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1. 发明申请

WO1998026445A1 METHOD OF OPERATING AN ION TRAP MASS SPECTROMETER 审中-公开
标题翻译：操作离子质谱仪的方法
公开(公告)号：WO1998026445A1
公开(公告)日：1998-06-18
申请号：PCT/US1997020871
申请日：1997-11-13
申请人： VARIAN ASSOCIATES, INC.
发明人： VARIAN ASSOCIATES, INC. , BUTTRILL, Sydney, E.
IPC分类号： H01J49/42
CPC分类号： H01J49/428
摘要： A method of operating a quadrupole ion trap as a mass spectrometer, in which the ion mass to be detected is selected by adjusting the three-dimensional quadrupole storage field to make the beta z value of the selected mass equal to a fixed, predetermined beta z value of a narrow range of frequencies excluded from a broadband supplemental RF electric field. The ions are detected to provide a signal corresponding to the amount of the selected ion mass.
摘要翻译：操作四极离子阱作为质谱仪的方法，其中通过调节三维四极存储场来选择要检测的离子质量，以使选定质量的βz值等于固定的预定βz 从宽带补充RF电场排除的窄频率范围的值。检测离子以提供对应于所选离子质量的量的信号。

2. 发明申请

WO1998002901A1 METHOD FOR INJECTION OF EXTERNALLY PRODUCED IONS INTO A QUADRUPOLE ION TRAP 审中-公开
标题翻译：将外部生成的离子注入四倍体离子阱的方法
公开(公告)号：WO1998002901A1
公开(公告)日：1998-01-22
申请号：PCT/US1997010104
申请日：1997-07-08
申请人： VARIAN ASSOCIATES, INC.
发明人： VARIAN ASSOCIATES, INC. , MORDEHAI, Alex , BUTTRILL, Sidney, E., Jr.
IPC分类号： H01J49/42
CPC分类号： H01J49/4295 , H01J49/424
摘要： A method of ion collection over a wide mass-to-charge range from continuous ion source into a quadrupole ion trap filled with a buffer gas directing an ion beam, from an external ion source to a radio frequency ion trap through a gating device for a predetermined period of accumulation time to allow the beam to enter the trap, trapping ions over a range of masses by applying a radio frequency voltage to the trap and changing an amplitude of the radio frequency voltage adiabatically to achieve a uniform trapping efficiency for ions over a predetermined mass range. The predetermined period of accumulation time may be divided into a plurality of segments, and the amplitude of the radio-frequency voltage is changing adiabatically within each segment.
摘要翻译：一种在从连续离子源到充满缓冲气体的四极离子阱的宽质量 - 电荷范围内的离子收集方法，该缓冲气体从外部离子源到射频离子阱通过选通装置引导离子束预定的累积时间，以允许光束进入陷阱，通过向陷阱施加射频电压而在一定范围的质量上捕获离子，并绝热地改变射频电压的振幅，以实现离子超过一定范围的均匀俘获效率预定质量范围。累积时间的预定周期可以被划分成多个段，并且射频电压的幅度在每个段内都是绝热的。

3. 发明申请

WO1997038325A1 FLOW TUBE FOR NMR PROBE 审中-公开
标题翻译：核磁共振探头的流管
公开(公告)号：WO1997038325A1
公开(公告)日：1997-10-16
申请号：PCT/US1997005456
申请日：1997-04-02
申请人： VARIAN ASSOCIATES, INC.
发明人： VARIAN ASSOCIATES, INC. , HANER, Ronald
IPC分类号： G01R33/30
CPC分类号： G01R33/307
摘要： A three-piece NMR detection cell comprises an inlet tube (210) having a conically tapered outlet nozzle, leading to an analysis tube (220), in turn leading to an outlet tube (215) having a conically tapered inlet nozzle. The inlet and outlet tubes are inserted into the analysis tube at a distance from their inserted ends and sealed in a manner appropriate to their composition. When the detection cell is used in a coupled HPLC-NMR apparatus, increased NMR sensitivity and improved lineshape are obtained at low injection volumes while maintaining a low level of chromatographic band broadening and a high level of magnetic field homogeneity.
摘要翻译：三体式核磁共振检测单元包括具有锥形锥形出口喷嘴的入口管（210），导入分析管（220），然后通向具有锥形入口喷嘴的出口管（215）。入口管和出口管在与其插入端相距一定距离处插入分析管中，并以适合其组成的方式密封。当在耦合的HPLC-NMR装置中使用检测单元时，在低注射体积下获得提高的NMR灵敏度和改善的线形，同时保持低水平的色谱带宽度和高水平的磁场均匀性。

4. 发明申请

WO9523427A3 APPARATUS FOR THERMAL TREATMENT OF THIN FILM WAFER 审中-公开
标题翻译：薄膜薄膜热处理设备
公开(公告)号：WO9523427A3
公开(公告)日：1995-12-28
申请号：PCT/US9502008
申请日：1995-02-15
申请人： VARIAN ASSOCIATES , KYUNG HYUN SU , CHOI WON SONG , SHIN JUNG HO
发明人： KYUNG HYUN-SU , CHOI WON-SONG , SHIN JUNG-HO
IPC分类号： C30B25/12 , C30B31/14 , C30B35/00 , H01L21/00 , H01L
CPC分类号： H01L21/67115 , C30B25/12 , C30B31/14 , C30B35/005
摘要： The apparatus of the present invention is for the thermal treatment of a thin film wafer (200) and includes a vacuum chamber, a heater block (52), a holding clamp (60) for receiving the heater block and for holding a wafer (200) and which includes a specific weight to press the wafer against the heater block, a wafer supply means (70) for supplying the wafer to, positioning the wafer on and removing the wafer from the holding clamp, and an elevator means (80) for moving the holding clamp toward and away from the heater block to permit thermal treatment of the wafer in the vacuum chamber. The present invention advantageously supplies and removes the wafer together with minimizing damage to the wafer due to excess clamping force.

5. 发明申请

WO1995023427A2 APPARATUS FOR THERMAL TREATMENT OF THIN FILM WAFER 审中-公开
标题翻译：薄膜薄膜热处理设备
公开(公告)号：WO1995023427A2
公开(公告)日：1995-08-31
申请号：PCT/US1995002008
申请日：1995-02-15
申请人： VARIAN ASSOCIATES, INC. , KYUNG, Hyun-Su , CHOI, Won-Song , SHIN, Jung-Ho
发明人： VARIAN ASSOCIATES, INC.
IPC分类号： H01L00/00
CPC分类号： H01L21/67115 , C30B25/12 , C30B31/14 , C30B35/005
摘要： The apparatus of the present invention is for the thermal treatment of a thin film wafer and includes a vacuum chamber, a heater block, a holding clamp for receiving the heater block and for holding a wafer and which includes a specific weight to press the wafer against the heater block, a wafer supply means for supplying the wafer to, positioning the wafer on and removing the wafer from the holding clamp, and an elevator means for moving the holding clamp toward and away from the heater block to permit thermal treatment of the wafer in the vacuum chamber. The present invention advantageously supplies and removes the wafer together with minimizing damage to the wafer due to excess clamping force.
摘要翻译：本发明的装置用于对薄膜晶片进行热处理，包括真空室，加热器块，用于接收加热器块并用于保持晶片的保持夹具，其包括一个比重以将晶片压在一起加热器块，用于供应晶片以将晶片定位在夹持夹具上并从晶片上移除的晶片供给装置，以及用于使保持夹具朝向和远离加热器块移动以允许对晶片进行热处理的升降装置在真空室中。本发明有利地提供和去除晶片，同时由于过度的夹持力而使对晶片的损坏最小化。

6. 发明申请

WO1994029036A1 WAFER RETAINING PLATEN AND LIFTING MEANS 审中-公开
标题翻译：保温板和提升装置
公开(公告)号：WO1994029036A1
公开(公告)日：1994-12-22
申请号：PCT/US1994006708
申请日：1994-06-13
申请人： VARIAN ASSOCIATES, INC.
发明人： VARIAN ASSOCIATES, INC. , FREYTSIS, Avrum , HERTEL, Richard, J.
IPC分类号： B05C13/00
CPC分类号： H01L21/68721 , H01L21/68742 , Y10T29/41 , Y10T279/247
摘要： An apparatus for releasably holding a workpiece in semiconductor processing systems such as a batch ion implanter which comprises a linkage mechanism mounted onto the backside of a platen for clamping a wafer (2) against a fence (1A) of a supporting means (1) and a pusher means (11) mounted on a wafer lift means (13) for engagement with a lever mechanism (5, 6, 7, 9, 10, 15) for locking and unlocking the device, and sensing any misclamp of the workpiece.
摘要翻译：一种用于将诸如批量离子注入机的半导体处理系统中的可释放地保持工件的装置，其包括安装在压板的背面上的连杆机构，用于将晶片（2）夹持在支撑装置（1）的挡板（1A）上，以及安装在晶片提升装置（13）上的推动装置（11），用于与用于锁定和解锁装置的杆机构（5,6,7,9,10,15）接合，并感测工件的任何错误的夹紧。

7. 发明申请

WO1994024840A2 THIN FILM HEAT TREATMENT APPARATUS 审中-公开
标题翻译：薄膜热处理设备
公开(公告)号：WO1994024840A2
公开(公告)日：1994-11-10
申请号：PCT/US1994004629
申请日：1994-04-26
申请人： VARIAN ASSOCIATES, INC. , KIM, Yong-Kil
发明人： VARIAN ASSOCIATES, INC.
IPC分类号： C21D1/00 , H01L21/00 , H01L21/22 , H01L21/324
CPC分类号： H01L21/67103
摘要： The thin film heat treatment apparatus for heating the wafers or foil sheets is equipped with a vacuum chamber, a heater table placed inside a vacuum chamber, a heat radiation preventing device that is installed adjacent to the heater table and forms a space with the top of the heater table by wrapping the foil sheet or wafer placed closely on the top of the heater table.
摘要翻译：用于加热晶片或箔片的薄膜热处理装置配备有真空室，放置在真空室内的加热台，防辐射装置，其安装在加热台附近并形成具有顶部的空间通过将箔片或晶片紧密地放置在加热器台的顶部上来加热加热台。

8. 发明申请

WO1993008587A1 IMPROVED METAL CENTER X-RAY TUBE 审中-公开
标题翻译：改进的金属中心X射线管
公开(公告)号：WO1993008587A1
公开(公告)日：1993-04-29
申请号：PCT/US1992008836
申请日：1992-10-15
申请人： VARIAN ASSOCIATES, INC.
发明人： VARIAN ASSOCIATES, INC. , HEITING, Robert, F. , TRESEDER, Robert, C. , GREEN, Brian, D.
IPC分类号： H01J35/10
CPC分类号： H01J35/16 , H01J2235/168
摘要： An improved metal center (70) rotating anode x-ray tube (400) is shown. The improved x-ray tube includes means for preventing the build-up of charge on the anode glass portion (480) of the tube envelope where the glass flares (486) by constraining the equipotential lines of the electric field in the vicinity of the flare to parallel the flare surface. Parallelism may be achieved by controlling the angle of flare and sealing the flare directly to the metal section (70), modifying the anode rotor (450) to include a flare conforming to the glass flare (486), and including a ground plane screen in the tube housing.

9. 发明申请

WO1992000567A1 COMPUTED TOMOGRAPHY APPARATUS USING IMAGE INTENSIFIER DETECTOR 审中-公开
标题翻译：使用图像增强器检测器的计算机图像设备
公开(公告)号：WO1992000567A1
公开(公告)日：1992-01-09
申请号：PCT/US1991004778
申请日：1991-07-02
申请人： VARIAN ASSOCIATES, INC.
发明人： VARIAN ASSOCIATES, INC. , SEPPI, Edward, J. , SHAPIRO, Edward, G. , ANDERSON, Robert, L.
IPC分类号： G06F15/42
CPC分类号： H05G1/64 , A61B6/032 , A61B6/548 , A61B6/583 , H04N5/32 , Y10S128/92
摘要： Disclosed is a low cost computer tomographic (CT) scanner system specifically designed for radiation therapy treatment planning. A 512-channel photo-diode array (44) with digitizing electronics converts image intensifier (40) optical projection data directly into digital signals and has a dynamic range on the order of 1000,000:1. The new simulator includes a rotating gantry, an X-ray generator (30) with radiographic and fluoroscopic modes and a therapy style patient support assembly. Results on head and body size phantoms indicate that the simulator X-ray generator and image intensifier tube (IIT) (40) with multi-channel photo-detector (44) can produce photon statistic limited CT images. Software and hardware compensation methods are described which minimize geometrical distortions. Low noise, high input impedance electronics are employed which are phase locked to the line frequency. A dual sample interval method is employed which effectively increases the range of the digital signal produced by the front-end electronics by three additional bits.
摘要翻译：公开了专门用于放射治疗治疗计划的低成本计算机断层摄影（CT）扫描仪系统。具有数字化电子设备的512通道光电二极管阵列（44）将图像增强器（40）的光学投影数据直接转换为数字信号，并具有大约1000,000:1的动态范围。新的模拟器包括旋转机架，具有射线照相和透视模式的X射线发生器（30）和治疗方式的患者支架组件。头部和体型模型的结果表明，具有多通道光电探测器（44）的模拟器X射线发生器和图像增强管（II）（40）可以产生光子统计有限的CT图像。描述了最小化几何失真的软件和硬件补偿方法。使用低噪声，高输入阻抗电子器件，其被锁相到线路频率。采用双采样间隔方法，其通过三个附加位有效地增加由前端电子器件产生的数字信号的范围。

10. 发明申请

WO1991017459A1 METHOD OF MEASURING TOTAL IONIZATION CURRENT IN A SEGMENTED IONIZATION CHAMBER 审中-公开
标题翻译：测量离子化室中总放电电流的方法
公开(公告)号：WO1991017459A1
公开(公告)日：1991-11-14
申请号：PCT/US1991003013
申请日：1991-05-02
申请人： VARIAN ASSOCIATES, INC.
发明人： VARIAN ASSOCIATES, INC. , JOHNSEN, Stanley, Woodrow
IPC分类号： G01T01/18
CPC分类号： G01T1/185
摘要： Information on radiation dosage from segmented ionization chambers (10) can be incomplete due to the existence of insensitive regions of the chamber. By measuring the total current to the high voltage power supply (16), the total ionization current including that in the insensitive areas can be estimated, thereby providing a measure of the dosage to the insensitive areas.

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