会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明申请
    • DYNAMIC MEMORY BASED ON SINGLE ELECTRON STORAGE
    • 基于单电子存储的动态记忆
    • WO02065507A3
    • 2003-05-22
    • PCT/US0202761
    • 2002-02-01
    • MICRON TECHNOLOGY INC
    • FORBES LEONARDAHN KIE Y
    • H01L20060101H01L21/00H01L21/335H01L21/336H01L21/8236H01L21/8238H01L21/8242H01L27/108H01L27/12H01L27/148H01L29/76H01L29/788
    • B82Y10/00G11C2216/08H01L21/266H01L27/108H01L27/1203H01L29/7888Y10S438/947
    • A method for forming edge-defined structures with sub-lithographic dimensions which are used to further form conduction channels and/or storage structures in memory cells. Sacrificial silicon nitride islands 20 are deposited at low temperatures and then patterned and etched by high resolution etching techniques. Polysilicon 22 is next deposited over the sacrificial silicon nitride islands and directionally etched to form edge-defined polysilicon dot and strip structures 24 which are about one tenth the minimum feature size. The edge-defined polysilicon strips and dots are formed between the source and drain region of an NMOS device. Subsequent to the removal of the sacrificial silicon nitride islands, the edge-defined polysilicon strips and dots are used to mask a threshold voltage implantation in a conventional CMOS process. A conduction channel 87 and two adjacent potential minimum dots 89 are formed after the removal of the edge-defined polysilicon strips and dots.
    • 用于形成具有亚光刻尺寸的边缘限定结构的方法,其用于在存储器单元中进一步形成传导通道和/或存储结构。 牺牲的氮化硅岛20在低温下沉积,然后通过高分辨率蚀刻技术被图案化和蚀刻。 接着将多晶硅22沉积在牺牲氮化硅岛上并定向蚀刻以形成约为最小特征尺寸的十分之一的边缘限定的多晶硅点和带结构24。 边界定义的多晶硅条带和点形成在NMOS器件的源极和漏极区域之间。 在除去牺牲性氮化硅岛之后,边缘限定的多晶硅条和点用于掩蔽常规CMOS工艺中的阈值电压注入。 在去除边界限定的多晶硅条纹和点之后形成导电通道87和两个相邻的电位最小点89。
    • 6. 发明申请
    • DYNAMIC MEMORY BASED ON SINGLE ELECTRON STORAGE
    • 基于单电子存储的动态记忆
    • WO2002065507A2
    • 2002-08-22
    • PCT/US2002/002761
    • 2002-02-01
    • MICRON TECHNOLOGY, INC.
    • FORBES, LeonardAHN, Kie, Y.
    • H01L
    • B82Y10/00G11C2216/08H01L21/266H01L27/108H01L27/1203H01L29/7888Y10S438/947
    • A method for forming edge-defined structures with sub-lithographic dimensions which are used to further form conduction channels and/or storage structures in memory cells. Sacrificial silicon nitride islands are deposited at low temperatures and then patterned and etched by high resolution etching techniques. Polysilicon is next deposited over the sacrificial silicon nitride islands and directionally etched to form edge-defined polysilicon dot and strip structures which are about one tenth the minimum feature size. The edge-defined polysilicon strips and dots are formed between the source and drain region of an NMOS device. Subsequent to the removal of the sacrificial silicon nitride islands, the edge-defined polysilicon strips and dots are used to mask a threshold voltage implantation in a conventional CMOS process. A conduction channel and two adjacent potential minimum dots are formed after the removal of the edge-defined polysilicon strips and dots.
    • 用于形成具有亚光刻尺寸的边缘限定结构的方法,其用于在存储器单元中进一步形成传导通道和/或存储结构。 牺牲的氮化硅岛在低温下沉积,然后通过高分辨率蚀刻技术被图案化和蚀刻。 随后将多晶硅沉积在牺牲氮化硅岛上并定向蚀刻以形成约为最小特征尺寸的十分之一的边界限定的多晶硅点和带结构。 边界定义的多晶硅条带和点形成在NMOS器件的源极和漏极区域之间。 在去除牺牲性氮化硅岛之后,边缘限定的多晶硅条和点用于掩蔽常规CMOS工艺中的阈值电压注入。 在去除边界限定的多晶硅条纹和点之后,形成传导通道和两个相邻的电位最小点。
    • 7. 发明申请
    • INFORMATION PROCESSING STRUCTURE
    • 信息处理结构
    • WO01084634A1
    • 2001-11-08
    • PCT/JP2001/002469
    • 2001-03-27
    • H01L21/8247G11C11/34H01L27/10H01L29/06H01L29/66H01L29/78H01L29/788H01L29/792
    • B82Y10/00G11C11/34G11C2216/08H01L29/7613H01L29/7888
    • An information processing structure having a single-electron circuit stably operating at high speed by single-electron action is constituted by forming a plurality of quantum dots (13) of a nanometer-scale just above a gate electrode (12) of a microminiaturized MOSFET (11), constructing an energy barrier between the quantum dots and the gate electrode between which electrons can directly tunnel, and representing information by the total number of electrons migrating between the quantum dots and the gate electrode, wherein a power source electrode (14) which serves as a power source is provided in contact with the quantum dots between the quantum dots and the power source electrode (14) in such a way that an energy barrier through which electrons can directly tunnel is structure, two information electrodes (15) are formed in contact with a quantum dot in such a way that the quantum dot and the information electrode are capacitively coupled, and electrons migrate between the power source electrode and the gate electrode through the quantum dots by the Coulomb blockade phenomenon in accordance with the electric potential determined by the information electrodes.
    • 具有通过单电子作用高速稳定运行的单电子电路的信息处理结构通过在微型化的MOSFET的栅电极(12)的正上方形成纳米级的多个量子点(13) 在量子点和栅电极之间构造能量阻挡层,电子可以直接隧穿,并且通过在量子点和栅电极之间迁移的电子的总数来表示信息,其中电源电极(14) 用作与量子点和电源电极(14)之间的量子点接触的电源,使得电子可以直接隧道通过的能量势垒为结构,形成两个信息电极(15) 以量子点和信息电极电容耦合的方式与量子点接触,并且电子在电源之间迁移 电极和栅极通过量子点通过库仑阻塞现象根据由信息电极确定的电位。