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1. 发明申请

WO2010120765A3 IMPLANT MASK WITH MOVEABLE MASK SEGMENTS 审中-公开
标题翻译：植物面膜与可移动的面膜部分
公开(公告)号：WO2010120765A3
公开(公告)日：2011-03-31
申请号：PCT/US2010030874
申请日：2010-04-13
申请人： VARIAN SEMICONDUCTOR EQUIPMENT , VOPAT ROBERT B , CARLSON CHARLES , WEAVER WILLIAM T
发明人： VOPAT ROBERT B , CARLSON CHARLES , WEAVER WILLIAM T
IPC分类号： H01L21/265 , H01L21/266 , H01L31/18
CPC分类号： H01L21/266 , H01J37/3171 , H01J2237/31711
摘要： This apparatus has two mask segments. Each mask segment has apertures that an ion beam may pass through. These mask segments can move between a first and second position using hinges. One or more workpieces are disposed behind the mask segments when these mask segments are in a second position. The two mask segments are configured to cover the one or more workpieces in one instance. Ions are implanted into the one or more workpieces through the apertures in the mask segments.
摘要翻译：该装置具有两个掩模段。每个掩模段具有离子束可能通过的孔。这些掩模段可以使用铰链在第一和第二位置之间移动。当这些掩模段处于第二位置时，一个或多个工件设置在掩模段后面。两个掩模段被配置为在一个实例中覆盖一个或多个工件。离子通过掩模段中的孔注入到一个或多个工件中。

2. 发明申请

WO2014093562A3 MAGNETIC MASKS FOR AN ION IMPLANT APPARATUS 审中-公开
标题翻译：用于离子植入装置的磁性掩模
公开(公告)号：WO2014093562A3
公开(公告)日：2014-09-12
申请号：PCT/US2013074516
申请日：2013-12-12
申请人： VARIAN SEMICONDUCTOR EQUIPMENT
发明人： GRANT CHRISTOPHER N , VOPAT ROBERT B
IPC分类号： H01J37/317
CPC分类号： C23C14/48 , H01J37/3171 , H01J2237/0458 , H01J2237/31711
摘要： The disclosed embodiments relate to ion implanters and particularly to securing mask frames for use in ion implantation. An apparatus (1000) is provided comprising: a mask frame (100); a ferrous slug (110) disposed in the mask frame; and a transfer mechanism (200) including a magnet (210), the magnet configured to clamp to the ferrous slug to retain the mask frame against the transfer mechanism, the transfer mechanism configured to move the mask frame while the mask is retained against the transfer mechanism. Furthermore, a method is provided comprising: moving a mask frame including a ferrous slug proximate to a carrier (300=, the mask frame retained by a transfer mechanism, the transfer mechanism including a magnet clamped to the ferrous slug; placing the mask frame on the carrier; deactivating the magnet to release the ferrous slug; and moving the transfer mechanism away from the mask frame. The method may further comprise activating a magnet (310)in the carrier to clamp to the ferrous slug.
摘要翻译：所公开的实施例涉及离子注入器，特别涉及用于离子注入的掩模框架。提供了一种装置（1000），包括：荫罩框架（100）; 设置在所述面罩框架中的铁丝塞（110）以及包括磁体（210）的传送机构（200），所述磁体被配置为夹持到所述铁质块以将所述掩模框架保持抵靠所述传送机构，所述传送机构被配置为在所述掩模保持抵抗所述传送的情况下移动所述掩模框架机制。此外，提供了一种方法，包括：移动包括靠近载体的铁丝塞的掩模框架（300 =由传送机构保持的掩模框架，传送机构包括被夹持到铁丝塞的磁体;将掩模框架放置在所述载体;去激活所述磁体以释放所述铁质块;以及将所述传递机构移动远离所述掩模框架。所述方法还可以包括激活所述载体中的磁体（310）以夹紧所述铁质块。

3. 发明申请

WO2014046903A3 OPTIMIZATION OF CONVEYOR BELTS USED FOR WORKPIECE PROCESSING 审中-公开
标题翻译：用于工件加工的传送带优化
公开(公告)号：WO2014046903A3
公开(公告)日：2014-05-22
申请号：PCT/US2013058879
申请日：2013-09-10
申请人： VARIAN SEMICONDUCTOR EQUIPMENT
发明人： VOPAT ROBERT B , DANIEL MALCOLM N , BONECUTTER LUKE , SCHALLER JASON M , CARLSON CHARLES T , WEAVER WILLIAM T
IPC分类号： H01L21/67 , H01L21/677
CPC分类号： B65G47/52 , B65G43/10 , H01L21/67276 , H01L21/67727
摘要： A system and method for the handling of workpieces in a workpiece processing system is disclosed. The system utilizes three conveyor belts, where one may be a loading belt, feeding unprocessed workpieces from its associated workpiece carrier to a processing system. A second conveyor belt may be an unloading belt, receiving processed workpieces from the processing system and filling its associated workpiece carrier. The third conveyor belt may be exchanging its workpiece carrier during this time, so that it is available to start operating as the loading belt once all of the workpieces have been removed from the workpiece carrier associated with the first conveyor belt.
摘要翻译：公开了一种处理工件处理系统中的工件的系统和方法。该系统使用三条传送带，其中一条可以是加载带，将未处理的工件从其相关联的工件载体送入处理系统。第二传送带可以是卸载带，从处理系统接收经处理的工件并且填充其相关联的工件载体。在此期间，第三传送带可以更换其工件载体，从而一旦所有工件已经从与第一传送带相关联的工件载体上移除，就可以作为装载带开始操作。

4. 发明申请

WO2011057247A3 SYSTEM AND METHOD FOR HANDLING MULTIPLE WORKPIECES FOR MATRIX CONFIGURATION PROCESSING 审中-公开
标题翻译：用于处理矩阵配置处理的多个工件的系统和方法
公开(公告)号：WO2011057247A3
公开(公告)日：2011-11-03
申请号：PCT/US2010055986
申请日：2010-11-09
申请人： VARIAN SEMICONDUCTOR EQUIPMENT , WEAVER WILLIAM T , CARRERA JAMIE A , VOPAT ROBERT B , WEBB AARON , CARLSON CHARLES T
发明人： WEAVER WILLIAM T , CARRERA JAMIE A , VOPAT ROBERT B , WEBB AARON , CARLSON CHARLES T
IPC分类号： H01L21/677 , B65G49/06 , H01L21/687
CPC分类号： H01L21/67739 , G21K5/10 , H01L21/67742 , H01L21/67766 , H01L21/68707
摘要： A system for loading workpieces into a process chamber for processing in a matrix configuration includes a conveyor configured to transport multiple workpieces in a linear fashion. A workpiece hotel is configured to receive the multiple workpieces from the conveyor. The workpiece hotel comprises a matrix of cells arranged in N columns and M floors. A pick blade is configured to insert into the hotel and retract from the hotel in order to unload a plurality of substrates from a first floor into a single row of the pick blade, and to repeat the unloading operation to form a matrix comprising a plurality of rows of substrates disposed on the pick blade. In one example, the workpiece hotel has a staggered configuration that provides individual accessibility of each hotel cell.
摘要翻译：用于将工件加载到用于以矩阵构造处理的处理室中的系统包括被构造成以线性方式输送多个工件的传送器。工件酒店被配置为从输送机接收多个工件。工件酒店包括排列在N列和M层的单元矩阵。拾取刀片被配置成插入酒店并从酒店退回，以便将多个基板从第一层卸载到单行拾取刀片中，并且重复卸载操作以形成矩阵，其包括多个设置在拾取刀片上的一排衬底。在一个例子中，工件酒店具有交错的配置，可以提供每个酒店单元的个人可访问性。

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