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1. 发明申请

WO2022169964A1 ACCELEROMETER APPARATUSES AND SYSTEMS 审中-公开
公开(公告)号：WO2022169964A1
公开(公告)日：2022-08-11
申请号：PCT/US2022/015100
申请日：2022-02-03
申请人： KIONIX, INC.
发明人： GU, Wenting , HOCKING, Andrew , KERNESS, Nicole
IPC分类号： G01P15/08 , G01P15/125 , G01P15/18 , G01C19/5712 , G01C19/5747 , G01C19/5719
摘要： A sensor having a proximal end and a distal end includes an anchor, a proof mass, a fixed finger, and a movable finger. The anchor is disposed at the proximal end. The proof mass is coupled to the anchor and disposed at a first distance from the anchor. The fixed finger and the movable finger are coupled to the anchor and disposed at a second distance from the anchor at the distal end. The fixed and movable fingers are configured to measure a first capacitance area. A ratio of the first distance over the second distance is between about 0.2 to about 0.6. The ratio is configured to deflect the movable finger at least about 1 m relative to the fixed finger.

2. 发明申请

WO2022046799A1 ISOTROPIC ATTENUATED MOTION GYROSCOPE 审中-公开
公开(公告)号：WO2022046799A1
公开(公告)日：2022-03-03
申请号：PCT/US2021/047387
申请日：2021-08-24
申请人： ANALOG DEVICES, INC.
发明人： PRIKHODKO, Igor, P. , GEEN, John, A.
IPC分类号： B81B7/02 , G01C19/5705 , G01C19/5712 , G01C19/5755 , G01C19/5747 , G01P15/14
摘要： According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.

3. 发明申请

WO2017132539A8 SYSTEM AND METHOD FOR DETERMINING THE POSITION OF SENSOR ELEMENTS IN A SENSOR ARRAY 审中-公开
公开(公告)号：WO2017132539A8
公开(公告)日：2017-08-03
申请号：PCT/US2017/015393
申请日：2017-01-27
申请人： MOTION ENGINE INC. , BOYSEL, Robert, Mark
发明人： BOYSEL, Robert, Mark , ROSS, Louis , GATLING, William, Lance
IPC分类号： G01C19/5712 , G01P15/08 , H01Q1/00 , H01Q1/27 , H01Q3/26 , H01Q19/10 , G01S7/40 , G01S13/89 , G01S15/89 , G01S13/02
摘要： Systems and methods are provided for determining the position of sensor elements in an sensor system (1000). The sensor system includes a plurality of sensor elements (1040). The platform comprises a plurality of MEMS IMUs (1020), each associated with one of the sensor elements (1040), measuring the acceleration and angular rate of the sensor elements. A controller (1030) determines the position and attitude of the sensor elements (1040), based on the acceleration and angular rate measured by each of the MEMS IMUs (1020).

4. 发明申请

WO2015013827A1 MEMS MOTION SENSOR FOR SUB-RESONANCE ANGULAR RATE SENSING 审中-公开
标题翻译：用于子共振角速率传感器的MEMS运动传感器
公开(公告)号：WO2015013827A1
公开(公告)日：2015-02-05
申请号：PCT/CA2014/050729
申请日：2014-08-01
申请人： MOTION ENGINE INC.
发明人： BOYSEL, Robert Mark
IPC分类号： G01C19/5712
CPC分类号： G01C19/56 , G01C19/5769 , H01L2224/94
摘要： A MEMS device for angular rate measurement is provided. The MEMS device includes a support assembly, a proof mass coupled to the support assembly via a spring assembly to enable motion of the proof mass along three mutually orthogonal axes, and an electrode assembly configured for driving and sensing the motion of the proof mass. The proof mass and the spring assembly form a resonant structure having three oscillation modes each having a respective resonant frequency. The three oscillation modes can be used as drive and sense modes for angular rate measurement. By selecting the properties of the resonant structure, the resonant frequencies can be tuned to provide unmatched resonance conditions between the drive and sense modes so that angular rate measurement can be performed at a frequency that matches the resonant frequency of the drive mode, while being significantly below the resonant frequency of the sense mode.
摘要翻译：提供了用于角速率测量的MEMS装置。 MEMS装置包括支撑组件，经由弹簧组件联接到支撑组件的证明质量块，以使得证明块沿着三个相互正交的轴线的运动，以及构造成用于驱动和感测证明块运动的电极组件。检测质量和弹簧组件形成具有三个振荡模式的谐振结构，每个具有相应的谐振频率。三种振荡模式可用作角速率测量的驱动和检测模式。通过选择谐振结构的特性，可以调谐谐振频率以在驱动和检测模式之间提供无与伦比的共振条件，从而可以以与驱动模式的谐振频率匹配的频率执行角速率测量，同时显着地低于感应模式的谐振频率。

5. 发明申请

WO2013091866A1 MULTIAXIAL MICRO-ELECTRONIC INERTIAL SENSOR 审中-公开
标题翻译：多相微电子惯性传感器
公开(公告)号：WO2013091866A1
公开(公告)日：2013-06-27
申请号：PCT/EP2012/005288
申请日：2012-12-20
申请人： TRONICS MICROSYSTEMS S.A.
发明人： LECLERC, Jacques
IPC分类号： G01C19/5712 , G01P15/18
CPC分类号： G01P15/18 , G01C19/5712 , G01P15/08 , G01P15/125 , G01P15/14 , G01P2015/0862
摘要： A resonator micro-electronic inertial sensor, preferably a micro-electromechanical system (MEMS) sensor (e.g. a gyro), for detecting linear accelerations and rotation rates in more than one axis comprises: ・a proof-mass system (21.1, 21.4) flexibly suspended above a substrate for performing a rotational in-plane vibration about a central axis (24,) • a drive electrode system (D 1,.... D4) for driving the proof-mass system (21.1,.... 21.4) to perform said rotational in-plane vibration, • and a sensing electrode system (S 1, S8) connected to the proof-mass system (21.1,.... 21.4) for detecting linear accelerations or rotation rates in more than one axis. Said proof-mass system (21.1 21.4) has more than two proof-mass elements flexibly coupled (25.1a, 25.1 b) to each other. Each proof-mass element (21.1, 21.2) is directly and flexibly connected (23. 1, 25.1 a, 25.1 b) to an anchor structure (22) on the substrate (32). The proof-mass elements (21.1,.... 21.4) are preferably arranged In a ring-shaped configuration between an inner and an outer radius (R1, R2) with respect to the central axis (24).
摘要翻译：谐振器微电子惯性传感器，优选微机电系统（MEMS）传感器（例如，陀螺仪），用于检测多于一个轴线中的线性加速度和旋转速率，包括：•灵敏的证明质量系统（21.1,21.4）悬挂在基板上方，用于围绕中心轴线（24）执行旋转的平面内振动。用于驱动校验质量系统（21.1，... 21.4）以执行所述旋转平面内振动的驱动电极系统（D 1，.... D4）。以及连接到校验质量系统（21.1，... 21.4）的检测电极系统（S1，S8），用于检测多于一个轴的线性加速度或旋转速度。所述证明质量系统（21.1 21.4）具有两个彼此柔性耦合（25.1a，25.1b）的证明质量元件。每个证明质量元件（21.1,21.2）直接和柔性地连接（23. 1，25.1 a，25.1 b）到衬底（32）上的锚结构（22）。证明质量元件（21.1，... 21.4）优选地以相对于中心轴线（24）的内半径（R 1，R 2）和外半径（R 1，R 2）之间的环形构造布置。

6. 发明申请

WO2021252398A1 DRIVE AND SENSE STRESS RELIEF APPARATUS 审中-公开
公开(公告)号：WO2021252398A1
公开(公告)日：2021-12-16
申请号：PCT/US2021/036259
申请日：2021-06-07
申请人： ANALOG DEVICES, INC.
发明人： VOHRA, Gaurav
IPC分类号： G01P15/02 , G01C19/5712
摘要： A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; and at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.

7. 发明申请

WO2021219374A1 MIKROMECHANISCHES BAUTEIL FÜR EINEN DREHRATENSENSOR UND ENTSPRECHENDES HERSTELLUNGSVERFAHREN 审中-公开
公开(公告)号：WO2021219374A1
公开(公告)日：2021-11-04
申请号：PCT/EP2021/059639
申请日：2021-04-14
申请人： ROBERT BOSCH GMBH
发明人： SCHEBEN, Rolf , MAUL, Robert , KUEHNEL, Matthias , MARKISCH, Steffen , BALSLINK, Thorsten , KUHLMANN, Nils Felix , GEIGER, Wolfram
IPC分类号： G01C19/5769 , G01C19/5712
摘要： Die Erfindung betrifft ein mikromechanisches Bauteil für einen Drehratensensor mit zwei Rotormassen (12a, 12b), welche bezüglich einer senkrecht zu einer Substratoberfläche (10) ausgerichteten und die zwei Rotormassen (12a, 12b) mittig schneidenden ersten Symmetrieebene (14) spiegelsymmetrisch und in Drehschwingbewegungen (16a, 16b) um senkrecht zu der Substratoberfläche (10) ausgerichtete Rotationsachsen (18a, 18b) versetzbar sind, und vier bezüglich der ersten Symmetrieebene (14) spiegelsymmetrischen seismischen Massen (22a, 22b, 24a und 24b), welche mittels der beiden in ihre jeweilige Drehschwingbewegung (16a, 16b) versetzten Rotormassen (12a, 12b) parallel zu der ersten Symmetrieebene (14) auslenkbar sind, wobei die erste Rotormasse (12a) und ein daran angebundenes erstes Paar (22a, 22b) der vier seismischen Massen (22a, 22b, 24a und 24b) bezüglich einer senkrecht zu der Substratoberfläche (10) und der ersten Symmetrieebene (14) ausgerichteten zweiten Symmetrieebene (26) spiegelsymmetrisch zu der zweiten Rotormasse (12b) und einem daran angebundenen zweiten Paar (24a, 24b) der vier seismischen Massen (22a, 22b, 24a und 24b) sind.

8. 发明申请

WO2020140171A1 一种陀螺仪审中-公开
公开(公告)号：WO2020140171A1
公开(公告)日：2020-07-09
申请号：PCT/CN2018/125936
申请日：2018-12-30
申请人：瑞声声学科技(深圳)有限公司
发明人：孟珍奎 , 刘雨微
IPC分类号： G01C19/5712
摘要：一种陀螺仪，包括固定框架（1）以及收容于固定框架（1）内的振动单元，振动单元包括质量块（3）及环绕质量块（3）的连接框架（2），该陀螺仪还包括连接振动单元与固定框架（1）的第一连接件（4）以及连接质量块（3）与连接框架（2）的第二连接件（5），使得振动单元以第一连接件（4）为中心轴转动，质量块（3）以第二连接件（5）为中心轴转动。该陀螺仪在转动检测的时候，转动角度大，使得振动幅度较强，最终使得信号输出强。

9. 发明申请

WO2017060130A3 MEMS YAW-RATE SENSOR WITH MAGNETIC DETECTION 审中-公开
标题翻译：带有磁检测的MEMS转向传感器
公开(公告)号：WO2017060130A3
公开(公告)日：2017-06-01
申请号：PCT/EP2016073005
申请日：2016-09-27
申请人： EPCOS AG
发明人： BESSON MARCUS , OSTRICK BERNHARD
IPC分类号： G01C19/5747 , G01C19/5712 , G01C19/5769
CPC分类号： G01C19/5747 , G01C19/5712 , G01C19/5769
摘要： The invention relates to a MEMS yaw-rate sensor (1) which comprises a main part (2), a first primary mass (3) designed to implement a primary oscillation relative to the main part (2), a first secondary mass (6) connected to said first primary mass (3) by a suspension mechanism (7) such that the primary movement of the first primary mass (3) incites a primary movement of the first secondary mass (6) and a secondary movement of the first secondary mass (6) is permitted relative to the first primary mass (3), a first magnetic field-generating element (9) and a first magnet-sensitive element (8), one of which is arranged on the main part (2) and the other arranged on the first primary mass (3), wherein the first magnet-sensitive element (8) is designed to determine the primary movement of the first primary mass (3) relative to the main part (2), and a second magnetic field-generating element (11) and a second magnet-sensitive element (10), one of which is arranged on the main part (2) or on the first primary mass (3) and the other arranged on the first secondary mass (6), wherein the second magnet-sensitive element (10) is designed to determine the secondary movement of the first secondary mass (6) relative to the first primary mass (3).
摘要翻译：本发明涉及（1），包括其适合于一个主摆动相对于基体的基体（2），第一主质量块（3）的MEMS率传感器（2）以执行第一辅块（6）是在这样的悬挂器连接到所述第一初级质量块（3）（7），所述第一主质量块（3）的主运动刺激（6）的第一辅块和第一辅块的次级运动的主运动（6）相对于所述第一主质量（ 3）是允许的，第一磁场生成元件（9）和第一磁敏感元件（8），其（在主体2）布置的一个和布置在（第一初级质量3），其中，所述第一磁体敏感元件（用于确定所述第一主质量块（3）相对于所述基体（2）的主运动的第一磁场产生元件（11）和第二磁场产生元件（11）以及第二磁场产生元件 Ives的元件（10），其在所述基体之一（2）或所述第一主质量的（3）并且被置于一个在所述第一辅块（6）的顶部上，其中，用于确定所述第一的二次运动第二磁体敏感元件（10）次质量（6）相对于第一主质量（3）具有。

10. 发明申请

WO2016108151A1 MICROMECHANICAL GYROSCOPE STRUCTURE 审中-公开
标题翻译：微机械结构
公开(公告)号：WO2016108151A1
公开(公告)日：2016-07-07
申请号：PCT/IB2015/059910
申请日：2015-12-23
申请人： MURATA MANUFACTURING CO., LTD.
发明人： RINKIÖ, Marcus
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712 , G01C25/00
摘要： A microelectromechanical gyroscope structure, and a method for manufacturing a microelectromechanical gyroscope structure, comprising a seismic mass and a spring structure suspending the seismic mass to a body element with a suspension structure. The spring structure allows a primary oscillation motion about a primary axis that is aligned with the plane of the seismic mass, and a secondary oscillation motion where at least part of the seismic mass moves in a second direction, perpendicular to the direction of the primary oscillation motion. The spring structure is attached to the seismic mass at both sides of the suspension structure and said spring structure is in torsional motion about the primary axis that is common with the primary oscillation motion. The structure of the gyroscope enables mechanical compensation of a quadrature error of the seismic mass by etching a compensation groove on the top face of the seismic mass.
摘要翻译：一种微机电陀螺仪结构，以及一种用于制造微机电陀螺仪结构的方法，其包括将地震块和弹簧结构悬挂在具有悬挂结构的主体元件上。弹簧结构允许围绕与主体轴对准的主轴的主振荡运动，以及次震动，其中至少部分地震质量沿垂直于主振荡方向的第二方向移动运动。弹簧结构附着在悬架结构两侧的地震块上，而弹簧结构围绕主轴与主振荡运动相同的扭转运动。陀螺仪的结构可以通过蚀刻地震块顶面的补偿槽来对地震质量的正交误差进行机械补偿。

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