基本信息:
- 专利标题: 반도체 웨이퍼 이송용 캐리어 박스
- 专利标题(英):Semiconductor wafer transport carrier box for
- 专利标题(中):半导体晶片运输运载盒
- 申请号:KR2019960024581 申请日:1996-08-16
- 公开(公告)号:KR2019980011089U 公开(公告)日:1998-05-25
- 发明人: 김광식 , 최상봉
- 申请人: 삼성전자주식회사
- 申请人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 专利权人: 삼성전자주식회사
- 当前专利权人: 삼성전자주식회사
- 当前专利权人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 代理人: 박만순; 신동준
- 主分类号: H01L21/68
- IPC分类号: H01L21/68
By receiving a carrier containing a plurality of wafers it is used to transfer to a predetermined position, to a carrier for a semiconductor wafer transfer box which allows the operator to easily remove the carriers. The present design is that the upper cap and the lower vessel is hinged about an axis of rotation and opening and closing the rotary, in the carrier box is formed to receive a carrier containing a plurality of wafers in a space between the lid and the receptacle, hinged to the rotatable shaft It is to the locking member for enabling a predetermined angle to lift the rear portion of the carrier in conjunction with the cap when the opening operation of the lid characterized by the additional installed. Thus, the subject innovation is not thereby lifting it vertically, with the operator to use excessive force and reducing the burden of the operator, so that there is an effect the working efficiency high.
公开/授权文献:
- KR200165370Y1 반도체 웨이퍼 이송용 캐리어 박스 公开/授权日:2000-01-15