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    • 1. 发明授权
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US07373806B2
    • 2008-05-20
    • US10925049
    • 2004-08-24
    • Itaru KitajimaKazutoshi WatanabeShigeru WakiyamaMasatoshi YasutakeAkira Inoue
    • Itaru KitajimaKazutoshi WatanabeShigeru WakiyamaMasatoshi YasutakeAkira Inoue
    • G01B5/28
    • G01Q10/065G01Q60/32
    • A scanning probe microscope has a probe tip for undergoing a scanning operation to scan a sample surface in X- and Y-directions parallel to the sample surface and for undergoing movement in a Z-direction vertical to the sample surface. A vibration unit vibrates the probe tip at a vibration frequency that resonates with of forcedly vibrates the probe tip. An observation unit collects observational data from the sample surface when the probe tip is in proximity or contact with the sample surface. A detection unit detects a variation in the state of vibration of the probe tip when the probe tip is in proximity or contact with the sample surface during a scanning operation. A control controls scanning of the probe tip in the X- and Y-directions and movement of the probe tip in the Z-direction, and controls scanning of the probe tip in a direction parallel to the sample surface after the observational data is collected from the sample surface and until the probe tip reached a next observation position in the X- and Y-direction. During a scanning operation, the control unit controls the probe tip to move in the Z-direction away from the sample surface only when the detection unit detects a variation in the state of vibration of the probe tip.
    • 扫描探针显微镜具有用于进行扫描操作的探针尖端,以在与样品表面平行的X和Y方向上扫描样品表面,并且在垂直于样品表面的Z方向上进行移动。 振动单元以与谐振的振动频率振动探针尖端,强制地振动探针尖端。 当探头尖端接近或与样品表面接触时,观察单元从样品表面收集观察数据。 检测单元在扫描操作期间当探针尖端接近或接触样品表面时检测探针尖端的振动状态的变化。 控制器控制探针尖端沿X方向和Y方向的扫描以及探针尖端沿Z方向的移动,并且在从观察数据收集之后控制探针尖端在与样品表面平行的方向上的扫描 样品表面,直到探针尖端到达X和Y方向的下一个观察位置。 在扫描操作期间,只有当检测单元检测到探针尖端的振动状态的变化时,控制单元才控制探针尖端沿Z方向移动离开样品表面。
    • 2. 发明申请
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US20050050947A1
    • 2005-03-10
    • US10925049
    • 2004-08-24
    • Itaru KitajimaKazutoshi WatanabeShigeru WakiyamaMasatoshi YasutakeAkira Inoue
    • Itaru KitajimaKazutoshi WatanabeShigeru WakiyamaMasatoshi YasutakeAkira Inoue
    • G01Q10/00G01Q10/02G01Q10/04G01Q10/06G01Q60/24G01Q60/32G01B5/28H01J3/14
    • G01Q10/065G01Q60/32
    • There are disclosed a scanning probe microscope and scanning method capable of reducing or avoiding damage due to collision between a probe tip and a sample, shortening the measuring time, improving the throughput and measuring accuracy, and collecting observational data such as topographic data about the sample surface without being affected by an adhesive water layer. The microscope has a vibration unit for vibrating the probe tip, an observation unit for collecting observational data when the tip is in proximity or contact with the sample surface, a detector for detecting a variation in the state of vibration of the tip when it is in proximity or contact with the sample surface, and a control unit for controlling movement of the tip in X- and Y-directions parallel to the sample surface and in a Z-direction vertical to the sample surface. After collecting the observational data, the control unit scans the tip in a direction parallel to the sample surface until a next observation position in the X- or Y-direction is reached. During the scanning, if a variation in the state of vibration of the tip is detected, the control unit moves the tip in the Z-direction away from the sample surface.
    • 公开了一种扫描探针显微镜和扫描方法,其能够减少或避免由于探针尖端和样品之间的碰撞而引起的损伤,缩短测量时间,提高吞吐量和测量精度,并且收集观测数据,例如样品的地形数据 表面不受粘合剂水层的影响。 显微镜具有用于使探针尖端振动的振动单元,用于当尖端接近样品表面时收集观察数据的观察单元,用于检测尖端在其中处于振动状态时的变化的检测器 与样品表面接近或接触;以及控制单元,用于控制尖端在平行于样品表面的X和Y方向以及垂直于样品表面的Z方向上的移动。 在收集观察数据之后,控制单元沿与样品表面平行的方向扫描尖端,直到到达X或Y方向的下一个观察位置。 在扫描期间,如果检测到尖端的振动状态的变化,则控制单元将尖端沿Z方向移动离开样品表面。
    • 3. 发明授权
    • Sampling scanning probe microscope and sampling method thereof
    • 采样扫描探针显微镜及其取样方法
    • US6094972A
    • 2000-08-01
    • US123146
    • 1998-07-27
    • Masatoshi YasutakeAkira InoueFumiki SakaiKazutoshi WatanabeTatsuya Miyatani
    • Masatoshi YasutakeAkira InoueFumiki SakaiKazutoshi WatanabeTatsuya Miyatani
    • G01B21/30G01B5/00G01B7/34G01N37/00G01Q30/04G01Q60/24G01Q60/34G01B5/28
    • G01Q10/06B82Y35/00G01Q30/04G01Q60/32Y10S977/851
    • An xy scanning unit produces a scanning signal along an x-direction and a scanning signal along a y-direction, which are determined by a contour of a sample to be monitored, scanning time of the x-direction, and a pixel number of the x-direction, supplied from a CPU. Then, the xy scanning unit outputs these scanning signals along the x-direction and the y-direction to a piezoelectric scanning apparatus. On the other hand, a second oscillator outputs a sine wave signal having a frequency determined by the scanning time of the x-direction and the pixel number of the x-direction to a second piezoelectric plate. A sample/hold circuit holds observation data of a probe at such timing after preselected time has passed since the output of the second oscillator becomes maximum, and then outputs the held observation data to a differential amplifier and a P.I control system. An output signal Q of the P.I control system is applied to a z-fine-moving electrode of the piezoelectric scanning apparatus, and also is converted into a digital signal by an A/D converter. This digital signal is stored into a memory in a sampling manner.
    • xy扫描单元产生沿着x方向的扫描信号和沿着y方向的扫描信号,其由待监视的样本的轮廓,x方向的扫描时间和x方向的像素数确定 x方向,由CPU提供。 然后,xy扫描单元将这些扫描信号沿x方向和y方向输出到压电扫描装置。 另一方面,第二振荡器输出具有由x方向的扫描时间和x方向的像素数确定的频率的正弦波信号到第二压电板。 采样/保持电路在从第二振荡器的输出变为最大之后经过预选时间之后的这样的定时保持探测器的观测数据,然后将保持的观测数据输出到差分放大器和P.I控制系统。 P.I控制系统的输出信号Q被施加到压电扫描装置的z-微细电极上,并且还通过A / D转换器转换成数字信号。 该数字信号以采样方式存储到存储器中。
    • 5. 发明授权
    • Information presentation system and in-vehicle apparatus
    • 信息呈现系统和车载设备
    • US09037345B2
    • 2015-05-19
    • US14001070
    • 2012-03-08
    • Akira Inoue
    • Akira Inoue
    • G06F3/14H04M1/725
    • G06F3/1423H04M1/7253H04M1/72577
    • A mobile terminal displays a screen image provided by an image data which is produced. An in-vehicle apparatus is fixed to a vehicle or is mounted on the vehicle to be portable. The mobile terminal sends the image data to the in-vehicle apparatus through communication such that a vehicle display portion of the in-vehicle apparatus displays a screen image provided by the image data. In a case where a communication between the in-vehicle apparatus and the mobile terminal is established, when one of the mobile terminal or the in-vehicle apparatus, in which an input operation has been performed prior to the other of the mobile terminal or the in-vehicle apparatus, is in operation, only the one of the mobile terminal or the in-vehicle apparatus is operable.
    • 移动终端显示由所生成的图像数据提供的屏幕图像。 车载设备固定在车辆上或安装在车辆上以便携带。 移动终端通过通信将图像数据发送到车载设备,使得车载设备的车辆显示部分显示由图像数据提供的屏幕图像。 在建立车载设备与移动终端之间的通信的情况下,当移动终端或车载设备中的一个在移动终端或另一个移动终端之前进行了输入操作时 车载设备正在操作中,只有移动终端或车载设备中的一个可操作。
    • 10. 发明申请
    • NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT AND MANUFACTURING METHOD THEREFOR
    • 氮化物半导体发光元件及其制造方法
    • US20130214288A1
    • 2013-08-22
    • US13880027
    • 2012-05-02
    • Toshiya YokogawaJunko IwanagaAkira Inoue
    • Toshiya YokogawaJunko IwanagaAkira Inoue
    • H01L33/32
    • H01L33/32H01L33/02H01L33/16
    • A nitride-based semiconductor light-emitting device of an embodiment includes a semiconductor multilayer structure having a growing plane which is an m-plane and being made of a GaN-based semiconductor. The semiconductor multilayer structure includes a n-type semiconductor layer, a p-type semiconductor layer, a p-side electrode provided on the p-type semiconductor layer, and an active layer interposed between the n-type semiconductor layer and the p-type semiconductor layer. The ratio of the thickness of the active layer to the thickness of the n-type semiconductor layer, D, is in the range of 1.8×10−4≦D≦14.1×10−4. The area of the p-side electrode, S, is in the range of 1×102 μm2≦S≦9×104 μm2. A maximum current density which leads to 88% of a maximum of the external quantum efficiency is not less than 2 A/mm2.
    • 实施方式的氮化物系半导体发光元件具有半导体层叠结构,该半导体层叠结构具有作为m面的生长面并由GaN系半导体构成。 半导体多层结构包括n型半导体层,p型半导体层,设置在p型半导体层上的p侧电极以及介于n型半导体层和p型半导体层之间的有源层 半导体层。 有源层的厚度与n型半导体层的厚度D之比在1.8×10 -4 @ D @ 14.1×10 -4的范围内。 p侧电极S的面积在1×102mum2 @ S @ 9×104mum2的范围内。 导致外部量子效率最大值的88%的最大电流密度不小于2A / mm2。