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    • 91. 发明授权
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US07373806B2
    • 2008-05-20
    • US10925049
    • 2004-08-24
    • Itaru KitajimaKazutoshi WatanabeShigeru WakiyamaMasatoshi YasutakeAkira Inoue
    • Itaru KitajimaKazutoshi WatanabeShigeru WakiyamaMasatoshi YasutakeAkira Inoue
    • G01B5/28
    • G01Q10/065G01Q60/32
    • A scanning probe microscope has a probe tip for undergoing a scanning operation to scan a sample surface in X- and Y-directions parallel to the sample surface and for undergoing movement in a Z-direction vertical to the sample surface. A vibration unit vibrates the probe tip at a vibration frequency that resonates with of forcedly vibrates the probe tip. An observation unit collects observational data from the sample surface when the probe tip is in proximity or contact with the sample surface. A detection unit detects a variation in the state of vibration of the probe tip when the probe tip is in proximity or contact with the sample surface during a scanning operation. A control controls scanning of the probe tip in the X- and Y-directions and movement of the probe tip in the Z-direction, and controls scanning of the probe tip in a direction parallel to the sample surface after the observational data is collected from the sample surface and until the probe tip reached a next observation position in the X- and Y-direction. During a scanning operation, the control unit controls the probe tip to move in the Z-direction away from the sample surface only when the detection unit detects a variation in the state of vibration of the probe tip.
    • 扫描探针显微镜具有用于进行扫描操作的探针尖端,以在与样品表面平行的X和Y方向上扫描样品表面,并且在垂直于样品表面的Z方向上进行移动。 振动单元以与谐振的振动频率振动探针尖端,强制地振动探针尖端。 当探头尖端接近或与样品表面接触时,观察单元从样品表面收集观察数据。 检测单元在扫描操作期间当探针尖端接近或接触样品表面时检测探针尖端的振动状态的变化。 控制器控制探针尖端沿X方向和Y方向的扫描以及探针尖端沿Z方向的移动,并且在从观察数据收集之后控制探针尖端在与样品表面平行的方向上的扫描 样品表面,直到探针尖端到达X和Y方向的下一个观察位置。 在扫描操作期间,只有当检测单元检测到探针尖端的振动状态的变化时,控制单元才控制探针尖端沿Z方向移动离开样品表面。
    • 92. 发明申请
    • Optical Displacement Detection Mechanism and Surface Information Measurement Device Using the Same
    • 光学位移检测机构及其表面信息测量装置
    • US20080049236A1
    • 2008-02-28
    • US11841445
    • 2007-08-20
    • Masato IyokiHiroyoshi YamamotoKazutoshi WatanabeMasatsugu Shigeno
    • Masato IyokiHiroyoshi YamamotoKazutoshi WatanabeMasatsugu Shigeno
    • G01B11/14
    • G01B11/024G01Q20/02
    • There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.
    • 提供了一种光学位移检测机构,其中即使测量对象改变,检测灵敏度和噪声比可以调节,而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性, 可以使通过照射光将测量对象的热变形对测量对象的影响减小,并且可以在最佳条件下确保测量精度。 在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中,驱动光源的光源驱动电路,从光源照射到悬臂的光接收器,其接收光,从而检测强度 以及以预定的放大率放大光检测器的检测信号的放大器,通过提供光强度调节器和放大率调节器,对悬臂的照射光强度和放大率 可以使光电检测器变得可变。
    • 96. 发明申请
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US20050050947A1
    • 2005-03-10
    • US10925049
    • 2004-08-24
    • Itaru KitajimaKazutoshi WatanabeShigeru WakiyamaMasatoshi YasutakeAkira Inoue
    • Itaru KitajimaKazutoshi WatanabeShigeru WakiyamaMasatoshi YasutakeAkira Inoue
    • G01Q10/00G01Q10/02G01Q10/04G01Q10/06G01Q60/24G01Q60/32G01B5/28H01J3/14
    • G01Q10/065G01Q60/32
    • There are disclosed a scanning probe microscope and scanning method capable of reducing or avoiding damage due to collision between a probe tip and a sample, shortening the measuring time, improving the throughput and measuring accuracy, and collecting observational data such as topographic data about the sample surface without being affected by an adhesive water layer. The microscope has a vibration unit for vibrating the probe tip, an observation unit for collecting observational data when the tip is in proximity or contact with the sample surface, a detector for detecting a variation in the state of vibration of the tip when it is in proximity or contact with the sample surface, and a control unit for controlling movement of the tip in X- and Y-directions parallel to the sample surface and in a Z-direction vertical to the sample surface. After collecting the observational data, the control unit scans the tip in a direction parallel to the sample surface until a next observation position in the X- or Y-direction is reached. During the scanning, if a variation in the state of vibration of the tip is detected, the control unit moves the tip in the Z-direction away from the sample surface.
    • 公开了一种扫描探针显微镜和扫描方法,其能够减少或避免由于探针尖端和样品之间的碰撞而引起的损伤,缩短测量时间,提高吞吐量和测量精度,并且收集观测数据,例如样品的地形数据 表面不受粘合剂水层的影响。 显微镜具有用于使探针尖端振动的振动单元,用于当尖端接近样品表面时收集观察数据的观察单元,用于检测尖端在其中处于振动状态时的变化的检测器 与样品表面接近或接触;以及控制单元,用于控制尖端在平行于样品表面的X和Y方向以及垂直于样品表面的Z方向上的移动。 在收集观察数据之后,控制单元沿与样品表面平行的方向扫描尖端,直到到达X或Y方向的下一个观察位置。 在扫描期间,如果检测到尖端的振动状态的变化,则控制单元将尖端沿Z方向移动离开样品表面。
    • 98. 发明授权
    • Foldable keyboard input device
    • 可折叠键盘输入设备
    • US06714403B2
    • 2004-03-30
    • US10054218
    • 2001-11-13
    • Shigeru FurukiKazutoshi WatanabeTakahiro Kawauchi
    • Shigeru FurukiKazutoshi WatanabeTakahiro Kawauchi
    • G06F116
    • H01H13/70G06F3/0221H01H2223/05H01H2223/052
    • An object of the present invention is to provide a keyboard input device that has a key arrangement similar as an ordinary keyboard, and that can securely protects key tops when folding. The present invention is characterized as follows. A keyboard unit is divided into a first keyboard unit and a second keyboard unit so as to be foldable, the first keyboard unit is pivotably supported by the second keyboard unit so as to pivot about a position slightly inside from an end of a coupling side of the second keyboard unit, a cover for covering an area from the end of the coupling side of the second keyboard unit when the first keyboard unit and the second keyboard unit are superimposed is slidably attached to the first keyboard unit, and an end plate for covering the end of the coupling side of the second keyboard unit and the first keyboard unit when the first keyboard unit and the second keyboard unit are superimposed is pivotably coupled between the cover and the second keyboard unit.
    • 本发明的目的是提供一种键盘输入装置,其具有与普通键盘类似的键装置,并且可以在折叠时可靠地保护键顶。 本发明的特征如下。 键盘单元被分成第一键盘单元和第二键盘单元以便可折叠,第一键盘单元由第二键盘单元可枢转地支撑,以便从位于第一键盘单元和第二键盘单元的耦合侧的端部稍微内侧的位置枢转 第二键盘单元,当第一键盘单元和第二键盘单元重叠时,用于覆盖从第二键盘单元的耦合侧的端部的区域的盖子可滑动地附接到第一键盘单元,以及用于覆盖的端板 当第一键盘单元和第二键盘单元重叠时,第二键盘单元和第一键盘单元的耦合侧的端部可枢转地联接在盖和第二键盘单元之间。
    • 100. 发明授权
    • Drying apparatus and drying method
    • 干燥装置和干燥方法
    • US06412501B1
    • 2002-07-02
    • US09527840
    • 2000-03-17
    • Hajime OnodaKazutoshi WatanabeHiroki Takahashi
    • Hajime OnodaKazutoshi WatanabeHiroki Takahashi
    • B08B310
    • H01L21/67034Y10S134/902
    • A drying apparatus comprises a drying vessel, a treatment liquid feeder-discharger for feeding pure water into the drying vessel, a vapor supplier for supplying an organic solvent vapor to the space over the pure water, inert gas suppliers for supplying an inert gas with which the organic solvent vapor is diluted, and a heated organic solvent supplier for forming a film of the organic solvent on a liquid level of the pure water. After the wafer is immersed in the pure water, the pure water is gradually discharged from the drying vessel by means of the treatment liquid feeder-discharger. Since the wafer passes through the organic solvent film as it is exposed above the liquid level, the organic solvent of the film adheres to the surface of the wafer, and the organic solvent vapor is condensed on the surface of the wafer that is exposed above the liquid level.
    • 干燥装置包括:干燥容器,用于将纯水供给到干燥容器中的处理液供给器排出器,用于向纯水供应有机溶剂蒸气的蒸气供给装置,用于供给惰性气体的惰性气体供给装置, 稀释有机溶剂蒸气,以及加热的有机溶剂供应器,用于在纯水的液面上形成有机溶剂的膜。 将晶片浸入纯水中后,通过处理液供给器 - 放电器将纯水从干燥容器逐渐排出。 由于晶片在液面以上暴露时通过有机溶剂膜,因此膜的有机溶剂附着于晶片的表面,有机溶剂蒸气在露出于晶片上方的晶片的表面上会聚 液位。