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1. 发明申请

WO2006062616A3 GALVANICALLY ISOLATED SIGNAL CONDITIONING SYSTEM 审中-公开
标题翻译：高效隔离信号调节系统
公开(公告)号：WO2006062616A3
公开(公告)日：2007-03-15
申请号：PCT/US2005039110
申请日：2005-10-28
申请人： ANALOG DEVICES INC , WYNNE JOHN , HYNES EAMON
发明人： WYNNE JOHN , HYNES EAMON
IPC分类号： B81B7/02 , B81B7/04
CPC分类号： G01D5/24 , G11C27/024 , H01H2059/0054
摘要： A galvanically isolated signal conditioning system (10) includes a signal conditioning circuit (12) on an integrated circuit chip (16); a flying capacitor (36); and a galvanically isolating MEMS switching device (14) on an integrated circuit chip (16) for selectively switching the flying capacitor (36) from across a pair of input terminals (32, 34) in one state to across the input terminals (48, 50) of the signal conditioning circuit (12) in another state.
摘要翻译：电隔离信号调理系统（10）包括集成电路芯片（16）上的信号调理电路（12）; 飞行电容器（36）; 以及集成电路芯片（16）上的电隔离MEMS开关器件（14），用于在一个状态下跨越一对输入端子（32,34）选择性地切换所述快速电容器（36）跨过所述输入端子 50）在另一状态下的信号调理电路（12）。

2. 发明申请

WO2010107876A1 MOVING A FREE-STANDING STRUCTURE BETWEEN HIGH AND LOW ADHESION STATES 审中-公开
标题翻译：移动高粘度和低粘结状态之间的自由结构
公开(公告)号：WO2010107876A1
公开(公告)日：2010-09-23
申请号：PCT/US2010/027603
申请日：2010-03-17
申请人： CAVENDISH KINETICS, INC. , SMITH, Charles, Gordon , KNIPE, Richard, L.
发明人： SMITH, Charles, Gordon , KNIPE, Richard, L.
IPC分类号： H01H1/00 , H01H59/00 , G11C23/00
CPC分类号： H01H59/0009 , G11C23/00 , H01H1/0036 , H01H2001/0047 , H01H2059/0036 , H01H2059/0054 , H01H2059/0063
摘要： Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.
摘要翻译：本文公开的实施例通过使用一系列将开关牢固地粘附到着陆电极到其仅弱附着的位置的力脉冲来解决开关器件中的静电问题。一旦处于低附着状态，则可以用由开关的弹簧常数提供的较小的力和/或施加到附近的电极的低电压产生的静电力将开关拉离开接触。

3. 发明申请

WO03092048B1 MICRO ELECTRO-MECHANICAL SYSTEM METHOD 审中-公开
标题翻译：微机电系统方法
公开(公告)号：WO03092048B1
公开(公告)日：2004-10-07
申请号：PCT/US0308255
申请日：2003-03-17
申请人： MOTOROLA INC
发明人： ELIACIN MANES , LIAN KERYN , LIU JUNHUA , LEMPKOWSKI ROBERT B
IPC分类号： B81C1/00 , B81B3/00 , H01H59/00 , H01P1/10
CPC分类号： H01H59/0009 , H01G5/16 , H01H2001/0073 , H01H2059/0054
摘要： A meso-scale MEMS device having a cantilevered beam (113) is formed using standard printed wiring board and high density interconnect technologies and practices. The beam includes at least some polymer material (71) to constitute its length, and in some embodiments also comprises a conductive material as a load-bearing component thereof. In varying embodiments, the beam is attached at a location proximal to an end thereof, or distal to an end thereof.
摘要翻译：使用标准印刷线路板和高密度互连技术和实践形成具有悬臂梁（113）的中尺度MEMS器件。梁包括至少一些聚合物材料（71）以构成其长度，并且在一些实施例中还包括导电材料作为其承载部件。在不同的实施例中，梁被附接在靠近其端部或远离其端部的位置处。

4. 发明申请

WO2017134518A1 ACTIVE OPENING MEMS SWITCH DEVICE 审中-公开
标题翻译：主动开启MEMS开关装置
公开(公告)号：WO2017134518A1
公开(公告)日：2017-08-10
申请号：PCT/IB2017/000131
申请日：2017-02-02
申请人： ANALOG DEVICES GLOBAL
发明人： TWOHIG, Michael, James , FITZGERALD, Padraig
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0027 , H01H2059/0054
摘要： Microelectromechanical systems (MEMS) switches are described. The MEMS switches can be actively opened and closed. The switch can include a beam coupled to an anchor on a substrate by one or more hinges. The beam, the hinges and the anchor may be made of the same material in some configurations. The switch can include electrodes, disposed on a surface of the substrate, for electrically controlling the orientation of the beam. The hinges may be thinner than the beam, resulting in the hinges being more flexible than the beam. In some configurations, the hinges are located within an opening in the beam. The hinges may extend in the same direction of the axis of rotation of the beam and/or in a direction perpendicular to the axis of rotation of the beam.
摘要翻译：描述了微机电系统（MEMS）开关。 MEMS开关可以主动打开和关闭。开关可以包括通过一个或多个铰链耦合到衬底上的锚的梁。在一些配置中，梁，铰链和锚可以由相同的材料制成。开关可以包括设置在基板表面上的电极，用于电控制光束的取向。铰链可以比梁更薄，导致铰链比梁更加灵活。在一些配置中，铰链位于梁中的开口内。铰链可以在与梁的旋转轴线相同的方向上和/或在垂直于梁的旋转轴线的方向上延伸。

5. 发明申请

WO2004013898A3 SEALED INTEGRAL MEMS SWITCH 审中-公开
标题翻译：密封整体MEMS开关
公开(公告)号：WO2004013898A3
公开(公告)日：2004-06-10
申请号：PCT/US0324255
申请日：2003-08-04
申请人： PASHBY GARY JOSEPH , SIVERTA INC , SLATER TIMOTHY G
发明人： PASHBY GARY JOSEPH , SLATER TIMOTHY G
IPC分类号： H01H59/00 , H01P1/10 , H01P1/12
CPC分类号： H01P1/127 , H01H59/0009 , H01H2059/0054
摘要： A MEMS switch includes a micro-machined monolithic layer (122) having, a seesaw (52), a pair of torsion bars (66a, 66b), and a frame (64). The frame (64) supports the seesaw (52) for rotation about an axis (68) established by the torsion bars (66a, 66b). Shorting bars (58a, 58b) at ends of the seesaw (52) connect across pairs of switch contacts (56a1, 56a2, 56b1, 56b2) carried on a substrate (174) bonded to one surface of the layer (122). A base (104) is also joined to a surface of the layer (122) opposite the substrate (174). The substrate (174) carries electrodes (54a, 54b) for applying forces to the seesaw (52) urging it to rotate about the axis (68). An electrical contact island (152) supported at a free end of a cantilever (166) ensures good electrical conduction between ground plates (162a, 162b) on the layer (122) and electrical conductors on the substrate (174).
摘要翻译： MEMS开关包括具有跷跷板（52），一对扭杆（66a，66b）和框架（64）的微加工整体层（122）。框架（64）支撑用于围绕由扭杆（66a，66b）建立的轴线（68）旋转的跷跷板（52）。在跷跷板（52）的端部处的短路棒（58a，58b）连接在承载在层（122）的一个表面上的衬底（174）上的开关触点（56a1,56a2,56b1,5Bb2）对上。基底（104）也与衬底（174）相对的层（122）的表面接合。衬底（174）承载用于向跷跷板（52）施力的电极（54a，54b），以推动其围绕轴线（68）旋转。支撑在悬臂（166）的自由端的电接触岛（152）确保层（122）上的接地板（162a，162b）和衬底（174）上的电导体之间良好的电导通。

6. 发明申请

WO1995017760A1 PLANAR SOLENOID RELAY AND PRODUCTION METHOD THEREOF 审中-公开
标题翻译：平面电磁继电器及其生产方法
公开(公告)号：WO1995017760A1
公开(公告)日：1995-06-29
申请号：PCT/JP1994002063
申请日：1994-12-08
申请人： THE NIPPON SIGNAL CO., LTD. , ESASHI, Masayoshi , ASADA, Norihiro
发明人： THE NIPPON SIGNAL CO., LTD.
IPC分类号： H01H51/26
CPC分类号： H01H50/005 , H01H1/20 , H01H2050/007 , H01H2050/025 , H01H2059/0054
摘要： This invention relates to a thin and compact solenoid relay produced by employing semiconductor production technique. A flat sheet-like movable plate (5) and a torsion bar (6) for pivotally supporting the movable plate (5) are integrally formed on a silicon substrate (2) by employing semiconductor production technique. A flat surface coil (7) is disposed on the upper surface of the movable plate (5) and a movable contact (9), on the lower surface side. Further, glass substrates (3) and (4) are disposed on the upper and lower surfaces of the silicon substrate (2), and a fixed contact (11) capable of coming into contact with the movable contact (9) is disposed on the lower glass substrate (4). Permanent magnets (13A, 13B and 14A, 14B for causing a magnetic field to act ont the flat surface coil are fixedly disposed on the glass substrates (3) and (4). Power is fed to the flat surface coil (7) to generate the magnetic force so as to rotate the movable plate (5) against torsion of the torsion bar (6) and to bring the movable contact (9) and the fixed contact (11) into contact with, or out of contact from, each other.
摘要翻译：本发明涉及采用半导体生产技术制造的薄而紧凑的电磁继电器。通过采用半导体制造技术，在硅基板（2）上一体地形成用于枢转地支撑可动板（5）的平板状可动板（5）和扭杆（6）。平面表面线圈（7）设置在可动板（5）的上表面和可动触头（9）的下表面侧。此外，玻璃基板（3）和（4）设置在硅基板（2）的上表面和下表面上，并且能够与可动触头（9）接触的固定触头（11）设置在下玻璃基板（4）。在玻璃基板（3）和（4）上固定设置永磁体（13A，13B，14A，14B，使磁场作用在平面线圈上）供给平面线圈（7）磁力使得可移动板（5）抵抗扭杆（6）的扭转而旋转，并使可动触头（9）和固定触头（11）彼此接触或脱离接触。

7. 发明申请

WO2005069331A1 LOW-VOLTAGE MICRO-SWITCH ACTUATION TECHNIQUE 审中-公开
标题翻译：低电压微动开关技术
公开(公告)号：WO2005069331A1
公开(公告)日：2005-07-28
申请号：PCT/US2004/036359
申请日：2004-11-02
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , PIRELLI & C. S.P.A.? , NIELSON, Gregory, N. , BARBASTATHIS, George
发明人： NIELSON, Gregory, N. , BARBASTATHIS, George
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H47/00 , H01H2059/0054
摘要： An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.
摘要翻译：机电开关结构包括至少一个固定电极和自由电极，该电极可在结构中移动，在每个固定电极和自由的可移动电极之间施加电压电位。施加在每个固定电极和可动电极之间的电压被调制以致动机电开关结构。

8. 发明申请

WO2004013898A2 SEALED INTEGRAL MEMS SWITCH 审中-公开
标题翻译：密封整体式MEMS开关
公开(公告)号：WO2004013898A2
公开(公告)日：2004-02-12
申请号：PCT/US2003/024255
申请日：2003-08-04
申请人： SIVERTA, INC. , PASHBY, Gary, Joseph , SLATER, Timothy, G.
发明人： PASHBY, Gary, Joseph , SLATER, Timothy, G.
IPC分类号： H01L
CPC分类号： H01P1/127 , H01H59/0009 , H01H2059/0054
摘要： A MEMS switch includes a micro-machined monolithic layer (122) having, a seesaw (52), a pair of torsion bars (66a, 66b), and a frame (64). The frame (64) supports the seesaw (52) for rotation about an axis (68) established by the torsion bars (66a, 66b). Shorting bars (58a, 58b) at ends of the seesaw (52) connect across pairs of switch contacts (56a1, 56a2, 56b1, 56b2) carried on a substrate (174) bonded to one surface of the layer (122). A base (104) is also joined to a surface of the layer (122) opposite the substrate (174). The substrate (174) carries electrodes (54a, 54b) for applying forces to the seesaw (52) urging it to rotate about the axis (68). An electrical contact island (152) supported at a free end of a cantilever (166) ensures good electrical conduction between ground plates (162a, 162b) on the layer (122) and electrical conductors on the substrate (174).
摘要翻译： MEMS开关包括具有跷跷板（52），一对扭杆（66a，66b）和框架（64）的微机械单片层（122）。框架（64）支撑跷跷板（52）以围绕由扭杆（66a，66b）建立的轴线（68）旋转。在跷跷板52的端部处的短路杆58a，58b连接跨接在承载在层122的一个表面上的基板174上的成对开关触点56a1,56a2,56b1,56b2。基底（104）也连接到与衬底（174）相对的层（122）的表面。衬底（174）携带用于向跷跷板（52）施加力的电极（54a，54b），迫使其围绕轴线（68）旋转。支撑在悬臂（166）的自由端处的电接触岛（152）确保了层（122）上的接地板（162a，162b）与衬底（174）上的电导体之间的良好导电。

9. 发明申请

WO03092048A2 MICRO ELECTRO-MECHANICAL SYSTEM METHOD 审中-公开
标题翻译：微电子机械系统方法
公开(公告)号：WO03092048A2
公开(公告)日：2003-11-06
申请号：PCT/US0308255
申请日：2003-03-17
申请人： MOTOROLA INC
发明人： ELIACIN MANES , LIAN KERYN , LIU JUNHUA , LEMPKOWSKI ROBERT B
IPC分类号： B81C1/00 , B81B3/00 , H01H59/00 , H01L
CPC分类号： H01H59/0009 , H01G5/16 , H01H2001/0073 , H01H2059/0054
摘要： A meso-scale MEMS device having a cantilevered beam is formed using standard printed wiring board and high density interconnect technologies and practices. The beam includes at least some polymer material to constitute its length, and in some embodiments also comprises a conductive material as a load-bearing component thereof. In varying embodiments, the beam is attached at a location proximal to an end thereof, or distal to an end thereof.
摘要翻译：使用标准印刷线路板和高密度互连技术和实践形成具有悬臂梁的中尺度MEMS器件。梁包括构成其长度的至少一些聚合物材料，并且在一些实施例中还包括作为其承载部件的导电材料。在不同的实施例中，梁被附接在靠近其端部的位置处，或者远离其端部。

10. 发明申请

WO01057901A1 MICRORELAY 审中-公开
标题翻译：微继电器
公开(公告)号：WO01057901A1
公开(公告)日：2001-08-09
申请号：PCT/DE2001/000389
申请日：2001-02-01
IPC分类号： B81B3/00 , H01H1/20 , H01H59/00
CPC分类号： H01H59/0009 , H01H1/20 , H01H2059/0054
摘要： The invention relates to a microrelay that comprises a switch element (9) suspended on a substrate (1) so as to be pivotable. Said switch element can be displaced, like a rocker, between two alternative switch modes by electrostatic attraction by means of suitably mounted electrodes (51, 52, 6). The switch is actuated by electrodes (31, 32) that are mounted on the substrate above the rocker and that are short-circuited by metallizations (71, 72) on the upper side of the switch element.
摘要翻译：微型继电器具有一个基底（1）上被可旋转地悬挂切换部（9），其可以在通过静电吸引的摇杆的方式通过适当地安装的电极（51，52，6）在两个替代的开关状态的方式进行移动。的切换功能被实现在其上安装所述摇臂上方穿过金属化（71,72）到基材上的电极（31，32）被短路的开关部的上表面上。

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