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    • 6. 发明申请
    • METHOD AND DEVICE FOR PRODUCING EXTREME ULTRAVIOLET AND SOFT X-RAYS FROM A GASEOUS DISCHARGE
    • 装置和方法用于产生极紫外辐射和软X射线辐射从气体排
    • WO99029145A1
    • 1999-06-10
    • PCT/EP1998/007829
    • 1998-12-02
    • G03F7/20H05G2/00H05H1/48H01J17/04H01J17/40H05H1/24
    • H05G2/003G03F7/70033H05H1/48
    • The invention relates to a method and a device for producing extreme ultraviolet (EUV) and soft x-rays from a gaseous discharge. The inventive device is characterised in that it comprises at least two electrodes defining a symmetry axis and having each an opening in alignment. An intermediate chamber is provided between the anode and the cathode, where gas inflation is substantially homogeneous in space. The electrodes are formed in such a way that the gaseous discharge takes place only in a volume delimited by the aligned openings. Current pulses are chosen so as to create, on the symmetry axis, a very hot and dense plasma channel which constitutes a plasma source for extreme ultraviolet and/or soft x-rays. The inventive device is particularly useful in EUV-projection lithography in a spectral range around 13 nm.
    • 本发明涉及一种用于产生极紫外(EUV)的方法和装置 - 从气体放电和软X射线辐射。 该装置的特征在于,至少两个电极的每一个提供有提供的对准孔,通过该对称轴被定义,其中在所述阳极和阴极电极之间设置有一个空间均匀的主要气体填充的空间形成的,以使 仅在通过对准的开口体积指定的区域形成气体放电,并且其中所述电流脉冲在该致密热等离子体通道上对称轴,用于EUV和/或软X射线,其等离子体源产生这样的方式选择关于幅度和周期持续时间。 优选的应用领域是在大约13纳米的光谱范围内的EUV投影光刻。
    • 7. 发明申请
    • TELECOMMUNICATIONS GAS TUBE APPARATUS AND COMPOSITION FOR USE THEREWITH
    • 电信用气管装置及其使用的组合物
    • WO1995033277A1
    • 1995-12-07
    • PCT/US1995006662
    • 1995-05-30
    • ACCESS NETWORK TECHNOLOGIES
    • ACCESS NETWORK TECHNOLOGIESSIMENDINGER, William, H., III.MORTON, Rodney, E.
    • H01J17/40
    • H01C7/126H01B1/22H01C7/12H01J17/40H01T1/14
    • A telecommunications gas tube apparatus (40) which is suitable for connection to a gas discharge tube (12) and which comprises an electrically non-linear resistive element (45) prepared from an electrically non-linear composition which comprises a polymeric component and a particulate filler. The composition has an initial resistivity rho i at 25 DEG C of at least 10 ohm-cm, and is such that a standard device containing the composition has an initial breakdown voltage VSi, and after the standard device has been exposed to a standard impulse breakdown test, the device has a final breakdown voltage VSf which is from 0.7VSi to 1.3VSi. In addition the composition in the device has a final resistivity rho f at 25 DEG C of at least 10 ohm-cm. Such compositions are useful in providing both vent-safe and fail-safe protection to a gas discharge tube (12).
    • 一种适于连接到气体放电管(12)的电信气体管装置(40),其包括由非线性组合物制成的电非线性电阻元件(45),所述非线性电阻元件包括聚合物组分和颗粒 填料。 该组合物在25℃下的初始电阻率rho i为至少10 9 ohm-cm,并且使得含有组合物的标准装置具有初始击穿电压VSi,并且在标准装置暴露于 标准脉冲击穿测试,该器件具有从0.7VSi至1.3VSi的最终击穿电压VSf。 此外,器件中的组成物在25℃下的最终电阻率rho f至少为10 9 ohm-cm。 这样的组合物可用于向气体放电管(12)提供通气安全和故障安全保护。
    • 9. 发明申请
    • APPARATUS AND METHOD FOR REDUCING OPERATING VOLTAGE IN GAS DISCHARGE DEVICES
    • 降低气体放电装置工作电压的装置和方法
    • WO00033344A1
    • 2000-06-08
    • PCT/US1998/025582
    • 1998-12-03
    • H01J17/40H01J1/30H01J7/24H01J17/04H01J61/36H01S3/038H05B39/00H01J61/67
    • H01J37/32027H01J37/32018H01J37/32596
    • The present invention is a system and method for reducing the voltage necessary to produce a glow discharge in a gas (14). This is done by fabricating the cathode (20) in a gas discharge out of a conductive material that is permeable to the subject gas rather than out of a solid material, as in the prior art. Fabricating the cathode (20) with a permeable material rather than a solid material increases the surface area of the cathode (20) and provides the gas (14) with greater access to the cathode's surface. Increasing the surface area of the cathode (20) increases the total discharge current which can be extracted from the cathode (20) without increasing the extraction voltage. This allows the gas discharge device to be operated at a lower voltage than is possible using a cathode (20) fabricated of a solid material.
    • 本发明是用于降低在气体(14)中产生辉光放电所必需的电压的系统和方法。 这是通过如现有技术那样在阴极(20)中制造阴极(20)而不是以固体材料而不是固体材料的导电材料中排出的气体。 用可渗透材料而不是固体材料制造阴极(20)增加了阴极(20)的表面积,并使气体(14)具有更大的进入阴极表面的能力。 增加阴极(20)的表面积可增加可从阴极(20)中提取的总放电电流,而不增加提取电压。 这允许气体放电装置以比使用由固体材料制成的阴极(20)可能的电压更低的电压进行操作。