内表面a为定位在比与第二腔10的电极5接触的侧壁B的内表面b更靠内侧表面b的平行于基底表面的方向上，使得当机械的时候可动部分3不与电极5碰撞从外部向密封膜7施加应力。

10. 发明授权

US08742872B2 MEMS element, and manufacturing method of MEMS element 有权
标题翻译： MEMS元件和MEMS元件的制造方法
公开(公告)号：US08742872B2
公开(公告)日：2014-06-03
申请号：US13322990
申请日：2011-02-24
申请人： Tomohiro Iwasaki , Keiji Onishi , Kunihiko Nakamura
发明人： Tomohiro Iwasaki , Keiji Onishi , Kunihiko Nakamura
IPC分类号： H03H9/02 , H03H9/10 , H03B5/30 , H03H3/007 , H01L21/62 , H01L23/02 , H03H9/24 , B81B3/00 , B81B7/00 , B81C1/00
CPC分类号： H03H9/1057 , B81B3/00 , B81B7/0077 , B81C1/00333 , B81C1/00476 , H03H3/0072 , H03H9/2405 , H03H9/2447
摘要： In a MEMS device having a substrate 1, a sealing membrane 7, and a movable portion 3 of beam and an electrode 5 which have a region wherein they overlap with a gap in perpendicular to a substrate 1 surface, a first cavity 9 is on the side of the movable portion 3 in the direction perpendicular to the surface of the substrate, and a second cavity is the other cavity, and an inner surface a of a side wall A in contact with the electrode 5, of the first cavity 9, is positioned more inside than an inner surface b of a side wall B in contact with the electrode 5, of the second cavity 10, in the direction parallel to the substrate surface, such that the movable portion 3 does not collide with the electrode 5 when mechanical stress is applied from outside to the sealing membrane 7.
摘要翻译：在具有基板1，密封膜7和梁的可动部分3以及具有与垂直于基板1表面的间隙重叠的区域的电极5的MEMS装置中，第一空腔9位于可动部3的与该基板的表面垂直的方向的一侧，第二空腔为另一个空腔，与第一空腔9的电极5接触的侧壁A的内表面a为定位在比与第二腔10的电极5接触的侧壁B的内表面b更靠内侧表面b的平行于基底表面的方向上，使得当机械的时候可动部分3不与电极5碰撞从外部向密封膜7施加应力。

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