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1. 发明授权

US07553459B2 Apparatus and reactor for generating and feeding high purity moisture 有权
公开(公告)号：US07553459B2
公开(公告)日：2009-06-30
申请号：US11460087
申请日：2006-07-26
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J10/00 , B01J8/00 , C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

2. 发明授权

US07368092B2 Apparatus and reactor for generating and feeding high purity moisture 有权
标题翻译：用于产生和提供高纯度水分的装置和反应器
公开(公告)号：US07368092B2
公开(公告)日：2008-05-06
申请号：US10724101
申请日：2003-12-01
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J19/24 , B01J8/02 , C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
摘要翻译：一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

3. 发明申请

US20060292047A1 Apparatus and reactor for generating and feeding high purity moisture 有权
公开(公告)号：US20060292047A1
公开(公告)日：2006-12-28
申请号：US11460087
申请日：2006-07-26
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J8/02 , C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

4. 发明申请

US20070231225A1 APPARATUS AND REACTOR FOR GENERATING AND FEEDING HIGH PURITY MOISTURE 审中-公开
标题翻译：用于产生和输送高纯度水分的装置和反应器
公开(公告)号：US20070231225A1
公开(公告)日：2007-10-04
申请号：US11760330
申请日：2007-06-08
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J23/40
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
摘要翻译：一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

5. 发明授权

US07258845B2 Apparatus and reactor for generating and feeding high purity moisture 有权
标题翻译：用于产生和提供高纯度水分的装置和反应器
公开(公告)号：US07258845B2
公开(公告)日：2007-08-21
申请号：US09773605
申请日：2001-02-02
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J8/02 , C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
摘要翻译：一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

6. 发明授权

US07008598B2 Reactor for generating moisture 有权
标题翻译：反应器产生水分
公开(公告)号：US07008598B2
公开(公告)日：2006-03-07
申请号：US10884917
申请日：2004-07-07
申请人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
发明人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
IPC分类号： B01J8/02
CPC分类号： B01J12/007 , B01J2219/00058 , B01J2219/00087 , B01J2219/00096 , C01B5/00
摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor comprises: a reactor shell A with an interior space formed with a reactor structural component on the inlet side and a reactor structural component on the outlet side opposed to and united with each other by welding, the reactor structural component 1 on the inlet side provided with a gas feed port 1a and the reactor structural component 2 on the outlet side provided with a moisture gas take-out port 2a; a reflector on the inlet side facing the gas feed port in the interior space of the reactor; a reflector on the outlet side facing the moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on the inside wall of the reactor structural component on the outlet side, wherein hydrogen and oxygen fed into the interior space of the reactor through the gas feed port are brought into contact with the platinum coat 8b to activate the reactivity, thereby reacting hydrogen and oxygen into water in a non-combustion state.
摘要翻译：一种用于产生水分的反应器，其中更加完全地防止了氢气的点燃，气体供应源侧的反应，内部的铂涂层催化剂层的剥离，从而进一步提高了产生水分的反应器的安全性，减少内部空间以进一步减小反应器壳体的尺寸。反应器包括：反应器壳体A，内部空间形成有入口侧的反应器结构部件，出口侧的反应器结构部件通过焊接彼此相对并且彼此结合，反应器结构部件1在入口侧设置有气体供给口1a和在排气侧设置有湿气取出口2a的反应器结构部件2; 入口侧的反射器，其面对反应器内部空间中的气体供给口; 出口侧的反射器面向内部空间中的湿气取出口; 以及形成在出口侧的反应器结构部件的内壁上的铂涂层催化剂层8，其中通过气体供给口供给到反应器的内部空间中的氢和氧与铂涂层8b相接触，激活反应性，从而使氢和氧在非燃烧状态下反应成水。

7. 发明授权

US06919056B2 Reactor for generating moisture 有权
标题翻译：反应器产生水分
公开(公告)号：US06919056B2
公开(公告)日：2005-07-19
申请号：US09905209
申请日：2001-07-12
申请人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
发明人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
IPC分类号： B01J8/02 , B01J10/00 , B01J12/00 , C01B5/00
CPC分类号： B01J12/007 , B01J2219/00058 , B01J2219/00087 , B01J2219/00096 , C01B5/00
摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, and the peeling off of the platinum coat catalyst layer inside are all prevented more completely to further increase the safety of the reactor for generating moisture, and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor has a reactor shell A with an interior space; a reflector on an inlet side facing a gas feed port in the interior space of the reactor; a reflector on an outlet side facing a moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on an inside wall of a reactor structural component on the outlet side. Hydrogen and oxygen fed into the interior space of the reactor react without combustion.
摘要翻译：用于产生水分的反应器，其中充分点燃氢气，对气体供应源侧的回火以及铂涂层催化剂层内部的剥离都被更完全地防止，从而进一步提高了产生水分的反应器的安全性，并且其中减少内部空间中的死空间以进一步减小反应器壳体的尺寸。反应器具有内部空间的反应器壳体A; 在反应器的内部空间中的面向气体供给口的入口侧上的反射器; 出口侧的反射器，其面向内部空间中的湿气取出口; 以及形成在出口侧的反应器结构部件的内壁上的铂涂层催化剂层8。进入反应器内部空间的氢气和氧气反应而不燃烧。

8. 发明授权

US07815872B2 Reactor for generating moisture and moisture generating and feeding apparatus for which the reactor is employed 有权
标题翻译：用于产生使用反应器的水分和水分产生和进料装置的反应器
公开(公告)号：US07815872B2
公开(公告)日：2010-10-19
申请号：US11570667
申请日：2005-07-04
申请人： Toshirou Nariai , Kouji Kawada , Keiji Hirao , Yukio Minami , Akihiro Morimoto , Nobukazu Ikeda
发明人： Toshirou Nariai , Kouji Kawada , Keiji Hirao , Yukio Minami , Akihiro Morimoto , Nobukazu Ikeda
IPC分类号： B01J8/02 , C01B5/00
CPC分类号： B01J12/007 , B01J2219/00078 , B01J2219/00087 , B01J2219/00096 , B01J2219/00135 , C01B5/00 , F28D2021/0029 , F28F3/02 , H01L21/67017
摘要： A reactor for generating moisture, with which hydrogen and oxygen fed into the reactor contact with a platinum coating catalyst layer to activate reactivity so that hydrogen and oxygen react under conditions of non-combustion, wherein the reactor includes a cooler comprising a heat dissipation body substrate in which a heater insertion hole is made in the center to fix to the outer surface of the reactor structural component on the outlet side and a cooler on the outlet side made up of a plural number of heat dissipation bodies installed vertically in parallel on the part excluding the area where the afore-mentioned heater insertion hole of the heat dissipation body substrate exists, and a part of the heater to heat the reactor is inserted in the heater insertion hole so as to fix to the outer surface of the reactor structural component on the outlet side.
摘要翻译：一种用于产生水分的反应器，通过该反应器将进入反应器的氢气和氧气与铂涂层催化剂层接触以激活反应性，使氢气和氧气在非燃烧条件下反应，其中反应器包括一个包含散热体基体其中在中心处制造加热器插入孔以固定到出口侧的反应堆结构部件的外表面和出口侧的冷却器，该多个散热体垂直并排安装在部件上不包括存在散热体基板的上述加热器插入孔的区域，并且将加热器的加热器的一部分插入加热器插入孔中，以便将反应器结构部件的外表面固定在出口侧。

9. 发明申请

US20080241022A1 Reactor for Generating Moisture and Moisture Generating and Feeding Apparatus for Which the Reactor is Employed 有权
标题翻译：用于产生反应器所用的水分和水分发生和送料装置的反应器
公开(公告)号：US20080241022A1
公开(公告)日：2008-10-02
申请号：US11570667
申请日：2005-07-04
申请人： Toshirou Nariai , Kouji Kawada , Keiji Hirao , Yukio Minami , Akihiro Morimoto , Nobukazu Ikeda
发明人： Toshirou Nariai , Kouji Kawada , Keiji Hirao , Yukio Minami , Akihiro Morimoto , Nobukazu Ikeda
IPC分类号： B01J12/00
CPC分类号： B01J12/007 , B01J2219/00078 , B01J2219/00087 , B01J2219/00096 , B01J2219/00135 , C01B5/00 , F28D2021/0029 , F28F3/02 , H01L21/67017
摘要： A reactor for generating moisture, with which hydrogen and oxygen fed into the reactor contact with a platinum coating catalyst layer to activate reactivity so that hydrogen and oxygen react under conditions of non-combustion, wherein the reactor includes a cooler comprising a heat dissipation body substrate in which a heater insertion hole is made in the center to fix to the outer surface of the reactor structural component on the outlet side and a cooler on the outlet side made up of a plural number of heat dissipation bodies installed vertically in parallel on the part excluding the area where the afore-mentioned heater insertion hole of the heat dissipation body substrate exists, and a part of the heater to heat the reactor is inserted in the heater insertion hole so as to fix to the outer surface of the reactor structural component on the outlet side.
摘要翻译：一种用于产生水分的反应器，通过该反应器将进入反应器的氢气和氧气与铂涂层催化剂层接触以激活反应性，使氢气和氧气在非燃烧条件下反应，其中反应器包括一个包含散热体基体其中在中心处制造加热器插入孔以固定到出口侧的反应堆结构部件的外表面和出口侧的冷却器，该多个散热体垂直并排安装在部件上不包括存在散热体基板的上述加热器插入孔的区域，并且将加热器的加热器的一部分插入加热器插入孔中，以便将反应器结构部件的外表面固定在出口侧。

10. 发明授权

US06733732B2 Reactor for generating moisture 有权
标题翻译：反应器产生水分
公开(公告)号：US06733732B2
公开(公告)日：2004-05-11
申请号：US09783287
申请日：2001-02-15
申请人： Tadahiro Ohmi , Koji Kawada , Yoshikazu Tanabe , Takahisa Nitta , Nobukazu Ikeda , Akihiro Morimoto , Keiji Hirao , Hiroshi Morokoshi , Yukio Minami
发明人： Tadahiro Ohmi , Koji Kawada , Yoshikazu Tanabe , Takahisa Nitta , Nobukazu Ikeda , Akihiro Morimoto , Keiji Hirao , Hiroshi Morokoshi , Yukio Minami
IPC分类号： B01J802
CPC分类号： C01B5/00
摘要： A reactor comprising a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, having a gas-diffusing member provided in an internal space of the body, and having a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet are diffused by the gas-diffusing member and then come into contact with the platinum coating to enhance reactivity, thereby producing water. A temperature of the reactor is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.
摘要翻译：一种反应器，包括由耐热材料制成并具有用于水/湿气的入口和出口的本体，其具有设置在所述主体的内部空间中的气体扩散构件，并且在内壁表面上具有铂涂层的身体。从入口供给的氢气和氧气被气体扩散构件扩散，然后与铂涂层接触以提高反应性，从而产生水。反应器的温度保持在低于氢气或含氢气体的点火温度。反应器主体内壁上的铂涂层催化剂层是通过处理体内表面，清洁处理过的表面，在壁表面上形成氧化物或氮化物的非金属材料的阻挡涂层形成的，并在阻挡涂层上形成铂涂层。

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