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    • 3. 发明申请
    • ORGANIC VAPOR JET PRINTING DEVICE WITH A CHILLER PLATE
    • 有机蒸汽喷射装置与冷却板
    • WO2011028867A1
    • 2011-03-10
    • PCT/US2010/047625
    • 2010-09-02
    • UNIVERSAL DISPLAY CORPORATIONBURROWS, Paul E.MOHAN, Siddharth Harikrishna
    • BURROWS, Paul E.MOHAN, Siddharth Harikrishna
    • C23C14/12C23C14/56
    • C23C14/12C23C14/228C23C14/564
    • A device is provided. The device includes a nozzle (310), a source of carrier gas and a source of organic molecules in fluid communication with the nozzle. The device also includes an active cooling system (322) disposed adjacent to the nozzle. Preferably, the device also includes a chamber, wherein the nozzle, and the active cooling system are disposed within the chamber. A substrate holder may also be disposed within the chamber, adapted to support a substrate beneath the nozzle, movable relative to the nozzle. Preferably, a substrate is held by the substrate holder, the substrate disposed at a distance of 0.1 to 10 mm from the active cooling system. Preferably, the device also includes a heating system (350) attached to the nozzle. The points at which the heating system are attached to the nozzle preferably includes at least one point that is zero to 5 mm from the tip of the nozzle.
    • 提供了一种设备。 该装置包括喷嘴(310),载气源和与喷嘴流体连通的有机分子源。 该装置还包括邻近喷嘴设置的主动冷却系统(322)。 优选地,该装置还包括腔室,其中喷嘴和主动冷却系统设置在腔室内。 衬底保持器还可以设置在腔室内,适于支撑喷嘴下方的衬底,其可相对于喷嘴移动。 优选地,基板被基板保持器保持,基板设置在距主动冷却系统0.1至10mm的距离处。 优选地,该装置还包括附接到喷嘴的加热系统(350)。 加热系统附接到喷嘴的点优选地包括距喷嘴的尖端为零至5mm的至少一个点。