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    • 97. 发明授权
    • Precision alignment of plates
    • 板的精确对准
    • US6104466A
    • 2000-08-15
    • US226475
    • 1999-01-07
    • Stephen L. BuchwalterDavid A. LewisShui-Chih Alan LienSampath PurushothamanJohn J. Ritsko
    • Stephen L. BuchwalterDavid A. LewisShui-Chih Alan LienSampath PurushothamanJohn J. Ritsko
    • G02F1/1333G02F1/13G02F1/0337
    • G02F1/1333G02F2001/133354
    • A system for aligning two plates, in accordance with the present invention, includes a first plate having a lithographically patterned structure formed on a first surface. A second plate also has a lithographically patterned structure formed on a second surface, the first and second surfaces being disposed to face each other. The patterned structures of the plates have corresponding and opposing edges to provide an interference fit between the patterned structures of the first and second plates wherein self-alignment between the first and second plates is realized by engaging the corresponding and opposing edges in the interference fit. A method for aligning two plates includes the steps of providing the system described above, coarsely aligning the plates in a first state which includes an interference between the patterned structures, adjusting at least one of plates to provide a second state having a clearance fit between the patterned structures and moving the plates together and returning to the first state to align the plates relative to each other.
    • 根据本发明的用于对准两个板的系统包括形成在第一表面上的具有光刻图案化结构的第一板。 第二板还具有形成在第二表面上的光刻图案结构,第一和第二表面被设置为彼此面对。 板的图案化结构具有对应的和相对的边缘,以在第一和第二板的图案化结构之间提供过盈配合,其中第一和第二板之间的自对准是通过在干涉配合中接合相应和相对的边缘来实现的。 一种用于对准两个板的方法包括以下步骤:提供上述系统,在第一状态下将板粗略对准,该第一状态包括图案化结构之间的干涉,调节板中的至少一个以提供第二状态, 图案化结构并将板移动到一起并返回到第一状态以使板相对于彼此对准。