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1. 发明申请

WO2007056277A2 DIELECTRICALLY TRANSDUCED SINGLE-ENDED TO DIFFERENTIAL MEMS FILTER 审中-公开
标题翻译：电介质传输单端到差分MEMS滤波器
公开(公告)号：WO2007056277A2
公开(公告)日：2007-05-18
申请号：PCT/US2006/043180
申请日：2006-11-03
申请人： CORNELL RESEARCH FOUNDATION, INC. , WEINSTEIN, Dana , BHAVE, Sunil, Ashok
发明人： WEINSTEIN, Dana , BHAVE, Sunil, Ashok
IPC分类号： H03H9/46
CPC分类号： H03H9/2431 , H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/2436 , H03H9/505 , H03H2009/02354 , H03H2009/0248 , H03H2009/02503
摘要： A MEMS filter has an input layer for receiving a signal input, and an output layer for providing a signal output, The MEMS filter also has a first resonator and a second resonator coupled to the first resonator such that movement transduced in the first resonator by the signal input causes movement of the second resonator which transduces the signal output. A method of manufacturing a MEMS filter is also disclosed. A dielectric layer is formed on a base. A patterned electrode layer is formed at least in part on the dielectric layer. The base is etched to define a resonator structure. A method of adjusting a desired input impedance and an output impedance of a dielectrically transduced MEMS filter having transduction electrodes coupled to a dielectric film is further disclosed. The method includes adjusting a DC bias voltage on the transduction electrodes.
摘要翻译： MEMS滤波器具有用于接收信号输入的输入层和用于提供信号输出的输出层。MEMS滤波器还具有耦合到第一谐振器的第一谐振器和第二谐振器，使得在第一谐振器中的运动被信号输入引起转换信号输出的第二谐振器的移动。还公开了一种制造MEMS滤波器的方法。在基底上形成介电层。图案化的电极层至少部分地形成在电介质层上。蚀刻基底以限定谐振器结构。还公开了一种调节具有耦合到电介质膜的换向电极的介电转换MEMS滤波器的期望输入阻抗和输出阻抗的方法。该方法包括调整转导电极上的直流偏置电压。

2. 发明申请

WO2016111280A1 圧電薄膜及び圧電振動子审中-公开
标题翻译：压电薄膜和压电传感器
公开(公告)号：WO2016111280A1
公开(公告)日：2016-07-14
申请号：PCT/JP2016/050092
申请日：2016-01-05
申请人：株式会社村田製作所
发明人：會田　康弘 , 梅田　圭一
IPC分类号： H03H9/24 , C23C14/06 , H03H9/17
CPC分类号： H03H9/172 , C23C14/06 , C23C14/0617 , H03H3/02 , H03H9/02031 , H03H9/02448 , H03H9/0595 , H03H9/2489 , H03H9/564 , H03H2003/027 , H03H2003/0407 , H03H2003/0435 , H03H2009/0248 , H03H2009/155
摘要：　圧電特性を十分に確保しつつ応力を低減することができる圧電薄膜及び圧電振動子を提供する。　圧電薄膜は、ＡｌＮ結晶と、ＡｌＮ結晶においてＡｌと置き換えられる少なくとも１つの第１元素と、第１元素のイオン半径よりも小さく、かつ、Ａｌのイオン半径よりも大きなイオン半径を有し、ＡｌＮ結晶に添加される第２元素と、を含有する。
摘要翻译：提供能够在确保令人满意的压电特性的同时减小应力的压电薄膜和压电换能器。压电薄膜含有AlN晶体，能够取代AlN晶体中的Al的至少一个第一元素和具有比第一元素更小的离子半径的第二元素具有比Al更大的离子半径，并且是添加到AlN晶体。

3. 发明申请

WO2007056277A3 DIELECTRICALLY TRANSDUCED SINGLE-ENDED TO DIFFERENTIAL MEMS FILTER 审中-公开
标题翻译：电介质传输单端到差分MEMS滤波器
公开(公告)号：WO2007056277A3
公开(公告)日：2007-11-29
申请号：PCT/US2006043180
申请日：2006-11-03
申请人： CORNELL RES FOUNDATION INC , WEINSTEIN DANA , BHAVE SUNIL ASHOK
发明人： WEINSTEIN DANA , BHAVE SUNIL ASHOK
IPC分类号： H03H9/46 , H03H9/50
CPC分类号： H03H9/2431 , H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/2436 , H03H9/505 , H03H2009/02354 , H03H2009/0248 , H03H2009/02503
摘要： A MEMS filter ( 128) has an input layer (74) for receiving a signal input (Vin), and an output layer (182) for providing a signal output The MEMS filter ( 128) also has a first resonator ( 130) and a second resonator (132) coupled to the first resonator (130) such that movement transduced in the first resonator ( 130) by the signal input causes movement of the second resonator (132) that transduce the signal output A method of manufacturing a MEMS filter is also disclosed A dielectric layer is formed on a base A patterned electrode layer is formed at least in part on the dielectric layer The base is etched to define a resonator structure A method of adjusting a desired input impedance and output impedance of a dielectrically transduced MEMS filter having transduction electrodes coupled to a dielectric film is further disclosed The method includes adjusting a DC bias voltage on the transduction electrodes.
摘要翻译： MEMS滤波器（128）具有用于接收信号输入（Vin）的输入层（74）和用于提供信号输出的输出层（182）。MEMS滤波器（128）还具有第一谐振器（130）和第二共振器（132），其耦合到所述第一谐振器（130），使得通过所述信号输入在所述第一谐振器（130）中转换的运动引起所述第二谐振器（132）的运动，所述第二谐振器（132）转换所述信号输出。还公开了在基底上形成介电层A至少部分地在电介质层上形成图案化的电极层。蚀刻基底以限定谐振器结构。调节所需输入阻抗和介电转换的MEMS滤波器的输出阻抗的方法进一步公开了具有耦合到电介质膜的换能电极。该方法包括调整转导电极上的DC偏置电压。

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