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1. 发明授权

US06596992B2 Method of operating scanning probe microscope 有权
标题翻译：扫描探针显微镜的操作方法
公开(公告)号：US06596992B2
公开(公告)日：2003-07-22
申请号：US10017123
申请日：2001-12-14
申请人： Kazunori Ando , Kazutoshi Watanabe , Yoshiteru Shikakura , Masaki Tsuchihashi , Takehiro Yamaoka
发明人： Kazunori Ando , Kazutoshi Watanabe , Yoshiteru Shikakura , Masaki Tsuchihashi , Takehiro Yamaoka
IPC分类号： G21K700
CPC分类号： G01Q60/32 , G01Q10/06 , G01Q20/02 , Y10S977/851
摘要： In the first operation, the cantilever is oscillated at a frequency which is at opposite sides of a frequency band having a half value of an oscillation frequency f and amplitude A on a dependent curve (Q-curve). The cantilever oscillating frequency is far from an oscillation frequency (near a resonance point) where the cantilever is slow to damp, which enables the cantilever to quickly damp in accordance with a variation of a transient oscillation frequency after the probe comes into contact with the specimen, and allows the probe to follow the uneven surface state of the specimen.
摘要翻译：在第一操作中，悬臂以相对曲线（Q曲线）上具有振荡频率f的一半值和振幅A的频带的相反侧的频率振荡。悬臂振荡频率远离振动频率（接近谐振点），其中悬臂缓慢减震，这使得悬臂能够在探头与试样接触后根据瞬态振荡频率的变化迅速衰减，并且允许探针跟随样本的不平坦表面状态。

2. 发明授权

US06941798B2 Scanning probe microscope and operation method 有权
标题翻译：扫描探针显微镜及操作方法
公开(公告)号：US06941798B2
公开(公告)日：2005-09-13
申请号：US10663302
申请日：2003-09-16
申请人： Takehiro Yamaoka , Kazutoshi Watanabe , Kazunori Ando , Yoshiharu Shirakawabe
发明人： Takehiro Yamaoka , Kazutoshi Watanabe , Kazunori Ando , Yoshiharu Shirakawabe
IPC分类号： G01Q10/02 , G01Q10/06 , G01Q60/24 , G01Q60/50 , G01Q90/00 , G01N13/10 , G01B5/28 , G01N13/16 , G12B21/24
CPC分类号： G01Q70/04 , G01Q10/065 , Y10S977/85
摘要： A scanning probe is microscope has a cantilever having a probe at a disal end thereof and an oscillator for generating a resonance signal near a resonance of the cantilever. A vibrating device receives the resonance signal as a driving signal for vibrating the cantilever. A variable gain amplifier adjusts a gain of displacement signal corresponding to displacement of the vibrating cantilever so as to satisfy the equation G=(A/A0)*G0 to control a quality factor value of the cantilever resonance to an optimal quality factor value, where G represents a gain value of the variable gain amplifer, A represents a preselected oscillation amplitude of the oscillator, A0 represents an initial oscillation amplitude of the oscillator, and G0 represents a gain value of the variable gain amplifier when the initial oscillation amplitude of the oscillator is A0.
摘要翻译：扫描探针是显微镜，具有在其末端具有探针的悬臂和用于在悬臂共振附近产生共振信号的振荡器。振动装置接收谐振信号作为振动悬臂的驱动信号。可变增益放大器调整与振动悬臂的位移相对应的位移信号的增益，以满足等式G =（A / A 0 ）* G 0 < 悬臂共振的质量因子值到最优质量因子值，其中G表示可变增益放大器的增益值，A表示振荡器的预选振荡幅度，A <0>表示初始振荡当振荡器的初始振荡幅度为A <0> 0时，振荡器的振幅和G 0 <0>表示可变增益放大器的增益值。

3. 发明授权

US07997124B2 Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：US07997124B2
公开(公告)日：2011-08-16
申请号：US11879878
申请日：2007-07-19
申请人： Yoshiteru Shikakura , Kazutoshi Watanabe
发明人： Yoshiteru Shikakura , Kazutoshi Watanabe
IPC分类号： G01B5/28
CPC分类号： G01Q30/04 , G01Q10/065
摘要： A scanning probe microscope has a cantilever mounted to undergo oscillation movement over a surface of a sample. The cantilever has a probe on a distal end thereof. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant an oscillation amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or the sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism. A driving range setting device optionally sets the driving range of the Z-axis driving mechanism.
摘要翻译：扫描探针显微镜具有悬臂安装以在样品的表面上经历振荡运动。悬臂在其远端具有探针。 Z轴控制量计算机构计算用于保持悬臂的振荡量恒定的控制量。 Z轴驱动机构根据来自Z轴控制量计算机构的控制量沿Z方向驱动悬臂或样本。驱动范围限制装置限制了Z轴驱动机构的驱动范围。驱动范围设定装置可选地设定Z轴驱动机构的驱动范围。

4. 发明授权

US07442925B2 Working method using scanning probe 有权
标题翻译：使用扫描探头的工作方法
公开(公告)号：US07442925B2
公开(公告)日：2008-10-28
申请号：US11370006
申请日：2006-03-04
申请人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
发明人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
IPC分类号： G01N13/16
CPC分类号： G01N23/225 , G01Q60/34
摘要： The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.
摘要翻译：本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。

5. 发明申请

US20050199046A1 Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：US20050199046A1
公开(公告)日：2005-09-15
申请号：US11076250
申请日：2005-03-09
申请人： Yoshiteru Shikakura , Kazutoshi Watanabe
发明人： Yoshiteru Shikakura , Kazutoshi Watanabe
IPC分类号： G01B21/30 , G01B5/28 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q60/24
CPC分类号： G01Q30/04 , G01Q10/065
摘要： A scanning probe microscope is capable of not only avoiding contact between a sample and a probe but also capable of shortening the time from detection of the sample during scanning by the probe to raising the probe to the top surface of the sample. A Z-axis controlling amount calculating mechanism controls a displacement amount of a cantilever or an oscillation amount in oscillating the cantilever so as to be constant, and a Z-axis driving mechanism drives in a Z direction the cantilever or a sample based on the controlling signal from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism, and a driving range setting device optionally sets the driving range so that the probe is lowered to a set position even in an area with no sample.
摘要翻译：扫描探针显微镜不仅可以避免样品和探针之间的接触，而且能够缩短探针扫描期间检测样品的时间，从而将探针升高到样品的顶部表面。 Z轴控制量计算机构控制悬臂的摆动量或使悬臂摆动的摆动量恒定，Z轴驱动机构在Z方向驱动基于控制的悬臂或样本来自Z轴控制量计算机构的信号。驱动范围限制装置限制Z轴驱动机构的驱动范围，并且驱动范围设定装置可选地设定驱动范围，使得即使在没有样品的区域中探针也降低到设定位置。

6. 发明申请

US20070278177A1 Processing method using atomic force microscope microfabrication device 审中-公开
标题翻译：使用原子力显微镜微加工装置的加工方法
公开(公告)号：US20070278177A1
公开(公告)日：2007-12-06
申请号：US11809518
申请日：2007-06-01
申请人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
发明人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68
CPC分类号： C03C19/00 , B82Y10/00 , G01Q80/00
摘要： Under the condition that the height is fixed at a target height by turning off a feedback control system of a Z piezoelectric actuator of a cantilever of an atomic force microscope having a probe, which is harder than a processed material, flexure and twisting of the cantilever when carrying out mechanical processing while selectively repeating scanning only on the processed area (in the case of detecting flexure, parallel with the cantilever and in the case of detecting twisting, vertical with the cantilever) is monitored by a quadrant photodiode position sensing detector and the processing is repeated till a flexure amount or a twisting amount, namely, till an elastic deformation amount of the cantilever becomes not more than a determined threshold. It is not necessary to carry out scanning of the observation in obtaining the height information for detection of an end point, so that it is possible to improve a throughput of processing.
摘要翻译：通过关闭具有探针的原子力显微镜的悬臂的Z型压电致动器的反馈控制系统，该高度被固定在目标高度的条件下，其比加工材料更硬，悬臂的弯曲和扭曲当在被处理区域（在检测弯曲的情况下，与悬臂平行的情况下，并且在检测到扭转的情况下，与悬臂垂直的情况下）进行机械处理时，通过象限光电二极管位置感测检测器监视重复加工直到挠曲量或扭转量，即直到悬臂的弹性变形量变得不大于确定的阈值。在获得用于检测终点的高度信息时，不需要进行观察的扫描，从而可以提高处理的吞吐量。

7. 发明授权

US07284415B2 Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：US07284415B2
公开(公告)日：2007-10-23
申请号：US11076250
申请日：2005-03-09
申请人： Yoshiteru Shikakura , Kazutoshi Watanabe
发明人： Yoshiteru Shikakura , Kazutoshi Watanabe
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q30/04 , G01Q10/065
摘要： A scanning probe microscope has a cantilever having a minute probe on a distal end thereof and a displacement detecting device for detecting displacement of the cantilever. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant a displacement amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or a sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. An XY scanning mechanism relatively moves the probe in a direction of an XY plane with respect to the sample to measure an uneven shape and/or a physical characteristic of the surface of the sample. A controlling range limiting device limits a driving range of the Z-axis driving mechanism. A controlling range setting device optionally sets the driving range of the Z-axis driving mechanism.
摘要翻译：扫描探针显微镜具有在其远端具有微小探针的悬臂和用于检测悬臂的位移的位移检测装置。 Z轴控制量计算机构计算用于保持悬臂的位移量恒定的控制量。 Z轴驱动机构根据来自Z轴控制量计算机构的控制量沿Z方向驱动悬臂或样本。 XY扫描机构使探针相对于样品相对于XY平面的方向移动，以测量样品表面的不均匀形状和/或物理特性。控制范围限制装置限制Z轴驱动机构的驱动范围。控制范围设定装置可选地设定Z轴驱动机构的驱动范围。

8. 发明申请

US20060219901A1 Working method using scanning probe 有权
标题翻译：使用扫描探头的工作方法
公开(公告)号：US20060219901A1
公开(公告)日：2006-10-05
申请号：US11370006
申请日：2006-03-04
申请人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
发明人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G01N23/225 , G01Q60/34
摘要： The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.
摘要翻译：本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。

9. 发明授权

US08608373B2 Softening point measuring apparatus and thermal conductivity measuring apparatus 有权
标题翻译：软化点测量仪和热导率测量仪
公开(公告)号：US08608373B2
公开(公告)日：2013-12-17
申请号：US12806364
申请日：2010-08-11
申请人： Kazunori Ando , Masayuki Iwasa , Masatsugu Shigeno , Hiroumi Momota , Kazutoshi Watanabe
发明人： Kazunori Ando , Masayuki Iwasa , Masatsugu Shigeno , Hiroumi Momota , Kazutoshi Watanabe
IPC分类号： G01N25/02 , G01N25/18
CPC分类号： G01N25/18 , G01N25/04 , G01Q60/58
摘要： In a local softening point measuring apparatus and thermal conductivity measuring apparatus using a probe microscope as a base, environment of the prob˜ and a sample surface is set to 1/100 atmospheric pressure (103 Pa) or lower. Otherwise, a side surface of the probe is coated with a thermal insulation material having a thickness that enables thermal dissipation to be reduced to 1/100 or lower, to thereby reduce the thermal dissipation from the side surface of the probe, and exchange heat substantially only at the contacting portion between the probe and the sample surface.
摘要翻译：在使用探针显微镜作为基础的局部软化点测定装置和热导率测定装置中，将试样表面的环境设定为1/100大气压（103Pa）以下。否则，探针的侧表面涂覆有能够使散热减小到1/100或更低的厚度的绝热材料，从而减少从探针侧表面的散热，并且基本上交换热量仅在探针和样品表面之间的接触部分处。

10. 发明申请

US20110038392A1 Softening point measuring apparatus and thermal conductivity measuring apparatus 有权
标题翻译：软化点测量仪和热导率测量仪
公开(公告)号：US20110038392A1
公开(公告)日：2011-02-17
申请号：US12806364
申请日：2010-08-11
申请人： Kazunori Ando , Masayuki Iwasa , Masatsugu Shigeno , Hiroumi Momota , Kazutoshi Watanabe
发明人： Kazunori Ando , Masayuki Iwasa , Masatsugu Shigeno , Hiroumi Momota , Kazutoshi Watanabe
IPC分类号： G01N25/02 , G01N25/18
CPC分类号： G01N25/18 , G01N25/04 , G01Q60/58
摘要： In a local softening point measuring apparatus and thermal conductivity measuring apparatus using a probe microscope as a base, environment of the prob˜ and a sample surface is set to 1/100 atmospheric pressure (103 Pa) or lower. Otherwise, a side surface of the probe is coated with a thermal insulation material having a thickness that enables thermal dissipation to be reduced to 1/100 or lower, to thereby reduce the thermal dissipation from the side surface of the probe, and exchange heat substantially only at the contacting portion between the probe and the sample surface.
摘要翻译：在使用探针显微镜作为基础的局部软化点测定装置和热导率测定装置中，将试样表面的环境设定为1/100大气压（103Pa）以下。否则，探针的侧表面涂覆有能够使散热减小到1/100或更低的厚度的绝热材料，从而减少从探针侧表面的散热，并且基本上交换热量仅在探针和样品表面之间的接触部分处。

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