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    • 4. 发明申请
    • LOW INSERTION LOSS MONOLITHIC LATERAL-MODE THIN-FILM PIEZOELECTRIC FILTER
    • 低插入损耗单模离子型薄膜压电过滤器
    • WO2013110041A9
    • 2013-09-06
    • PCT/US2013022418
    • 2013-01-21
    • UNIV OKLAHOMA STATE
    • ABDOLVAND REZAFATEMI SEYEDEH HEDIYEH
    • H03H9/02H03H3/007H03H9/17H03H9/24
    • H03H9/171H03H3/0073H03H9/02275H03H9/2463H03H2009/02385H03H2009/02496
    • A device has a resonant structure (106) having a diamond layer coupled to a substrate (102) with a plurality of support tethers (108). A piezoelectric material (104) overlies the resonant structure (106). The device has and input electrode (110) and an output electrode (114) overlying the piezoelectric structure for imparting an input electrical signal and receiving an output electrical signal from the piezoelectric material. The diamond layer preferrably comprises ultra-nanocrystalline diamond. The resonant structure (106) operates by acoustic coupling of two higher order mode which are two lateral-extensional-modes. Coupling of the modes can be achieved by choosing for the input and output electrodes an electrode structure with electrode fingers spaced by a distance (P) and a separation distance (D) between the opposing fingers of the input and output electrode.
    • 一种器件具有谐振结构(106),其具有金属层,该金刚石层与具有多个支撑系绳(108)的衬底(102)耦合。 压电材料(104)覆盖在谐振结构(106)上。 该装置具有和输入电极(110)和覆盖压电结构的输出电极(114),用于赋予输入电信号并从压电材料接收输出电信号。 钻石层优选地包括超级纳米晶体金刚石。 谐振结构(106)通过作为两个横向延伸模式的两个高阶模式的声耦合来操作。 可以通过选择具有间隔距离(P)的电极指的电极结构和输入和输出电极的相对指状物之间的间隔距离(D)来选择输入和输出电极来实现模式的耦合。