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    • 5. 发明授权
    • Fluid control system and valve to be used therein
    • 流体控制系统和阀门用于其中
    • US5850853A
    • 1998-12-22
    • US630081
    • 1996-04-09
    • Tadahiro OhmiMichio YamajiNobukazu IkedaHiroshi Morokoshi
    • Tadahiro OhmiMichio YamajiNobukazu IkedaHiroshi Morokoshi
    • B01J4/00C30B25/14C30B31/16F16K31/122F16K31/42
    • C23C16/45561B01J4/008C30B25/14C30B31/16F16K31/1226F16K31/42Y10T137/87684
    • A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).
    • 流体控制系统及其阀门组件用于精确地控制流体的供给(通过快速准确地操作(打开和关闭)阀门),用于制造半导体,磁性薄膜,生物技术产品和其他产品。 流体控制系统包括主控制线(L)和多个分支控制线(L1,L2 ...),用于将多种类型的流体(G1,G2 ...)馈送到耦合到 主控制线和并入分支控制线(L1,L2 ...)中的多个阀组件(V),用于切换供给到处理装置(C)中的流体(G1,G2 ...)。 每个阀组件(V)包括具有流体压力致动器(1)的流体驱动阀(V')和在基本上没有软管的单个壳体中一体地附接到流体驱动器的电磁阀(V“) 阀(V')将工作流体(A)输送到流体压力致动器(1)中。