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1. 发明申请

WO2009043008A3 METHODS AND ARRANGEMENT FOR CREATING MODELS FOR FINE-TUNING RECIPES 审中-公开
标题翻译：用于为调整食谱创建模型的方法和装置
公开(公告)号：WO2009043008A3
公开(公告)日：2009-05-22
申请号：PCT/US2008078129
申请日：2008-09-29
申请人： LAM RES CORP , HUANG CHUNG-HO , KOH CHANG L
发明人： HUANG CHUNG-HO , KOH CHANG L
IPC分类号： H01L21/3065 , H01L21/20
CPC分类号： G05B19/41865 , G05B19/41885 , G05B2219/23399 , G05B2219/32096 , Y02P90/20 , Y02P90/26
摘要： An arrangement for creating a model for gathering measurement data about a processed substrate by a user of a plasma processing system is provided. The arrangement includes a generic model builder, which is configured for at least creating the model. The model is a relationship between a set of input data and a set of output data. The arrangement also includes an input module, which includes the set of input data from a plurality of input sources. The arrangement includes an input conditioning and validation module, which is configured for at least determining the integrity of the set of input data. The arrangement further includes a relationship module, which is configured for at least creating a set of mathematical relationships. The arrangement yet also includes an output conditioning and validation module, which is configured for at least determining the integrity of the set of output data.
摘要翻译：提供了一种用于创建用于由等离子体处理系统的用户收集关于经处理的基板的测量数据的模型的配置。该配置包括通用模型构建器，其被配置为至少创建模型。该模型是一组输入数据和一组输出数据之间的关系。该装置还包括输入模块，其包括来自多个输入源的一组输入数据。该装置包括输入调节和验证模块，其被配置用于至少确定该组输入数据的完整性。该装置还包括关系模块，其被配置用于至少创建一组数学关系。该装置还包括输出调节和验证模块，其被配置用于至少确定该组输出数据的完整性。

2. 发明申请

WO2009043008A2 METHODS AND ARRANGEMENT FOR CREATING MODELS FOR FINE-TUNING RECIPES 审中-公开
标题翻译：用于创建微调节目模型的方法和布置
公开(公告)号：WO2009043008A2
公开(公告)日：2009-04-02
申请号：PCT/US2008/078129
申请日：2008-09-29
申请人： LAM RESEARCH CORPORATION , HUANG, Chung-Ho , KOH, Chang L.
发明人： HUANG, Chung-Ho , KOH, Chang L.
IPC分类号： H01L21/3065 , H01L21/20
CPC分类号： G05B19/41865 , G05B19/41885 , G05B2219/23399 , G05B2219/32096 , Y02P90/20 , Y02P90/26
摘要： An arrangement for creating a model for gathering measurement data about a processed substrate by a user of a plasma processing system is provided. The arrangement includes a generic model builder, which is configured for at least creating the model. The model is a relationship between a set of input data and a set of output data. The arrangement also includes an input module, which includes the set of input data from a plurality of input sources. The arrangement includes an input conditioning and validation module, which is configured for at least determining the integrity of the set of input data. The arrangement further includes a relationship module, which is configured for at least creating a set of mathematical relationships. The arrangement yet also includes an output conditioning and validation module, which is configured for at least determining the integrity of the set of output data.
摘要翻译：提供了一种用于由等离子体处理系统的用户创建用于收集关于经处理的基板的测量数据的模型的装置。该安排包括通用模型构建器，其被配置为至少创建模型。该模型是一组输入数据和一组输出数据之间的关系。该布置还包括输入模块，其包括来自多个输入源的一组输入数据。该装置包括输入调节和验证模块，其被配置用于至少确定该组输入数据的完整性。该布置还包括关系模块，其被配置为至少创建一组数学关系。该布置还包括输出调节和验证模块，其被配置为至少确定该组输出数据的完整性。

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