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1. 发明申请

WO02017029A1 ARRANGEMENT FOR DATA TRANSMISSION BETWEEN AN EQUIPMENT FOR MANUFACTURING OF A SEMICONDUCTOR DEVICE AND A COMMUNICATING DEVICE AND METHOD FOR OPERATING THE ARRANGEMENT 审中-公开
标题翻译：用于制造半导体器件的设备和通信设备之间的数据传输安排和操作安装的方法
公开(公告)号：WO02017029A1
公开(公告)日：2002-02-28
申请号：PCT/EP2001/008720
申请日：2001-07-27
IPC分类号： G05B19/418 , H01L21/00
CPC分类号： G05B19/4185 , G05B2219/31124 , G05B2219/31145 , G05B2219/31157 , G05B2219/31176 , G05B2219/45031 , H01L21/67242 , Y02P90/18 , Y02P90/185
摘要： An arrangement for data transmission comprises an equipment (3) for manufacturing of a semiconductor device in a manufacturing process with an integrated measurement tool (5) for producing measurement data (30) correlating to the manufacturing process. A communicating device (2) performs a data exchange of logistic and process data (20) with the equipment (3) via a bus system (1) by means of a standardized data communication protocol. A measurement aplication system (6) is connected to the bus system (1) via a bus system hub (4) for sniffing exchanged logistic and process data (20) and to the measurement tool (5) for capturing produced measurement data (30). The measurement application system (6) is applicable for assigning the measurement data (30) to correlating logistic and process data (20). As a result, the measurement application system (6) and measurement tool (5) can easily be integrated into an existing bus system network (1) with one or more manufacturing equipments (3, 11, 12) connected to the network.
摘要翻译：用于数据传输的装置包括用于在制造过程中制造半导体器件的设备（3），该设备具有用于产生与制造过程相关的测量数据（30）的集成测量工具（5）。通信装置（2）通过标准化数据通信协议经由总线系统（1）与设备（3）执行物流和处理数据（20）的数据交换。测量应用系统（6）经由总线系统集线器（4）连接到总线系统（1），用于嗅探交换的物流和过程数据（20）和测量工具（5），用于捕获生成的测量数据（30）。测量应用系统（6）适用于将测量数据（30）分配给物流和过程数据（20）的相关。因此，测量应用系统（6）和测量工具（5）可以容易地集成到与网络连接的一个或多个制造设备（3,11,12）的现有总线系统网络（1）中。

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