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    • 1. 发明申请
    • MULTI-TOOL POSITIONING SYSTEM
    • 多工具定位系统
    • WO1997034206A1
    • 1997-09-18
    • PCT/US1997003385
    • 1997-03-04
    • ELECTRO SCIENTIFIC INDUSTRIES, INC.CUTLER, Donald, R.PAILTHORP, Robert, M.UNRATH, Mark, A.RICHARDSON, Thomas, W.CABLE, Alan, J.
    • ELECTRO SCIENTIFIC INDUSTRIES, INC.
    • G05B19/39
    • B23K26/08B23K26/082B23K26/083B23K26/0853G05B19/39G05B2219/34047G05B2219/34391G05B2219/36029G05B2219/41331G05B2219/42209G05B2219/42219G05B2219/45041G05B2219/45139H05K3/0008H05K3/0017H05K3/0038H05K2203/0165H05K2203/108
    • A multi-rate, multi-head positioner (150) receives and processes unpanelized positioning commands to actuate slow stages (56, 58) and multiple fast stages (154) that are mounted on one of the slow stages to simultaneously position multiple tools (156) relative to target locations (162) on multiple associated workpieces (152). Each of the fast stages is coupled to a fast stage signal processor (172) that provides corrected position data to each fast stage positioner to compensate for fast stage nonlinearities and workpiece placement, offset, rotation, and dimensional variations among the multiple workpieces. When cutting blind via holes in etched circuit boards (ECBs), improved throughput and process yield are achieved by making half of the tools ultraviolet ("UV") lasers, which readily cut conductor and dielectric layers, and making the other half of the tools are infrared ("IR") lasers, which readily cut only dielectric layers. The UV lasers are controlled to cut an upper conductor layer and a portion of an underlying dielectric layer, and the IR lasers are controlled to cut the remaining dielectric layer without cutting through or damaging a second underlying conductor layer. The throughput is increased by cutting conductor layers in unprocessed ECBs while concurrently cutting dielectric layers in ECBs that have already had their conductor layer cut. The process yield is increased by performing a workpiece calibration prior to each cutting step to account for any ECB placement, offset, rotation, and dimensional variations.
    • 多速率多头定位器(150)接收和处理未通用的定位命令以致动缓慢级(56,58)和多个快速级(154),所述缓慢级(56,58)和多级快速级(154)安装在所述慢速级中的一级以同时定位多个工具 )相对于多个相关工件(152)上的目标位置(162)。 每个快速级耦合到快速级信号处理器(172),其向每个快速定位器提供校正的位置数据,以补偿多个工件之间的快速阶段非线性和工件放置,偏移,旋转和尺寸变化。 在蚀刻电路板(ECB)中通过盲孔切割盲孔时,通过制造一半的工具紫外线(“UV”)激光器可以实现提高的产量和工艺产量,这些激光器易于切割导体和电介质层,并使另一半的工具 是红外线(“IR”)激光器,其易于切割电介质层。 控制UV激光器以切割上导体层和底层电介质层的一部分,并且IR激光器被控制以切割剩余的电介质层而不切割或损坏第二下面的导体层。 通过在未加工的ECB中切割导体层,同时切割已经具有导体层切割的ECB中的电介质层,从而提高了生产量。 通过在每个切割步骤之前执行工件校准以考虑任何ECB放置,偏移,旋转和尺寸变化来增加工艺屈服。
    • 3. 发明申请
    • METHOD AND DEVICE FOR ADJUSTING AN ELEMENT
    • 方法和一种用于调节元素
    • WO0159531A3
    • 2002-03-07
    • PCT/EP0101454
    • 2001-02-09
    • HOCHE RANDOLF
    • HOCHE RANDOLF
    • G05B13/04G05B19/19
    • G05B19/19G05B13/042G05B2219/41331G05B2219/41367
    • The invention relates to a method and a device, whereby a galvanometer actuator (7) that is connected to the element and a control unit are provided. Said unit generates a control signal for the actuator for adjusting the element according to a desired position time history that can be freely predetermined, whereby the control unit detects the control signal by means of the desired position time history and by considering a model (4) consisting of the unit of the actuator and the element. Said model is a time discrete state space model and is selected in such a way that said model can predict the position time history of the element for a time history of the control signal and with predetermined exactness, whereby said time history of the control signal can be freely predetermined. The predetermined desired position time history is verified by the control unit and by means of a preliminary filter and is modified with regard to the feasibility thereof if required. A position sensor is provided which generates a position signal according to the position of the element and supplies said signal to the control unit that considers said position signal during detection of the control signal. Detection of the control signal by means of the model is only carried out at predetermined control times of the desired position time history. The value of the control signal is detected at a control time by requesting that the summed-up, weighted difference between the desired position and the position predicted by the model becomes minimal for the next control times for said value of the control signal. The thus detected value of the control signal is applied at least until the next control time.
    • 本发明涉及一种方法和一种装置,与元件检流计致动器(7)以及控制单元相关联的服务被提供,其提供了根据一个自由预定标定时间位置曲线考虑到模型用于致动器的元件的致动信号 (4)从所述致动器和元件,其中所述模型是离散时间状态空间模型,并确定了单元的被选择为使得它可以预测在元件的时间过程中的相应位置以预定的精度的控制信号,的一个可自由预定的时间特性,其特征在于所述预定 是所希望的位置曲线从所述控制单元,并且如果需要通过预过滤器检查在其存活力,其特征在于,提供了一种位置传感器,其提供对应于该元件的位置,并且控制单元的位置信号的多个术语修饰用品在Ermittlu所述位置信号 该控制信号,其中,从所述模型中的促动信号的判定仅在目标位置历史的时间预定的控制点发生深思熟虑的NG,则控制信号的值是目标位置历史的一个控制的时间点,所述控制信号的值的控制 时间是由它要求该目标位置和下一个控制时间模型位置的用于控制信号的这个值verhergesagten之间的积累,加权差分是最小的,而事实上确定其中至少所述控制信号的这样确定的值 被施加到随后的控制定时。
    • 4. 发明申请
    • VERFAHREN UND VORRICHTUNG ZUM VERSTELLEN EINES ELEMENTS
    • 方法和一种用于调节元素
    • WO2004083968A2
    • 2004-09-30
    • PCT/EP2004/002900
    • 2004-03-19
    • OLYMPUS BIOSYSTEMS GMBHBAIGAR, Erik
    • BAIGAR, Erik
    • G05B
    • G05B19/19G05B2219/41331
    • Die Erfindung betrifft ein Verfahren und eine Vorrichtung zum Verstellen eines Elements mittels eines Aktuators, der dafür ausgelegt ist, auf Grundlage einer entsprechenden Ansteuerung durch eine Steuereinheit das Element definiert zwischen einer Mehrzahl von diskreten Verstellpositionen oder/und kontinuierlich innerhalb eines Verstellbereichs zu verstellen, wobei das Element im Zusammenwirken mit dem Aktuator in Folge einer Energiezufuhr eine Schwingung um eine einer momentanen Soll-Position des Elements entsprechende, durch den Aktuator verstellbare Mittelposition ausführen kann. Es wird vorgeschlagen, dass die Steuereinheit den Aktuator für eine Verstellung des Elements von einer Ausgangsposition zu einer Zielposition derart ansteuert, dass das Element bezogen auf die Mittelposition zuerst in eine der Zielposition benachbarte Interimsposition verstellt wird, die zwischen der Ausgangsposition und der Zielposition oder jenseits der Zielposition liegt, und dass - nachdem die Interimsposition erreicht ist - mit einer definierten Zeitverzögerung das Element bezogen auf die Mittelposition von der Interimsposition in die Zielposition verstellt wird, derart, dass einer Schwingung des Elements um die momentane Mittelposition in Folge der Verstellung des Elements von der Ausgangsposition in die Interimsposition oder/und in Folge eines anderen Energieeintrags Energie entzogen wird.
    • 本发明涉及一种方法和用于通过致动器的装置,该装置适于在相应的致动由控制单元的基础上,调整元件的装置中,多个离散的调整位置之间所定义的元件和/或一个调节范围内连续可调,所述 由于电源供给元件与致动器合作,一个振动给元件的当前目标位置可以执行适当的一个,由致动器调节的装置的位置。 本发明提出,所述控制单元控制为元件的调节从初始位置到目标位置的致动器,使得所述元件的中心位置相邻的临时位置,首先获得在所述目标位置中的一个调整,即起始位置和目标位置或超出之间 目标位置,以及在于 - 在到达临时位置之后 - 相对于一个定义的时间延迟,该元件被移动到临时位置到目标位置的中心位置,从而使绕瞬时中心位置的元件的振荡由于元件从所述位移 起始位置在过渡位置和/或以不同的能量输入的能量的序列撤回。
    • 5. 发明申请
    • METHOD AND DEVICE FOR ADJUSTING AN ELEMENT
    • 方法和一种用于调节元素
    • WO01059531A2
    • 2001-08-16
    • PCT/EP2001/001454
    • 2001-02-09
    • G05B13/04G05B19/19
    • G05B19/19G05B13/042G05B2219/41331G05B2219/41367
    • The invention relates to a method and a device, whereby a galvanometer actuator (7) that is connected to the element and a control unit are provided. Said unit generates a control signal for the actuator for adjusting the element according to a desired position time history that can be freely predetermined, whereby the control unit detects the control signal by means of the desired position time history and by considering a model (4) consisting of the unit of the actuator and the element. Said model is a time discrete state space model and is selected in such a way that said model can predict the position time history of the element for a time history of the control signal and with predetermined exactness, whereby said time history of the control signal can be freely predetermined. The predetermined desired position time history is verified by the control unit and by means of a preliminary filter and is modified with regard to the feasibility thereof if required. A position sensor is provided which generates a position signal according to the position of the element and supplies said signal to the control unit that considers said position signal during detection of the control signal. Detection of the control signal by means of the model is only carried out at predetermined control times of the desired position time history. The value of the control signal is detected at a control time by requesting that the summed-up, weighted difference between the desired position and the position predicted by the model becomes minimal for the next control times for said value of the control signal. The thus detected value of the control signal is applied at least until the next control time.
    • 本发明涉及一种方法和一种装置,与元件检流计致动器(7)以及控制单元相关联的服务被提供,其提供了根据一个自由预定标定时间位置曲线考虑到模型用于致动器的元件的致动信号 (4)从所述致动器和元件,其中所述模型是离散时间状态空间模型,并确定了单元的被选择为使得它可以预测在元件的时间过程中的相应位置以预定的精度的控制信号,的一个可自由预定的时间特性,其特征在于所述预定 是所希望的位置曲线从所述控制单元,并且如果需要通过预过滤器检查在其存活力,其特征在于,提供了一种位置传感器,其提供对应于该元件的位置,并且控制单元的位置信号的多个术语修饰用品在Ermittlu所述位置信号 该控制信号,其中,从所述模型中的促动信号的判定仅在目标位置历史的时间预定的控制点发生深思熟虑的NG,则控制信号的值是目标位置历史的一个控制的时间点,所述控制信号的值的控制 时间是由它要求该目标位置和下一个控制时间模型位置的用于控制信号的这个值verhergesagten之间的积累,加权差分是最小的,而事实上确定其中至少所述控制信号的这样确定的值 被施加到随后的控制定时。
    • 6. 发明申请
    • METHOD AND DEVICE FOR ADJUSTING AN ELEMENT
    • 方法和一种用于调节元素
    • WO2004083968A3
    • 2005-05-12
    • PCT/EP2004002900
    • 2004-03-19
    • OLYMPUS BIOSYSTEMS GMBHBAIGAR ERIK
    • BAIGAR ERIK
    • G05B20060101G05B7/00G05B17/00G05B19/19G05B19/404G05B24/00H02P8/32
    • G05B19/19G05B2219/41331
    • The invention relates to a method and device for adjusting an element by means of an actuator which is configured in such a way that it can carry out an adjustment of the element in a defined manner between a plurality of discrete adjustment positions and/or in a continuous manner within a range of adjustment according to a corresponding control exerted by a control unit. After energy is supplied and in cooperation with the actuator, the element can perform an oscillation about a center position which can be adjusted by the actuator and which corresponds to a momentary set position of said element. According to the invention, the control unit controls the actuator in such a way that the element is adjusted from an initial position to a target position such that the element, in relation to the center position, is initially displaced to an interim position which is adjacent to the target position and which is located between the initial position and the target position or is located beyond the target position, such that once the interim position is reached, the element is displaced in relation to the center position from the interim position to the target position after a defined time lag, such that energy is extracted so that the element can oscillate about the momentary center position as a result of displacement of the element from the initial position to the interim position and/or as a result of other energy added.
    • 本发明涉及一种方法和用于通过致动器的装置,该装置适于在相应的致动由控制单元的基础上,调整元件的装置中,多个离散的调整位置之间所定义的元件和/或一个调节范围内连续可调,所述 由于电源供给元件与致动器合作,一个振动给元件的当前目标位置可以执行适当的一个,由致动器调节的装置的位置。 本发明提出,所述控制单元控制为元件的调节从初始位置到目标位置的致动器,使得所述元件的中心位置相邻的临时位置,首先获得在所述目标位置中的一个调整,即起始位置和目标位置或超出之间 目标位置,以及在于 - 在到达临时位置之后 - 相对于一个定义的时间延迟,该元件被移动到临时位置到目标位置的中心位置,从而使绕瞬时中心位置的元件的振荡由于元件从所述位移 起始位置在过渡位置和/或以不同的能量输入的能量的序列撤回。