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    • 114. 发明授权
    • Apparatus for injecting constant quantitative chemicals and a method
thereof
    • 用于注射恒定定量化学品的装置及其方法
    • US06129098A
    • 2000-10-10
    • US139500
    • 1998-08-25
    • Nobuhiro MikiTakahisa NittaTadahiro OhmiNobukazu IkedaNaofumi Yasumoto
    • Nobuhiro MikiTakahisa NittaTadahiro OhmiNobukazu IkedaNaofumi Yasumoto
    • B01J4/02B01F3/08C02F1/68F04B13/00F04B53/14H01L21/00H01L21/304B08B3/02
    • H01L21/67051B01F15/00357B01F3/0865B01F3/088C02F1/686F04B13/00F04B53/141C02F2103/04
    • An apparatus for injecting constant quantitative chemicals which is capable of injecting a chemical solution into ultra pure water without generating particulate contamination, and furthermore, the injection interval of the chemical solution to the cleaning nozzle is controlled in units of seconds within a range of a few seconds to 10 or more seconds, and the switching of the type of chemical solution and the changeover to ultra pure water cleaning can be conducted in a short period of time of approximately 1 second.The apparatus includes a chemical solution injection system having a chemical solution retaining part for retaining the chemical solution, a control system for pressurization and depressurization for controlling the pressure of the chemical solution in the chemical solution retaining part at regular intervals, an injection control system which operates in concert with the control of the pressure of the chemical solution, and is structured so as to conduct the intermittent injection and instantaneous mixing function of the chemical solution from the chemical solution injection system to the ultra pure water flow path, and the injection stoppage function, and a chemical solution replenishment system which is structured so as to operate in concert with the control of the chemical solution and to be capable of replenishing the chemical solution in the chemical solution retaining part from a chemical solution source.
    • 一种用于注入恒定的定量化学品的装置,其能够将化学溶液注入超纯水中而不产生颗粒污染,此外,化学溶液到清洁喷嘴的注射间隔以几秒为单位进行控制 秒至10秒以上,化学溶液的种类和切换为超纯水清洗的时间可以在1秒钟的短时间内进行。 该装置包括具有用于保持化学溶液的化学溶液保留部分的化学溶液注入系统,用于加压和减压的控制系统,用于以规则的间隔控制化学溶液保留部分中的化学溶液的压力;注射控制系统, 与控制化学溶液的压力一致地进行操作,并且构成为将化学溶液从化学溶液注入系统到超纯水流路的间歇注入和瞬时混合功能进行,并且注射停止 功能和化学溶液补充系统,其结构化以便与化学溶液的控制协同工作,并且能够从化学溶液源补充化学溶液保留部分中的化学溶液。
    • 116. 发明授权
    • Fluid control system and valve to be used therein
    • 流体控制系统和阀门用于其中
    • US5850853A
    • 1998-12-22
    • US630081
    • 1996-04-09
    • Tadahiro OhmiMichio YamajiNobukazu IkedaHiroshi Morokoshi
    • Tadahiro OhmiMichio YamajiNobukazu IkedaHiroshi Morokoshi
    • B01J4/00C30B25/14C30B31/16F16K31/122F16K31/42
    • C23C16/45561B01J4/008C30B25/14C30B31/16F16K31/1226F16K31/42Y10T137/87684
    • A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).
    • 流体控制系统及其阀门组件用于精确地控制流体的供给(通过快速准确地操作(打开和关闭)阀门),用于制造半导体,磁性薄膜,生物技术产品和其他产品。 流体控制系统包括主控制线(L)和多个分支控制线(L1,L2 ...),用于将多种类型的流体(G1,G2 ...)馈送到耦合到 主控制线和并入分支控制线(L1,L2 ...)中的多个阀组件(V),用于切换供给到处理装置(C)中的流体(G1,G2 ...)。 每个阀组件(V)包括具有流体压力致动器(1)的流体驱动阀(V')和在基本上没有软管的单个壳体中一体地附接到流体驱动器的电磁阀(V“) 阀(V')将工作流体(A)输送到流体压力致动器(1)中。