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    • 1. 发明申请
    • β-NMR용 편극빔 생성 장치
    • 用于生成偏振光束的装置&Bgr; -NMR
    • WO2014065576A1
    • 2014-05-01
    • PCT/KR2013/009449
    • 2013-10-23
    • 기초과학연구원
    • 이주한김기동신택수김용균김선기
    • H01J27/02
    • H01J27/20H05H6/00
    • 본 발명에 따른 β-NMR용 편극빔 생성 장치는 양성자를 가속하여 양성자 빔을 생성하는 가속부; 가속부에서 가속된 양성자 빔이 충돌되어 일어나는 핵분리 반응에 의해 8Li이온이 함유된 혼합이온이 생성되는 다단의 9Be표적과, 9Be표적들 사이에 각각 개재되어 8Li이온을 정지시키고 중성화하는 레늄판을 포함하는 표적부; 레늄판을 가열하여 표적부에서 8Li원자를 + 1가의 이온으로 재이온화하여 탈출시키는 가열수단 및 레늄판에서 탈출된 8Li이온을 집속하여 8Li이온빔을 생성하는 집속부를 포함하는 것을 특징으로 한다.
    • 根据本发明的用于产生用于NMR的偏振光束的装置包括:用于加速质子以产生质子束的加速单元; 包括多级9Be靶的目标单元,其中由通过加速单元加速的质子束的碰撞引起的裂变裂变反应产生8Li离子的混合离子和插入在9Be靶之间的铼板 停止并中和8Li离子; 加热装置,用于加热铼板以将8Li原子重离子到一价离子,并使一价离子从目标单元逸出; 以及用于聚焦从铼板逸出的8Li离子以产生8Li离子束的聚焦单元。
    • 2. 发明申请
    • ANIONIC AND NEUTRAL PARTICULATE BEAMS
    • 阴离子和中性颗粒物
    • WO2006056975A2
    • 2006-06-01
    • PCT/IL2005/001230
    • 2005-11-21
    • TECHNION RESEARCH & DEVELOPMENT FOUNDATION LTD.KOLODNEY, EliBEKKERMAN, AnatolyTSIPINYUK, Boris
    • KOLODNEY, EliBEKKERMAN, AnatolyTSIPINYUK, Boris
    • H05F3/00C01B31/00B01J19/08
    • H01J49/16H01J27/20H01J27/26H01J49/14H05H3/02
    • An apparatus for the generation of anionic and neutral particulate beams is described. The apparatus comprises a duct defined by walls having an inner surface capable of sustaining a temperature above an electron emission temperature of the surface, so as to negatively charge electrically neutral particles being passed through the duct when the surface is heated to the temperature; a heating element for heating the inner surface to the temperature; and an acceleration electrode for ion-optically controlling and manipulating the negatively charged particles into the anion beam. The apparatus may further comprise a protection electrode defining a protected region, which substantially prevent emitted electrons from escaping the protected region. Moreover, a system for analyzing substances ejected from a surface of a sample bombarded with an anion beam generated by the apparatus is described. The system further comprises a detector for detecting the substances once ejected of the surface. Further, a method of generating an anion beam is described.
    • 描述了用于产生阴离子和中性粒子束的装置。 该装置包括由具有能够维持高于表面的电子发射温度的温度的内表面的壁限定的管道,以便当表面被加热到该温度时,对电中性颗粒进行负电荷通过管道; 用于将内表面加热至温度的加热元件; 以及用于离子光学地控制和操纵带负电的粒子进入阴离子束的加速电极。 该装置还可包括限定受保护区域的保护电极,其基本上防止发射的电子逸出受保护区域。 此外,描述了用于分析从由该装置产生的阴离子束轰击的样品的表面喷射的物质的系统。 该系统还包括用于检测一旦喷射出表面的物质的检测器。 此外,描述了产生阴离子束的方法。
    • 4. 发明申请
    • IONIZER FOR GAS CLUSTER ION BEAM FORMATION
    • 气体聚集离子束形成离子
    • WO01043160A1
    • 2001-06-14
    • PCT/US2000/033620
    • 2000-12-08
    • H01J27/20H01J37/08H01J49/04
    • H01J27/20H01J27/026H01J37/08H01J2237/0048H01J2237/0812
    • A neutral beam ionizing apparatus for electron impact ionization of a substantially cylindrical neutral beam. The apparatus includes an electron source, and a circularly cylindrical ionizing region that is substantially free of magnetic fields. In one embodiment of the invention, the beam is a gas cluster beam, and the electron source includes a heated filament for emitting thermions, the filament including one or more direction reversals shaped to produce self-nulling magnetic fields so as to minimize the magnetic field due to filament heating current. In another embodiment of the invention, a neutral beam ionizing apparatus for electron impact ionization of a substantially cylindrical neutral beam includes at least one electron source, and an elliptically cylindrical ionizing region. In one embodiment, the elliptically cylindrical ionizing region includes a pair of co-focal elliptically cylindrical electrodes biased so as to cause electrons emitted from the at least one electron source to orbit repeatedly through the axis of the beam to be ionized.
    • 一种用于大致圆柱形中性光束的电子轰击电离的中性束电离装置。 该装置包括电子源和基本上没有磁场的圆柱形电离区域。 在本发明的一个实施例中,光束是气体束束,并且电子源包括用于发射热电偶的加热灯丝,灯丝包括一个或多个成形为产生自归零磁场的方向反转,以使磁场最小化 由于灯丝加热电流。 在本发明的另一个实施例中,用于大致圆柱形中性光束的电子轰击电离的中性束离子化装置包括至少一个电子源和椭圆形电离区域。 在一个实施例中,椭圆柱形电离区域包括一对共焦椭圆柱形电极,其被偏置以使得从至少一个电子源发射的电子重复地穿过待离子束的光束的轴线。
    • 7. 发明申请
    • PRODUCTION OF ION BEAMS BY CHEMICALLY ENHANCED SPUTTERING OF SOLIDS
    • 通过化学增强固体溅射生产离子束
    • WO9010303A3
    • 1990-10-18
    • PCT/US9000677
    • 1990-02-06
    • VARIAN ASSOCIATES
    • ROSENBLUM STEPHEN SDONIGER KENNETH J
    • H01J27/20H01J37/08H01J
    • H01J37/08H01J27/20
    • A method for producing an ion beam for ion implantation by chemically enhanced bombardment of solids. The method is carried out in a reaction chamber having an anode and cathode and a cathode liner rich in a selected element, namely boron, arsenic, phosphorus or antimony. A non-poisonous feed gas is introduced into the reaction chamber and energy is supplied to the feed gas to generate a plasma in the reaction chamber. The constituents of the plasma react chemically with the selected element in the cathode liner and an electrical potential is established between the anode and the cathode so that ions in the plasma bombard the cathode liner. The chemical reaction and bombardment together generate an ion species in the plasma containing the selected element. A beam of ions containing the selected species is then extracted from the plasma.
    • 通过化学增强轰击固体来产生用于离子注入的离子束的方法。 该方法在具有阳极和阴极以及富含选定元素的阴极衬里(即硼,砷,磷或锑)的反应室中进行。 将无毒的原料气引入反应室中,并将能量供应给原料气以在反应室中产生等离子体。 等离子体的成分与阴极衬里中的选定元素发生化学反应,并且在阳极和阴极之间建立电势,使得等离子体中的离子轰击阴极衬里。 化学反应和轰击一起在包含选定元素的等离子体中产生离子种类。 然后从等离子体中提取含有所选物质的离子束。
    • 10. 发明申请
    • ANIONIC AND NEUTRAL PARTICULATE BEAMS
    • 阴离子和中性颗粒物
    • WO2006056975A3
    • 2007-06-28
    • PCT/IL2005001230
    • 2005-11-21
    • TECHNION RES & DEV FOUNDATIONKOLODNEY ELIBEKKERMAN ANATOLYTSIPINYUK BORIS
    • KOLODNEY ELIBEKKERMAN ANATOLYTSIPINYUK BORIS
    • H05F3/00B01J19/08C01B31/00H01J17/26H01J49/14
    • H01J49/16H01J27/20H01J27/26H01J49/14H05H3/02
    • An apparatus for the generation of anionic and neutral particulate beams is described. The apparatus comprises a duct defined by walls having an inner surface capable of sustaining a temperature above an electron emission temperature of the surface, so as to negatively charge electrically neutral particles being passed through the duct when the surface is heated to the temperature; a heating element for heating the inner surface to the temperature; and an acceleration electrode for ion-optically controlling and manipulating the negatively charged particles into the anion beam. The apparatus may further comprise a protection electrode defining a protected region, which substantially prevent emitted electrons from escaping the protected region. Moreover, a system for analyzing substances ejected from a surface of a sample bombarded with an anion beam generated by the apparatus is described. The system further comprises a detector for detecting the substances once ejected of the surface. Further, a method of generating an anion beam is described.
    • 描述了用于产生阴离子和中性粒子束的装置。 该装置包括由壁限定的管道,该管道具有能够维持高于表面的电子发射温度的温度的内表面,以便当表面被加热到该温度时,对电中性颗粒进行负电荷通过管道; 用于将内表面加热至温度的加热元件; 以及用于对带负电的粒子进行阴离子束的离子光学控制和操作的加速电极。 该装置还可以包括限定受保护区域的保护电极,其基本上防止发射的电子逸出受保护区域。 此外,描述了用于分析从由该装置产生的阴离子束轰击的样品的表面喷射的物质的系统。 该系统还包括用于检测一旦喷射出表面的物质的检测器。 此外,描述了产生阴离子束的方法。