基本信息:
- 专利标题： 커버결합장치 및 이를 포함하는 기판 이송장치
- 专利标题（英）：Cover Fastening Apparatus and Transferring Apparatus having the same for Substrate
- 专利标题（中）：盖子紧固装置和具有相同基板的传送装置
- 申请号：KR1020130082293 申请日：2013-07-12
- 公开(公告)号：KR1020150008302A 公开(公告)日：2015-01-22
- 发明人： 윤대규 , 김태현 , 김동혁 , 김상현
- 申请人： 현대로보틱스주식회사
- 申请人地址： 대구광역시 달성군 유가면 테크노순환로*길 **
- 专利权人： 현대로보틱스주식회사
- 当前专利权人： 현대로보틱스주식회사
- 当前专利权人地址： 대구광역시 달성군 유가면 테크노순환로*길 **
- 代理人： 특허법인천문
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; B25J21/00 ; B65G49/06
본 발명에 따르면, 본 발명은 제1암기구와 별도로 제작됨으로써 제작이 용이하다. 또한, 본 발명은 커버장치가 제1암기구에 용이하게 체결되도록 하고, 결합력을 강화시킬 수 있다.
To the invention is that the cover device to block the foreign matters generated from the driving device for moving the second arm mechanism coupled to the conveying direction in which the substrate is transferred to the first arm mechanism, the coupling main body is coupled to the first arm mechanism, is formed on the coupling body, the substrate transfer device cover coupling device for fastening where the coupling member for coupling the cover unit fastening holes, and be coupled to the coupling hole includes a through hole that is formed through the coupling body It relates,
According to the invention, the invention is easy to manufacture by being manufactured separately from the first arm mechanism. In addition, the present invention can, and so that the cover device is easily fastened to the first arm mechanism, enhance the binding force.