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    • 1. 发明申请
    • METHODS AND ARRANGEMENT FOR CREATING MODELS FOR FINE-TUNING RECIPES
    • 用于为调整食谱创建模型的方法和装置
    • WO2009043008A3
    • 2009-05-22
    • PCT/US2008078129
    • 2008-09-29
    • LAM RES CORPHUANG CHUNG-HOKOH CHANG L
    • HUANG CHUNG-HOKOH CHANG L
    • H01L21/3065H01L21/20
    • G05B19/41865G05B19/41885G05B2219/23399G05B2219/32096Y02P90/20Y02P90/26
    • An arrangement for creating a model for gathering measurement data about a processed substrate by a user of a plasma processing system is provided. The arrangement includes a generic model builder, which is configured for at least creating the model. The model is a relationship between a set of input data and a set of output data. The arrangement also includes an input module, which includes the set of input data from a plurality of input sources. The arrangement includes an input conditioning and validation module, which is configured for at least determining the integrity of the set of input data. The arrangement further includes a relationship module, which is configured for at least creating a set of mathematical relationships. The arrangement yet also includes an output conditioning and validation module, which is configured for at least determining the integrity of the set of output data.
    • 提供了一种用于创建用于由等离子体处理系统的用户收集关于经处理的基板的测量数据的模型的配置。 该配置包括通用模型构建器,其被配置为至少创建模型。 该模型是一组输入数据和一组输出数据之间的关系。 该装置还包括输入模块,其包括来自多个输入源的一组输入数据。 该装置包括输入调节和验证模块,其被配置用于至少确定该组输入数据的完整性。 该装置还包括关系模块,其被配置用于至少创建一组数学关系。 该装置还包括输出调节和验证模块,其被配置用于至少确定该组输出数据的完整性。
    • 5. 发明申请
    • METHODS AND ARRANGEMENT FOR CREATING MODELS FOR FINE-TUNING RECIPES
    • 用于创建微调节目模型的方法和布置
    • WO2009043008A2
    • 2009-04-02
    • PCT/US2008/078129
    • 2008-09-29
    • LAM RESEARCH CORPORATIONHUANG, Chung-HoKOH, Chang L.
    • HUANG, Chung-HoKOH, Chang L.
    • H01L21/3065H01L21/20
    • G05B19/41865G05B19/41885G05B2219/23399G05B2219/32096Y02P90/20Y02P90/26
    • An arrangement for creating a model for gathering measurement data about a processed substrate by a user of a plasma processing system is provided. The arrangement includes a generic model builder, which is configured for at least creating the model. The model is a relationship between a set of input data and a set of output data. The arrangement also includes an input module, which includes the set of input data from a plurality of input sources. The arrangement includes an input conditioning and validation module, which is configured for at least determining the integrity of the set of input data. The arrangement further includes a relationship module, which is configured for at least creating a set of mathematical relationships. The arrangement yet also includes an output conditioning and validation module, which is configured for at least determining the integrity of the set of output data.
    • 提供了一种用于由等离子体处理系统的用户创建用于收集关于经处理的基板的测量数据的模型的装置。 该安排包括通用模型构建器,其被配置为至少创建模型。 该模型是一组输入数据和一组输出数据之间的关系。 该布置还包括输入模块,其包括来自多个输入源的一组输入数据。 该装置包括输入调节和验证模块,其被配置用于至少确定该组输入数据的完整性。 该布置还包括关系模块,其被配置为至少创建一组数学关系。 该布置还包括输出调节和验证模块,其被配置为至少确定该组输出数据的完整性。
    • 10. 发明申请
    • AUTOMATIC CONTROL STOVE
    • 自动控制台
    • WO9314350A3
    • 1993-09-02
    • PCT/BR9300003
    • 1993-01-21
    • TEIXEIRA FILHO FABIO LOPESANDREONI MARCIO DI LORENZI
    • TEIXEIRA FILHO FABIO LOPESANDREONI MARCIO DI LORENZI
    • F24C3/12
    • F24C3/124G05B2219/23386G05B2219/23399G05B2219/24048G05B2219/24151G05B2219/25362G05B2219/2643
    • Invention Patent of ''AUTOMATIC CONTROL STOVE'', which its basic operating flame system of a certain burner (1) consists on resting a pan over the support grid (2) of the referred burner (1) or oven (4), associated to a chain of integrated support subsystems, warning all the operating variants of the stove (10), and these subsystems are arranged by: a flame sensor system (F); a timer (41); a checking weight system of the food to be cooked (2); a nearness sensor system and an identifier (3) system of users and utensiles authorized to operate the stove (10); sound and/or visual alarming system; voice synthetizer system associated to other systems; an auxiliar feeding system by battery (8) (no break); a preheating (H) of the oven (4); a temperature programming system of the oven; a time programming system of the burners, a food dehydration programming system, system of vapour degree introduced during food preparation, measurement system of the oven internal temperature (OT); variable programming system (48) of (time x temperature x vapour x dehydration degree), an automatic operating system of oven air to be extracted to the outside (53) over the stove, an automatic operating system of the light foccus (LHT) (54) over the burner table, a code bar read-out system for automatic programming of different parameters (time x temperature x vapour x dehydration degree); system to protect the pan over the stove table (glass shield), an indicatory system that shows if there is the required gas to start the programming and an atmospheric compensator that adjusts the variable programming (time x temperature x vapour x dehydration degree) to the actual atmosphere condition - (temperature, atmospheric pressure and humidity); a system that allows the stove user, aside, operates it by telephone receiver, a cooking programming, already in the oven or over any burner grid and a system that allows technical assistance, aside, check all electronic and electro-mechanic devices of the stove by an external analyser (computer) connected to the telephone receiver.