发明申请
WO2021251966A8 LIGHT SOURCE GENERATION APPARATUS, LIGHT SOURCE GENERATING METHOD, AND RELATED DEFECT DETECTION SYSTEM
审中-公开
基本信息:
- 专利标题： LIGHT SOURCE GENERATION APPARATUS, LIGHT SOURCE GENERATING METHOD, AND RELATED DEFECT DETECTION SYSTEM
- 申请号：PCT/US2020/037128 申请日：2020-06-11
- 公开(公告)号：WO2021251966A8 公开(公告)日：2021-12-16
- 发明人： HUANG, Pei-Chi , LU, Chih-Hsuan , CHEN, Ming-Chang
- 申请人： KUNG, Andrew, Hing-Cheong
- 申请人地址： 6F., No. 69, Yong Kang Street, Da' an District
- 专利权人： KUNG, Andrew, Hing-Cheong
- 当前专利权人： KUNG, Andrew, Hing-Cheong
- 当前专利权人地址： 6F., No. 69, Yong Kang Street, Da' an District
- 代理机构： ZUCCHERO, Joseph, C. et al.
- 主分类号： H01S3/10
- IPC分类号： H01S3/10 ; G02F1/3528 ; G02F1/353 ; G03F7/70033 ; G03F7/70041 ; H01S3/0057 ; H01S3/0092 ; H01S3/1618 ; H01S3/1643
摘要：
An EUV radiation light source generation apparatus includes a pump laser, at least one pulse shaping unit, a wavelength conversion unit, and a high-order harmonics generation unit. The pump laser provides a pulse laser radiation beam. Each pulse shaping unit conducts a spectrum extending operation and a phase compensation operation to the pulse laser radiation beam. The phase compensation operation makes multiple frequency components of the pulse laser radiation beam emitted by the pulse shaping unit to be substantially in phase. The wavelength conversion unit conducts a center wavelength conversion operation to the pulse laser radiation beam. The high-order harmonics generation unit receives the pulse laser radiation beam processed by the pulse shaping unit and the center wavelength conversion operation, and focuses the received pulse laser radiation beam to a high order harmonic generation medium to generate a high order harmonic radiation beam.
公开/授权文献:
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01S | 利用受激发射的器件 |
| ------H01S3/00 | 激光器，即利用受激发射对红外光、可见光或紫外线进行产生、放大、调制、解调或变频的器件 |
| --------H01S3/10 | .控制辐射的强度、频率、相位、极化或方向，例如开关、选通、调制或解调 |