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1. 发明申请

WO2021197716A1 AN ASSEMBLY INCLUDING A NON-LINEAR ELEMENT AND A METHOD OF USE THEREOF 审中-公开
公开(公告)号：WO2021197716A1
公开(公告)日：2021-10-07
申请号：PCT/EP2021/054572
申请日：2021-02-24
申请人： ASML NETHERLANDS B.V.
发明人： PROSYENTSOV, Vitaliy , NI, Yongfeng
IPC分类号： G02F1/365 , G02F1/3528 , G02F2201/307 , G02F2201/34
摘要： An assembly comprising a non-linear element configured for generating broadband radiation from input radiation coupled into the non-linear element. The assembly further comprises an optical element positioned downstream of the non-linear element configured to reflect a fraction of the broadband radiation back into the non-linear element. The non-linear element is typically a nonlinear fiber, such as a hollow-core photonic crystal fiber (HC-PCF).

2. 发明申请

WO2021121530A1 A LIGHT SOURCE 审中-公开
公开(公告)号：WO2021121530A1
公开(公告)日：2021-06-24
申请号：PCT/DK2020/050403
申请日：2020-12-21
申请人： NKT PHOTONICS A/S
发明人： ANDERSEN, Thomas Vestergaard
IPC分类号： G02F1/35 , G02F1/365 , H01S3/00 , G02F1/3528 , G02F2201/20 , G02F2201/205 , H01S3/005 , H01S3/0085 , H01S3/0092 , H01S3/06754 , H01S3/06758 , H01S3/1003 , H01S3/10046
摘要： A light source comprises: a pulse generator (11) for providing a first sequence (13) of light pulses, the first sequence (13) of light pulses comprising a first number of light pulses within a predetermined time period, a manipulator (15) configured to generate a second sequence (17) of light pulses from the first sequence (13) of light pulses, the second sequence (17) of light pulses having a second number of light pulses within the predetermined time period, the second number being different from the first number, and a nonlinear optical element (19) arranged to receive the second sequence (17) of light pulses.

3. 发明申请

WO2021251966A8 LIGHT SOURCE GENERATION APPARATUS, LIGHT SOURCE GENERATING METHOD, AND RELATED DEFECT DETECTION SYSTEM 审中-公开
公开(公告)号：WO2021251966A8
公开(公告)日：2021-12-16
申请号：PCT/US2020/037128
申请日：2020-06-11
申请人： KUNG, Andrew, Hing-Cheong
发明人： HUANG, Pei-Chi , LU, Chih-Hsuan , CHEN, Ming-Chang
IPC分类号： H01S3/10 , G02F1/3528 , G02F1/353 , G03F7/70033 , G03F7/70041 , H01S3/0057 , H01S3/0092 , H01S3/1618 , H01S3/1643
摘要： An EUV radiation light source generation apparatus includes a pump laser, at least one pulse shaping unit, a wavelength conversion unit, and a high-order harmonics generation unit. The pump laser provides a pulse laser radiation beam. Each pulse shaping unit conducts a spectrum extending operation and a phase compensation operation to the pulse laser radiation beam. The phase compensation operation makes multiple frequency components of the pulse laser radiation beam emitted by the pulse shaping unit to be substantially in phase. The wavelength conversion unit conducts a center wavelength conversion operation to the pulse laser radiation beam. The high-order harmonics generation unit receives the pulse laser radiation beam processed by the pulse shaping unit and the center wavelength conversion operation, and focuses the received pulse laser radiation beam to a high order harmonic generation medium to generate a high order harmonic radiation beam.

4. 发明申请

WO2021121531A1 LIGHT SOURCE 审中-公开
公开(公告)号：WO2021121531A1
公开(公告)日：2021-06-24
申请号：PCT/DK2020/050404
申请日：2020-12-21
申请人： NKT PHOTONICS A/S
发明人： ANDERSEN, Thomas Vestergaard
IPC分类号： G02F1/35 , G02F1/365 , H01S3/00 , G02F1/3528 , G02F2201/20 , G02F2201/205 , H01S3/005 , H01S3/0085 , H01S3/0092 , H01S3/06754 , H01S3/1003 , H01S3/10046
摘要： A light source (1), comprising: a pulse generator (2) for providing an initial sequence of light pulses (5), the initial sequence of light pulses having a selected number of light pulses in a selected time period, the pulse generator further comprising an optical source (3) for producing optical pulses; and a modulator (4) in communication with the optical source (3) for increasing or decreasing the selected number of pulses provided by the pulse generator in the selected time period; first and second optical arms (7,8), for propagating, respectively, first and second sequences of light pulses (10,11), each derived from the initial sequence of light pulses (5), wherein the first optical arm (7) comprises a first manipulator (9) configured to generate the first sequence of light pulses (10) from the initial sequence of light pulses (5), the first sequence of light pulses (10) having a first number of light pulses within the selected time period, wherein the first number is higher than the initial number, wherein the second sequence of light pulses (11) has a second number of light pulses within the selected time period, wherein the second number is different than or equal to the initial number, wherein the light source further comprises a nonlinear optical element (14) arranged to receive the first sequence of light pulses (10) or the second sequence of light pulses (11), and an optical switch (6) arranged to switch either the first sequence of light pulses (10) or the second sequence of light pulses(11) for reception by the nonlinear optical element (14).

5. 发明申请

WO2021121529A1 LIGHT SOURCE 审中-公开
公开(公告)号：WO2021121529A1
公开(公告)日：2021-06-24
申请号：PCT/DK2020/050402
申请日：2020-12-21
申请人： NKT PHOTONICS A/S
发明人： ANDERSEN, Thomas Vestergaard
IPC分类号： G02F1/35 , H01S3/00 , H01S3/067 , G02F1/365 , G02F1/3528 , G02F2201/20 , G02F2201/205 , G02F2203/56 , H01S3/005 , H01S3/0085 , H01S3/0092 , H01S3/06754
摘要： A light source (1), comprising: a pulse generator (2) for providing an initial sequence of light pulses (3), the initial sequence of light pulses (3) comprising an initial number of light pulses within a predetermined time period, first and second optical arms, for propagating, respectively, first and second sequences of light pulses, each derived from the initial sequence of light pulses, wherein the first optical arm (5) comprises a first manipulator (7) configured to generate the first sequence of light pulses (9) from the initial sequence of light pulses (3), the first sequence of light pulses (9) having a first number of light pulses within the predetermined time period, wherein the first number is higher than the initial number, wherein the second sequence of light pulses (10) has a second number of light pulses within the predetermined time period, wherein the second number is equal to or lower than the initial number, wherein the light source further comprises a nonlinear optical element (13) arranged to receive the first sequence of light pulses (9) or the second sequence of light pulses (10), and an optical switch (4) arranged to switch that either the first sequence of light pulses or the second sequence of light pulses is received by the nonlinear optical element.

6. 发明申请

WO2022245466A2 SUPERCONTINUUM APPARATUS, METHODS, AND APPLICATIONS 审中-公开
公开(公告)号：WO2022245466A2
公开(公告)日：2022-11-24
申请号：PCT/US2022/025798
申请日：2022-04-21
申请人： UNIVERSITY OF CENTRAL FLORIDA RESEARCH FOUNDATION, INC.
发明人： GAUSMANN, Stefan , SCHULZGEN, Axel
IPC分类号： G02F1/39 , G02F1/01 , G02F1/225 , G02F1/3528
摘要： The discovery of a clear correlation between the Anderson localization length and the dispersion properties of highly localized T ALOF modes allowed us to demonstrate that the zero dispersion wavelength can be tuned over more than 300nm within the same fiber by selected excitation of specific modes. This enabled apparatus and methods for generating tunable, multioctave-spanning supercontinuum (SC) spectra in a bandwidth from 460nm to 1750nm. Associated applications are also presented. Providing a length of TALOF having a plurality of Anderson mode propagation channels each characterized by a Anderson mode localization length between 2p to 15p.

7. 发明申请

WO2021144093A1 METHOD, ASSEMBLY, AND APPARATUS FOR IMPROVED CONTROL OF BROADBAND RADIATION GENERATION 审中-公开
公开(公告)号：WO2021144093A1
公开(公告)日：2021-07-22
申请号：PCT/EP2020/085965
申请日：2020-12-14
申请人： ASML NETHERLANDS B.V.
发明人： SABERT, Hendrik , UEBEL, Patrick, Sebastian , PONGERS, Willem, Richard
IPC分类号： G02F1/383 , G03F7/00 , G02B6/02 , G02F1/01 , G02F1/35 , G02F1/365 , G01B11/25 , G02B6/02214 , G02B6/02328 , G02F1/0147 , G02F1/3528
摘要： A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly comprising: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to comprise a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.

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