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    • 8. 发明申请
    • 공정설비에서 발생되는 배기가스 처리 플라즈마 반응기
    • 用于处理加工设备产生的排气的等离子体反应器
    • WO2015160058A1
    • 2015-10-22
    • PCT/KR2014/010121
    • 2014-10-27
    • 주식회사 클린팩터스
    • 고경오강경두노명근
    • H01L21/02H05H1/46H05H1/28
    • H05H1/2406H05H2001/2412H05H2245/1215
    • 본 발명은, 공정설비에서 발생되는 배기가스 처리 플라즈마 반응기에 관한 것으로서, 공정 챔버에서 배출되는 배기가스를 분해하도록 공정챔버와 진공펌프 사이에 배치되는 플라즈마 반응기에 있어서, 상기 배기가스가 유동하며, 유전체로 형성된 도관; 상기 도관 상에 설치되어, 상기 도관의 내부 공간과 차폐되는 제1 전극부; 및 상기 제1 전극부와 이격되어 배치되며, 상기 제1 전극부와 플라즈마 방전을 일으켜서 상기 배기가스를 분해하는 제2 전극부를 포함하고, 상기 플라즈마 방전에 의한 상기 도관의 손상을 방지하기 위하여, 상기 도관의 두께는 상기 플라즈마 방전이 집중되는 부분의 두께가 주변 부분의 두께보다 두껍게 형성된다.
    • 本发明涉及一种用于处理从处理设备产生的废气的等离子体反应器,更具体地,涉及一种布置在处理室和真空泵之间的等离子体反应器,以便溶解从处理室排出的废气,包括: 由废气流过的电介质制成的管; 第一电极部,其安装在所述管上并与所述管的内部空间隔离; 以及第二电极部分,其与第一电极部分分离,用于通过引起等离子体放电来溶解排气,其中管的厚度形成为使得等离子体放电浓缩的区域比厚度厚 的周围区域,以防止等离子体放电对管造成损坏。
    • 9. 发明申请
    • APPARATUS OF SEALING AND SECURING COMPONENTS OF A LIQUID COOLED PLASMA ARC TORCH AND IMPROVED TORCH DESIGN
    • 液体冷却等离子弧焊的密封和安装部件的设备和改进的设计
    • WO2015132657A1
    • 2015-09-11
    • PCT/IB2015/000297
    • 2015-03-09
    • LINCOLN GLOBAL INC.
    • WINN, Jackie, LaverneNAMBURU, Praveen, Krishna
    • H05H1/28H05H1/34
    • H05H1/34H05H1/28H05H2001/3426H05H2001/3436
    • A plasma arc torch (100, 400) includes a cathode adaptor body (501) having at least two sealant channels with sealant rings. The torch (100, 400) also includes a cathode body (505) having at least two sealant channels with sealant rings. The torch (100, 400) further includes a pilot arc connector (509) having at least two sealant channels with sealant rings. The torch (100, 400) additionally includes a rear isolator (513, 513') that includes at least two sealant channels with sealant rings that engage an anode body (519) and are spaced apart from each other by a distance that is in a range of 2 percent to 50 percent of an over all length of the rear isolator (513, 513'). The rear isolator (513, 513') also includes at least two sealant channels with sealant rings that engage a ring isolator (521) and are spaced apart from each other by a distance that is in a range of 2 percent to 50 percent of the overall length of the rear isolator (513, 513').
    • 等离子弧焊炬(100,400)包括具有至少两个具有密封环的密封剂通道的阴极适配器本体(501)。 手电筒(100,400)还包括具有密封剂环的至少两个密封剂通道的阴极体(505)。 所述手电筒(100,400)还包括具有密封剂环的至少两个密封剂通道的先导弧形连接器(509)。 所述手电筒(100,400)还包括后隔离器(513,513'),所述后隔离器包括至少两个密封剂通道,所述密封剂通道具有接合阳极体(519)的密封环,并且彼此隔开距离为 范围为后隔离器(513,513')的全长的2%至50%。 后隔离器(513,513')还包括具有密封环的至少两个密封剂通道,该密封剂通道与环形隔离件(521)接合并且彼此隔开一定距离,该距离在该隔离件的2%至50%的范围内 后隔离器(513,513')的总长度。
    • 10. 发明申请
    • HIGH POWER DC NON TRANSFERRED STEAM PLASMA TORCH SYSTEM
    • 高功率直流非转移蒸汽等离子转换系统
    • WO2014124521A1
    • 2014-08-21
    • PCT/CA2014/000108
    • 2014-02-17
    • PYROGENESIS CANADA INC.
    • RAO, Lakshminarayana Mydala PrahladaREMILLARD, JocelynCARABIN, Pierre
    • H05H1/26H05H1/28
    • H05H1/42H05H1/28H05H1/34H05H1/36H05H2001/3426H05H2001/3468
    • A high power DC steam plasma torch system (S) includes a steam plasma torch assembly (1) wherein superheated steam (46) is used as the main plasma forming gas, thereby resulting in a very reactive steam plasma plume. The superheated steam (46) is injected internally directly into the plasma plume via a ceramic lined steam feed tube (25) for reducing condensation of steam before reaching the plasma plume. The superheated steam (46) flows through a gas vortex (16) which has tangentially drilled holes thereby resulting in a high speed gas swirl that minimizes electrode erosion. In the present steam plasma torch system (S), the plasma torch assembly (1) is ignited using an ignition contactor which is housed external to the plasma torch assembly (1). The superheated steam (46) is injected into the plasma plume using a water cooled steam vortex generator assembly (15).
    • 高功率DC蒸汽等离子体焰炬系统(S)包括蒸汽等离子体炬组件(1),其中过热蒸汽(46)用作主等离子体形成气体,从而导致非常反应的蒸气等离子体羽流。 过热蒸汽(46)通过陶瓷内衬蒸汽进料管(25)内部直接注入到等离子体羽流中,用于在到达等离子体羽流之前减少蒸汽冷凝。 过热蒸汽(46)流过具有切向钻孔的气体涡流(16),从而导致高速气体涡流,使电极腐蚀最小化。 在本蒸汽等离子体焰炬系统(S)中,使用位于等离子体焰炬组件(1)外部的点火式接触器来点燃等离子炬组件(1)。 使用水冷蒸汽涡流发生器组件(15)将过热蒸汽(46)注入到等离子体羽流中。